利索-全球专利检索

  1. 登录
  2. 注册

搜索结果

144 条记录 (耗时 0.021 秒)

    METHOD FOR FABRICATION OF A SENSOR DEVICE
    1.
    发明公开
    METHOD FOR FABRICATION OF A SENSOR DEVICE 审中-公开
    制造传感器装置的方法

    公开(公告)号：EP3214434A1

    公开(公告)日：2017-09-06

    申请号：EP16158555.9

    申请日：2016-03-03

    申请人： Sensirion AG

    发明人： Graf, Silvio ,  Bartsch, Ulrich ,  Studer, Matthias

    IPC分类号： G01N27/22

    CPC分类号： G01N27/225 ,  H01L29/43

    摘要： A method for fabrication of a sensor device (1) for measuring a parameter of a test substance, comprising: i) providing a substrate; ii) arranging on its front side a structured first protection layer (2); iii) arranging on the substrate with the structured first protection layer (2) a stack including first and second electrodes (3,4), a sacrificial layer between the first and second electrodes (3,4); and iv) etching in an etching step from the back side through the substrate such as to remove material of the semiconductor substrate and the sacrificial layer. The present invention also relates to such a sensor device (1).

    摘要翻译： 一种用于制造用于测量测试物质参数的传感器装置（1）的方法，包括：i）提供衬底; ii）在其正面上布置结构化的第一保护层（2）; ⅲ）布置与结构化第一保护层（2）的叠层包括第一和第二电极（3,4），所述第一和第二电极之间的牺牲层（3,4）在所述基板上; 以及iv）从背面通过衬底在蚀刻步骤中进行蚀刻，以去除半导体衬底和牺牲层的材料。 本发明还涉及这种传感器装置（1）。

    GASSENSOR UND VERFAHREN HERSTELLUNG EINENS GASSENSORS
    6.
    发明公开
    GASSENSOR UND VERFAHREN HERSTELLUNG EINENS GASSENSORS 审中-公开
    气体传感器工艺制造气体传感器einens

    公开(公告)号：EP1782048A1

    公开(公告)日：2007-05-09

    申请号：EP05794327.6

    申请日：2005-08-12

    申请人： Testo AG

    发明人： LANGENBACHER, Markus

    IPC分类号： G01N27/22 ,  G01N27/12

    CPC分类号： G01N27/225

    摘要： The invention relates to a gas sensor consisting of a condenser having a layered structure, including at least two electroconductive layers (2, 3) forming electrodes, at least one of said layers (3) being at least partially permeable to the gas to be detected. According to the invention, a gas-sensitive layer (4) produced by means of a sol-gel technique is arranged between the electrodes (2, 3), the composition and structure of said layer being adapted to the gas to be detected and the desired measuring region. The invention also relates to a method for producing one such gas sensor.

    BAUELEMENT ZUR GASKONZENTRATIONSMESSUNG
    8.
    发明授权
    BAUELEMENT ZUR GASKONZENTRATIONSMESSUNG 有权
    COMPONENT FOR气体浓度测量

    公开(公告)号：EP1055122B1

    公开(公告)日：2002-12-11

    申请号：EP99904826.7

    申请日：1999-01-29

    申请人： E + E ELEKTRONIK GESELLSCHAFT M.B.H.

    发明人： WAGNER, Dieter ,  HARTL, Josef

    IPC分类号： G01N33/00

    CPC分类号： G01N33/0014 ,  G01N27/225

    摘要： The invention relates to a component for gas analysis, comprising a sensor element and a stable, at least partly conductive support element with which the sensor element is connected in an electrically conductive manner. The support element has several connecting contacts so as to connect the sensor element with an evaluation circuit. The support element and the sensor element are surrounded with a first material from which at least the connecting contacts of the support element protrude. The physical form of the resulting component is selected such as to allow for automatic insertion of printed circuit boards. In addition, a second partially permeable material is arranged in at least one window area of the component, by means of which a surrounding gas enters into contact with a sensitive area of the sensor element.

    A WINDOW CAPACITIVE MOISTURE SENSOR
    9.
    发明授权
    A WINDOW CAPACITIVE MOISTURE SENSOR 失效
    湿度传感器窗玻璃

    公开(公告)号：EP0890143B1

    公开(公告)日：2001-12-19

    申请号：EP97921120.8

    申请日：1997-03-27

    申请人： MILLENNIUM SENSORS LTD.

    发明人： NETZER, Yishay

    IPC分类号： G05B1/02 ,  G05B21/00 ,  H05B1/02 ,  G01N27/12

    CPC分类号： G05D22/02 ,  B60S1/026 ,  B60S1/0822 ,  B60S1/0829 ,  B60S1/0877 ,  B60S1/586 ,  G01N27/225

    摘要： A method and apparatus for sensing condensed moisture on the inside of automotive windows (10) with essentially no sensitivity to precipitation on the outside of the window (10). The method is based on sensing the influence of the moisture on the impedance (mainly capacitive) between two electrodes (12, 13). It is intended especially for rear windows (10) where the sensing electrodes (12, 13) can be integrated with the resistive heater network (20) printed on the internal side and activate it automatically. Similarly it can be used for front windows (10) where it can automate the operation of electrical or hot-air defoggers.