AMPLIFIED PIEZO ACTUATOR WITH COARSE ADJUSTMENT

    公开(公告)号:EP3180808B1

    公开(公告)日:2018-12-12

    申请号:EP15831938.4

    申请日:2015-08-13

    申请人: Thorlabs, Inc.

    IPC分类号: H01L41/08 H02N2/06

    摘要: A piezoelectric actuator with integrated features to provide coarse position adjustment of a pushing threaded rod and also mechanically amplified piezo motion for fine position adjustment is presented here in three design variants. The mechanical amplifier houses one or more piezo stacks in longitudinal axis with preload to translate an amplified motion in the order of a few times in the transverse axis, perpendicular to the piezo stack motion. The piezo amplifier output travel is transmitted to the threaded rod with a ball at the end to push a desired surface for position adjustments and motion translation in application such as a mirror mount.

    SMALL SIZE MIRROR TILT ACTUATOR
    3.
    发明授权

    公开(公告)号:EP2455795B1

    公开(公告)日:2018-12-12

    申请号:EP10799690.2

    申请日:2010-06-01

    IPC分类号: G02B26/10 H04B7/185

    摘要: A mirror tilt actuator has n plate springs (40a to 40d) and m drive means (50a to 50d). The plate springs (40a to 40d) are arranged such that a cross-sectional plane passing through the center of the thickness of each of the plate springs is on the same plane as the reflection surface of a mirror (20), and are arranged rotationally symmetric to each other about the center (O20). The plate springs each have a section extending along the circumference of the mirror holder, the section being obtained by dividing the perimeter of the mirror holder substantially into n sections. The drive means (50a to 50d) are arranged such that a cross-sectional plane passing through the center of torque generated by each of the drive means is on the same plane as the reflection surface of the mirror (20) and are rotationally symmetric to each other about the center (O20).

    SMALL SIZE MIRROR TILT ACTUATOR
    7.
    发明公开

    公开(公告)号:EP2455795A4

    公开(公告)日:2017-12-27

    申请号:EP10799690

    申请日:2010-06-01

    IPC分类号: G02B26/10 H04B7/185

    摘要: A mirror tilt actuator has n plate springs (40a to 40d) and m drive means (50a to 50d). The plate springs (40a to 40d) are arranged such that a cross-sectional plane passing through the center of the thickness of each of the plate springs is on the same plane as the reflection surface of a mirror (20), and are arranged rotationally symmetric to each other about the center (O20). The plate springs each have a section extending along the circumference of the mirror holder, the section being obtained by dividing the perimeter of the mirror holder substantially into n sections. The drive means (50a to 50d) are arranged such that a cross-sectional plane passing through the center of torque generated by each of the drive means is on the same plane as the reflection surface of the mirror (20) and are rotationally symmetric to each other about the center (O20).

    JUSTIERBARE LAGERUNGSANORDNUNG FÜR EIN RELATIV ZU EINER BASIS PRÄZISE ZU POSITIONIERENDES OBJEKT
    9.
    发明公开
    JUSTIERBARE LAGERUNGSANORDNUNG FÜR EIN RELATIV ZU EINER BASIS PRÄZISE ZU POSITIONIERENDES OBJEKT 审中-公开
    可调STORAGE DEVICE FOR A相对于基座PRECISE对象被定位

    公开(公告)号:EP3063578A1

    公开(公告)日:2016-09-07

    申请号:EP14816110.2

    申请日:2014-10-28

    发明人: KLAFFERT, Thomas

    IPC分类号: G02B7/182

    摘要: Adjustable mounting arrangement for an object (15, 16) to be positioned precisely relative to a base (10), more particularly for a secondary mirror of an optical reflecting telescope, wherein the mounting arrangement has at least one carrying structure (20) connected to the base (10) and the object (15, 16), wherein the carrying structure (20) has at least two struts (22, 23, 24, 25) running non-parallel to one another, and wherein each strut (22, 23, 24, 25) is assigned a drivable actuator element (22', 23', 24', 25') in such a way that the actuator element (22', 23', 24', 25') acts on the strut (22, 23, 24, 25) with a force that deflects the strut (22, 23, 24, 25) transversely with respect to the longitudinal extent thereof, wherein the carrying structure (20) is mounted in an articulated manner relative to the base (10).