公开(公告)号：EP2513697A2

公开(公告)日：2012-10-24

申请号：EP10792877.2

申请日：2010-12-03

申请人： Carl Zeiss SMT GmbH

发明人： MANN, Hans-Jürgen ,  ENDRES, Martin ,  SHAFER, David ,  WARM, Berndt ,  HERKOMMER, Alois

IPC分类号： G02B17/06

CPC分类号： G03F7/70233 ,  G02B17/0652 ,  G03F7/702 ,  G03F7/70275

摘要： An imaging optics is provided for lithographic projection exposure for guiding a bundle of imaging light with a wavelength shorter than 193 nm via a plurality of mirrors for beam-splitter-free imaging of a reflective object in an object field in an object plane into an image field in an image plane. An object field point has a central ray angle which is smaller than 3°. At least one of the mirrors is a near-field mirror. The imaging optics which can allow for high-quality imaging of a reflective object.

摘要翻译： 一种用于光刻投影曝光的成像光学器件（16），用于借助多个反射镜（M1至M6）引导波长短于193nm的成像光束（3），用于反射物体的无分束器成像 （12）在物面（5）中的物场（4）中转换成像面（18）中的像场（17），具有小于3°的中心光线角度（α）的物场点 。 至少一个反射镜（M1至M6）是近场反射镜。 其结果是成像光学器件可以对反射物体进行高质量成像。

公开(公告)号：EP2385405A1

公开(公告)日：2011-11-09

申请号：EP11160401.3

申请日：2008-08-08

申请人： Universite Clermont 1 ,  Stehle, Robert André Marcel ,  MB Optique ,  Bray, Michael

发明人： Stehle, Robert André Marcel ,  Bray, Michael ,  Sarry, Laurent ,  Zeghers, Eric

IPC分类号： G02B17/06 ,  G03B37/04 ,  H04N1/00

CPC分类号： G02B17/0652 ,  G03B21/28 ,  G03B37/04 ,  G03B37/06

摘要： La présente invention concerne un procédé de projection, comprenant:
- une projection d'une image mère (23) le long d'un axe de projection (11),
- une réflexion d'au moins une partie de l'image mère par un miroir convexe (3),
- une projection sur un environnement tridimensionnel (7,8a,8b) de l'image mère réfléchie par le miroir convexe,
- une acquisition d'au moins une image de l'environnement tridimensionnel,
- une modélisation de l'environnement tridimensionnel à partir de l'au moins une image de l'environnement tridimensionnel, et
- une construction de l'image mère en fonction d'une position d'un observateur (22) et de la modélisation de l'environnement tridimensionnel, de sorte que l'observateur observant de sa position la projection de l'image mère sur l'environnement observe une scène à partir d'un point de vue virtuel (P).
L'invention concerne également le dispositif de projection correspondant.

摘要翻译： 设备（1）具有投影仪（2），其布置成沿着投影轴线（11）以立体角投影母像。 布置凸面镜（3）以部分地反射图像并将图像投影在三维环境中，例如， 大厅的横向和连续墙（7），地板（8）和天花板（9）。 反射镜具有围绕旋转轴线（12）的旋转对称性。 拍摄单元由照相机（4）和相机旋转单元（5）形成，用于从环境中发出的光线（20）获取环境的图像。 投影方法也包含独立权利要求。

公开(公告)号：EP2258672A1

公开(公告)日：2010-12-08

申请号：EP10005658.9

申请日：2010-05-31

申请人： NEC TOSHIBA Space Systems, Ltd.

发明人： Tsuno, Katsuhiko ,  Suyama, Shoko ,  Ito, Yoshiyasu

IPC分类号： C04B35/573 ,  C04B37/00 ,  G02B23/16 ,  G02B5/08 ,  G02B7/183

CPC分类号： G02B17/0652 ,  C04B35/565 ,  C04B35/573 ,  C04B37/005 ,  C04B37/006 ,  C04B37/008 ,  C04B2235/3826 ,  C04B2235/422 ,  C04B2235/428 ,  C04B2235/616 ,  C04B2237/083 ,  C04B2237/16 ,  C04B2237/365 ,  C04B2237/52 ,  C04B2237/525 ,  G02B7/183 ,  G02B23/16 ,  Y10T428/12993

摘要： An optical device has a reflecting mirror using a particle-dispersed silicon material including silicon carbide and silicon. The reflecting mirror includes a plurality of segments joined to each other by reaction sintering. Producing the segments is easy in comparison with that of a reflecting mirror of one piece. Accordingly, it is possible to reduce probability of breakage of the segments and to shorten process time of production of a reflecting mirror.

摘要翻译： 光学器件具有使用包括碳化硅和硅的颗粒分散硅材料的反射镜。 反射镜包括通过反应烧结而彼此接合的多个区段。 与一块反射镜相比，生产这些部分很容易。 因此，可以降低段的破损概率并缩短反射镜制造的处理时间。

公开(公告)号：EP2203777A1

公开(公告)日：2010-07-07

申请号：EP08835721.5

申请日：2008-10-01

申请人： KLA-Tencor Corporation

发明人： HWANG, Shiow-Hwei ,  KIRK, Gregory, L. ,  JEONG, Hwan, J. ,  SHAFER, David ,  HUDYMA, Russell

IPC分类号： G02B27/00

CPC分类号： G02B17/0808 ,  G02B17/0652 ,  G02B17/084 ,  G02B21/04

摘要： An optical system may include an objective having at least four mirrors including an outermost mirror with aspect ratio 0.7, central obscuration 0.7 and field of view > 0.8 mm. An optical imaging system may comprise an objective and two or more imaging paths. The imaging paths may provide two or more simultaneous broadband images of a sample in two or more modes. The modes may have different illumination and/or collection pupil apertures or different pixel sizes at the sample.

公开(公告)号：EP1335228B1

公开(公告)日：2006-01-11

申请号：EP03250720.4

申请日：2003-02-05

申请人： CANON KABUSHIKI KAISHA

发明人： Terasawa, Chiaki,Canon Kabushiki Kaisha

IPC分类号： G02B17/06 ,  G02B13/14 ,  G03F7/20

CPC分类号： G03F7/70233 ,  G02B17/0652 ,  G02B17/0657 ,  G03F7/70275

公开(公告)号：EP1456706B1

公开(公告)日：2005-07-20

申请号：EP02805361.9

申请日：2002-12-10

申请人： Thales

发明人： DOITTAU, François-Xavier ,  MOREAU, Dominique ,  ROLLIN, Joel

IPC分类号： G02B17/08 ,  G02B23/06

CPC分类号： G02B17/0652 ,  G02B17/0694 ,  G02B17/0808 ,  G02B17/0896 ,  G02B23/06

摘要： The invention concerns the field of multiple field multispectral optical combination designed to be incorporated in an optical device, in particular an imaging device. Said multiple field optical combination is of the Cassegrain type having an image focal plane (PFI), comprising a primary perforated concave mirror (M1) stationary relative to the image focal plane and a secondary convex mirror (M2), the structure and the position, in small field configuration, of the mirrors being such that the light which is derived from an external scene and designed to be focused at the image focal plane is in the interval first reflected by the first primary mirror then by the secondary mirror, further comprising a second primary perforated concave mirror (M5) mobile relative to the image focal plane, the structure and the position, in median field configuration, of the mirrors being such that the light which is derived from an external scene and designed to be focused at the image focal point is in the interval first reflected by the second primary mirror then by the secondary mirror, the secondary mirror being mobile relative to the image focal plane, and the optical combination further comprising a wide field focusing optics (OFGC) mobile relative to the image focal plane, the structure and the position, in wide field configuration, of the mirrors and of the wide field focusing optics being such that the light derived from an external scene and designed to be focused at the image focal plane via the wide field focusing optics in not reflected by any of said primary or secondary mirrors in the interval.

公开(公告)号：EP1335228A1

公开(公告)日：2003-08-13

申请号：EP03250720.4

申请日：2003-02-05

申请人： CANON KABUSHIKI KAISHA

发明人： Terasawa, Chiaki,Canon Kabushiki Kaisha

IPC分类号： G02B17/06 ,  G02B13/14 ,  G03F7/20

CPC分类号： G03F7/70233 ,  G02B17/0652 ,  G02B17/0657 ,  G03F7/70275

摘要： A cataoptric projection optical system for projecting a pattern on an object surface onto an image surface and for serving as an imaging system that forms an intermediate image includes first, second, third and fourth mirrors serving substantially as a coaxial system so as to sequentially reflect light from an object side to an image side, and being arranged so that light from the object surface to the first mirror may intersect light from the second mirror to the third mirror.

摘要翻译： 用于将物体表面上的图案投影到图像表面上并用作形成中间图像的成像系统的计算投影光学系统包括基本上用作同轴系统的第一，第二，第三和第四反射镜，以顺序地反射光 从物体侧到图像侧，并且被布置成使得从物体表面到第一反射镜的光可以与从第二反射镜到第三反射镜的光相交。

公开(公告)号：EP1212649A1

公开(公告)日：2002-06-12

申请号：EP00962587.2

申请日：2000-09-08

申请人： CENTRE NATIONAL DE RECHERCHES DE SPACIALES

发明人： COSTES, Vincent

IPC分类号： G02B17/06 ,  G02B21/22

CPC分类号： G02B17/0652 ,  G02B17/0631 ,  G02B17/0694 ,  G02B23/04 ,  G02B23/06

摘要： The invention concerns a device for acquiring stereoscopic images comprising a primary mirror (1) or a near-parabolic mirror, a secondary mirror (2) located on the primary mirror optical axis between said primary mirror and its focal point, tertiary reflecting means (4a, 4b, 5a, 5b, 7a, 7b, 8) arranged relative to the primary mirror on the side opposite the secondary mirror reflecting along two directions different from that of the primary mirror optical axis the optical beams received by the primary mirror along two specific directions of incidence, the primary mirror being capable of being traversed by the tertiary beams, said tertiary reflecting means comprising means for focusing the optical beams which they receive along said two directions onto image acquisition means.

公开(公告)号：EP2856093A1

公开(公告)日：2015-04-08

申请号：EP13713271.8

申请日：2013-03-08

申请人： Raytheon Company

发明人： MCCOMAS, Brian K. ,  PFIBSEN, Kent, P.

IPC分类号： G01J3/02 ,  G01J3/28 ,  G01J3/36 ,  G02B17/06 ,  H01L27/146 ,  H04N5/33

CPC分类号： G01J3/0291 ,  G01J3/021 ,  G01J3/0237 ,  G01J3/0286 ,  G01J3/2823 ,  G01J3/36 ,  G02B17/0652 ,  H04N1/0281 ,  H04N5/2258 ,  H04N5/2259 ,  H04N9/09

摘要： A multi-wavelength optical imaging system and method. In one example, an optical imaging system includes an integrated dewar assembly housing a staring detector that includes a plurality of focal plane array sensors spatially distributed over a common focal plane and aligned relative to one another, each of the plurality of focal plane array sensors being configured for a different waveband. The optical imaging system further includes foreoptics, such as a telescope, optically coupled to the integrated dewar assembly and configured to direct and focus light from an entrance pupil of the optical imaging system into an optical beam incident on at least one of the plurality of focal plane array sensors.

摘要翻译： 一种多波长光学成像系统和方法。 在一个示例中，光学成像系统包括集成的杜瓦瓶组件，该集成杜瓦瓶组件容纳起始检测器，起始检测器包括空间分布在公共焦平面上并且相对于彼此对齐的多个焦平面阵列传感器，多个焦平面阵列传感器中的每一个 配置为不同的波段。 光学成像系统进一步包括光学耦合到集成的杜瓦瓶组件并被配置为将来自光学成像系统的入瞳的光引导和聚焦成入射到多个焦点中的至少一个上的光束的诸如望远镜的诸如望远镜 平面阵列传感器。

公开(公告)号：EP2810117A1

公开(公告)日：2014-12-10

申请号：EP13710094.7

申请日：2013-01-31

申请人： Siemens Energy, Inc.

发明人： BALEINE, Erwan

IPC分类号： G02B23/24

CPC分类号： G02B17/0652 ,  G01N21/00 ,  G01N21/95 ,  G01N21/954 ,  G02B23/2492

摘要： An optical inspection system for nondestructive internal visual inspection and non-contact infra-red (IR) temperature monitoring of an online, operating power generation turbine. The optical inspection system includes an optical tube having a viewing port, at least one reflective mirror or a mirror array having a reflectivity spectral range from 550nm to 20µm, and capable of continuous operation at temperatures greater than 932 degrees Fahrenheit (500 degrees Celsius), and a transparent window with high transmission within the same spectral range mounted distal the viewing port. The same optical mirror array may be used to measure selectively surface temperature of metal turbine blades in the near IR range (approximately 1µm wavelength) and of thermal barrier coated turbine blades in the long IR range (approximately 10µm wavelength).