Dual field of view optical system
    1.
    发明公开
    Dual field of view optical system 失效
    Optisches System mit zwei Gesichtsfeldern

    公开(公告)号:EP0883010A2

    公开(公告)日:1998-12-09

    申请号:EP98303610.4

    申请日:1998-05-08

    IPC分类号: G02B23/02 G02B17/00 G02B15/02

    摘要: A dual field optical system 20 comprises an objective A, B, which forms an intermediate image 10 and a relay E,F, which transfers radiation to a focal plane 12. The objective A, B comprises a primary mirror A and a secondary mirror B arranged in the form of a Cassegrain system and is rendered dual-field by the provision of an alternative primary mirror A 1 which is axially movable between in-use and out-of-use positions. The primary mirror A forms part of a housing J for a linear actuator 15 which is connected by co-axial rods 14 to the alternative primary mirror A 1 so that the system is both compact and of low mass due to symmetry.

    摘要翻译: 双场光学系统20包括物镜A,B,其形成中间图像10和将辐射传送到焦平面12的继电器E,F。物镜A,B包括主镜A和副镜B 以卡塞格林系统的形式布置,并且通过提供可在使用中和不在使用位置之间轴向移动的替代主镜A 1而呈现双场。 主镜A形成用于线性致动器15的壳体J的一部分,其通过同轴杆14连接到替代主镜A 1,使得系统由于对称而紧凑且质量低。

    OPTICAL IMAGING SYSTEM WITH CATOPTRIC OBJECTIVE; BROADBAND OBJECTIVE WITH MIRROR; AND REFRACTIVE LENSES AND BROADBAND OPTICAL IMAGING SYSTEM HAVING TWO OR MORE IMAGING PATHS
    3.
    发明公开
    OPTICAL IMAGING SYSTEM WITH CATOPTRIC OBJECTIVE; BROADBAND OBJECTIVE WITH MIRROR; AND REFRACTIVE LENSES AND BROADBAND OPTICAL IMAGING SYSTEM HAVING TWO OR MORE IMAGING PATHS 审中-公开
    带镜头KATROPTISCHEM,一个用于演示镜子,折射透镜和光学成像系统,宽带两个或更多的宽带目标光学成像系统

    公开(公告)号:EP2203777A4

    公开(公告)日:2012-12-12

    申请号:EP08835721

    申请日:2008-10-01

    申请人: KLA TENCOR CORP

    摘要: An optical system may include an objective having at least four mirrors including an outermost mirror with aspect ratio 0.7, central obscuration 0.7 and field of view > 0.8 mm. An optical imaging system may comprise an objective and two or more imaging paths. The imaging paths may provide two or more simultaneous broadband images of a sample in two or more modes. The modes may have different illumination and/or collection pupil apertures or different pixel sizes at the sample.

    摘要翻译: 光学系统可以包括具有在反射镜至少四个目标包括在纵横比<20最外部镜1和聚焦光学器件包括折射光学元件。 物镜在数值孔径> 0.7,中心挡<瞳孔35%提供成像。 一个目的可以具有两个或多个反射镜,其中一个具有折射模块确实密封关闭以最外镜的中心开口。 宽带成像系统可以包括一个目标和两个或更多个成像路径并提供在数值孔径成像>的视图>0.8毫米0.7和领域。 的光学成像系统可包括客观和两个或更多个成像路径。 成像路径可以在两个或更多模式提供一个样品的两个或更多个同时的宽带图像。 该模式可具有在样品不同的照明和/或收集瞳孔光圈的或不同的像素尺寸。

    HIGH SPEED OPTICAL SYSTEM
    4.
    发明公开
    HIGH SPEED OPTICAL SYSTEM 失效
    高速光学系统

    公开(公告)号:EP0770224A1

    公开(公告)日:1997-05-02

    申请号:EP95922012.0

    申请日:1995-06-07

    IPC分类号: G02B17

    摘要: The present invention provides a lens system and/or a method of imaging onto an imaging detector. The lens system and method are used in focusing substantially parallel incident light onto the said detector. The lens system comprises: (a) a concentric spherical Cassegrain-like system of two mirrors; (b) a concentric spherical focal reducer; (c) a transfer lens system which combines the concentricity of the Cassegrain-like system of two mirrors and of the contrentric spherical focal reducer by imaging the first centre of concentricity that is of the system of two mirrors onto the second centre of cencentricity, that is, of the focal reducer to thereby provide a single optically cencentric system which combines their advantages. Also present in the system are: (d) means to correct the sum of the spherical aberation of all the spherical mirros in the entire system and (e) an aperture stop.

    IMAGING OPTICAL SYSTEM INCLUDING A TELESCOPE AND AN UNCOOLED WARM-STOP STRUCTURE
    7.
    发明公开
    IMAGING OPTICAL SYSTEM INCLUDING A TELESCOPE AND AN UNCOOLED WARM-STOP STRUCTURE 有权
    IMAGE管辖用望远镜和温暖的非制冷STOP结构光学系统

    公开(公告)号:EP1779170A2

    公开(公告)日:2007-05-02

    申请号:EP05807708.2

    申请日:2005-07-29

    申请人: Raytheon Company

    IPC分类号: G02B17/08

    摘要: An all-reflective telescope has, in order, a positive-optical-power primary mirror, a negative-optical-power secondary mirror, a positive-optical-power tertiary mirror, a negative-optical-power quaternary mirror, and a positive-optical-power field lens. The mirrors and lens are axisymmetric about a beam axis. The light beam is incident upon an infrared detector after reflecting from the quaternary mirror. A cooling housing encloses the detector and the field lens, but does not enclose any of the mirrors. An uncooled warm-stop structure outside of the cooling housing but in a field of view of the detector is formed as a plurality of facets with reflective surfaces oriented to reflect a view of an interior of the cooling housing back to the interior of the cooling housing.

    IMAGING OPTICAL SYSTEM INCLUDING A TELESCOPE AND AN UNCOOLED WARM-STOP STRUCTURE
    10.
    发明授权
    IMAGING OPTICAL SYSTEM INCLUDING A TELESCOPE AND AN UNCOOLED WARM-STOP STRUCTURE 有权
    IMAGE管辖用望远镜和温暖的非制冷STOP结构光学系统

    公开(公告)号:EP1779170B1

    公开(公告)日:2009-06-17

    申请号:EP05807708.2

    申请日:2005-07-29

    申请人: Raytheon Company

    IPC分类号: G02B17/08

    摘要: An all-reflective telescope has, in order, a positive-optical-power primary mirror, a negative-optical-power secondary mirror, a positive-optical-power tertiary mirror, a negative-optical-power quaternary mirror, and a positive-optical-power field lens. The mirrors and lens are axisymmetric about a beam axis. The light beam is incident upon an infrared detector after reflecting from the quaternary mirror. A cooling housing encloses the detector and the field lens, but does not enclose any of the mirrors. An uncooled warm-stop structure outside of the cooling housing but in a field of view of the detector is formed as a plurality of facets with reflective surfaces oriented to reflect a view of an interior of the cooling housing back to the interior of the cooling housing.