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    EDGE SCANNING APPARATUS AND METAL CONTAMINATION MEASUREMENT DEVICE
    3.
    发明公开
    EDGE SCANNING APPARATUS AND METAL CONTAMINATION MEASUREMENT DEVICE 审中-实审

    公开(公告)号：EP4386818A1

    公开(公告)日：2024-06-19

    申请号：EP21953371.8

    申请日：2021-11-22

    申请人： Jiangsu Leuven Instruments Co. Ltd

    发明人： YU, Xiang ,  CHENG, Shiran ,  ZHANG, Huaidong ,  YANG, Chaoquan ,  CUI, Hushan ,  LIU, Pengfei ,  HU, Dongdong ,  XU, Kaidong

    IPC分类号： H01L21/66

    CPC分类号： H01L22/00 ,  Y02P70/10

    摘要： An edge scanning apparatus and a metal contamination measurement device. The edge scanning apparatus comprises: a rotating component (1), which comprises a carrying portion (11), the carrying portion (11) being used for carrying a sample (A) to be tested, wherein the rotating component (1) can drive the sample (A) to be tested to rotate; a scanning liquid supplying and recycling component, which comprises a nozzle (2) used for discharging and recycling scanning liquid droplets; and a bearing component (3), which comprises a supporting arm (31), wherein the scanning liquid droplets are accommodated between the nozzle (2) and the supporting arm (31), and the scanning liquid droplets can surround an edge portion of the sample (A) to be detected. By means of the edge scanning apparatus, the edge portion of the sample (A) to be detected can be scanned and sampled, so as to provide conditions for sampling and measuring the edge portion of the sample (A) to be detected.

    COOLING MEDIUM INJECTION DEVICE
    4.
    发明公开
    COOLING MEDIUM INJECTION DEVICE 审中-实审

    公开(公告)号：EP4385655A1

    公开(公告)日：2024-06-19

    申请号：EP22858079.1

    申请日：2022-03-08

    申请人： NT Tool Corporation

    发明人： ISHIKAWA Hitoshi ,  SUZUKI Hiroyuki

    IPC分类号： B23Q11/00 ,  B23Q17/00

    CPC分类号： Y02P70/10 ,  B23Q17/00 ,  B23Q11/10 ,  B23Q11/00 ,  B23Q2220/00820130101 ,  B23Q11/1023

    摘要： [Object] To provide a cooling medium spray device that can increase the pressure of a cooling medium supplied from a main shaft of a machine tool.
    [Solution] A rotary part of a pump 200 is connected to a body member 110. In a state in which the body member 110 has been attached to a main shaft 20 of a machine tool 10, a rotation stopping pin 310 of a rotation stopping device 300 fits in a fitting hole 41 of the machine tool 10 and abuts on a wall surface 41a of the fitting hole 41. Furthermore, the rotation stopping pin 310 and a rotation stopping lever 340 move toward one side in an axial direction against an elastic force of a spring 320, and engagement of the rotation stopping lever 340 with an engagement hole 113 provided in the body member 110 is released. Thus, a support part (a cover 150 and a case 160) is fixed to the machine tool 10, and rotation of the support part around the body member 110 is prevented. Furthermore, rotation of the body member 110 relative to the support part becomes possible. A force detecting sensor 50 outputs a force detection signal indicating a force with which the pin 310 is pressing against the wall surface 41a.