ELECTRON SOURCE, X-RAY SOURCE AND DEVICE USING X-RAY SOURCE
    2.
    发明公开
    ELECTRON SOURCE, X-RAY SOURCE AND DEVICE USING X-RAY SOURCE 审中-公开
    电子源,X射线源和使用X射线源的器件

    公开(公告)号:EP3188213A1

    公开(公告)日:2017-07-05

    申请号:EP15813227.4

    申请日:2015-08-19

    IPC分类号: H01J35/02 H01J35/06

    摘要: The present disclosure is directed to an electron source and an X-ray source using the same. The electron source of the present invention comprises: at least two electron emission zones, each of which comprises a plurality of micro electron emission units, wherein the micro electron emission unit comprises: a base layer, an insulating layer on the base layer, a grid layer on the insulating layer, an opening in the grid layer, and an electron emitter that is fixed at the base layer and corresponds to a position of the opening, wherein the micro electron emission units in the same electron emission zone are electrically connected and simultaneously emit electrons or do not emit electrons at the same time, and wherein different electron emission zones are electrically partitioned.

    摘要翻译: 本公开涉及电子源和使用其的X射线源。 本发明的电子源包括:至少两个电子发射区,每个电子发射区包括多个微电子发射单元,其中微电子发射单元包括:基层,基层上的绝缘层,栅格 在所述绝缘层上的开口,在所述栅格层中的开口,以及固定在所述基底层并对应于所述开口的位置的电子发射体,其中同一电子发射区中的所述微电子发射单元电连接并且同时 同时发射电子或不发射电子,并且其中不同的电子发射区域被电分配。