PIEZOELECTRIC DEVICE AND PIEZOELECTRIC MODULE

    公开(公告)号:EP4404588A1

    公开(公告)日:2024-07-24

    申请号:EP22869902.1

    申请日:2022-09-08

    IPC分类号: H04R17/00

    摘要: A piezoelectric device (100) including: a substrate having a cavity (4); a piezoelectric film (3) covering the cavity (4) and laminated and supported on the substrate (1); and a first electrode (5a) and a second electrode (5b) being provided to be spaced apart from each other so as to sandwich a part of the piezoelectric film (3). The first electrode (5a) and the second electrode (5b) pass through the piezoelectric film (3) in the thickness direction of the piezoelectric film (3) and are disposed above the cavity (4), an input signal is converted to an output signal based on displacement in a direction of application of a voltage to the piezoelectric film (3) polarized in the direction of application of the voltage by applying the voltage between the first electrode (5a) and the second electrode (5b), and a miniature piezoelectric device with high sensitivity is provided that utilizes the longitudinal effect of the piezoelectric effect.