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公开(公告)号：EP1973668B1
公开(公告)日：2010-04-28
申请号：EP07703440.3
申请日：2007-02-13
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公开(公告)号：EP1973668A1
公开(公告)日：2008-10-01
申请号：EP07703440.3
申请日：2007-02-13
摘要： The surface of a substrate (10) can be uniformly covered with a liquid if the substrate is fixed in a holding device (12a, 12b), which together with the surface of the substrate forms a process volume into which the liquid can be introduced onto the surface of the substrate by means of a wetting device (14, 50), and if the holding device with the substrate is set in a tumbling movement by means of a tumbling device (18a-18c), so that the liquid is uniformly distributed on the surface of the substrate.
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3.发明公开SUBSTRATE PROCESSING UNIT AND SUBSTRATE PROCESSING APPARATUS 审中-公开SUBSTRATVERARBEITUNGSEINHEIT UNDSTRATVERARBEITUNGSVORRICHTUNG
公开(公告)号：EP1757371A1
公开(公告)日：2007-02-28
申请号：EP05738627.8
申请日：2005-04-27
申请人： EBARA CORPORATION
发明人： KATSUOKA, Seiji , SEKIMOTO, Masahiko , WATANABE, Teruyuki , KATO, Ryo , YOKOYAMA, Toshio , SUZUKI, Kenichi , KOBAYASHI, Kenichi
CPC分类号： H01L21/288 , C23C2/003 , C23C18/1619 , C23C18/163 , C23C18/1642 , H01L21/6708 , H01L21/67742 , H01L21/6838 , H01L21/76849
摘要： A substrate processing unit, by employing the processing unit to carry out different processings with different processing liquids, can make a reduction in the space for carrying out the entire process of substrate processing and a reduction in the energy necessary for substrate transportation. The substrate processing unit includes: a vertically-movable substrate holder (72) for holding a substrate (W); a pan (70) surrounding the periphery of the substrate holder (72); a cell (74), located below the substrate holder (72) and within the pan (70), having in its interior a chemical processing section (84) ; and a spray processing cup (74), capable of closing the top opening of the cell (74), having a plurality of spray nozzles (116, 118) for separately spraying at least two types of processing liquids; wherein the pan (70) and the cell (74) has liquid discharge lines (78, 92) individually.
摘要翻译： 基板处理单元通过使用处理单元对不同的处理液进行不同的处理，可以减少用于进行基板处理的整个处理的空间，并降低基板输送所需的能量。 基板处理单元包括：用于保持基板（W）的可垂直移动的基板保持器（72）; 围绕所述衬底保持器（72）的周边的锅（70）; 位于所述基板保持器（72）下方并在所述盘（70）内的单元（74），在其内部具有化学处理部分（84）; 以及能够关闭所述电池单元（74）的顶部开口的喷雾处理杯（74），具有用于分别喷射至少两种类型的处理液体的多个喷嘴（116,118）; 其中所述盘（70）和所述单元（74）分别具有液体排出管线（78,92）。
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4.发明公开PATTERNING METHOD, FILM FORMING METHOD, PATTERNING DEVICE, FILM FORMING DEVICE, ELECTRO-OPTIC DEVICE AND PRODUCTION METHOD THEREFOR, ELECTRONIC APPARATUS, AND ELECTRONIC DEVICE AND PRODUCTION METHOD THEREFOR 审中-公开构筑方法，FILM训练方法，结构装置，电影培训机构; 电光装置和方法，其用于生产电子器件和电子设备及工艺
公开(公告)号：EP1427262A4
公开(公告)日：2006-08-23
申请号：EP02765527
申请日：2002-09-12
申请人： SEIKO EPSON CORP
发明人： MIYAZAWA TAKASHI
IPC分类号： H05B33/10 , B05C5/00 , B05C9/08 , B05C15/00 , C23C14/04 , H01L27/32 , H01L51/00 , H01L51/30 , H01L51/40 , H01L51/50 , H05B33/14 , B41J2/01
CPC分类号： H01L51/001 , C23C14/04 , C23C14/228 , H01L27/3244 , H01L27/3281 , H01L51/0002 , H01L51/0013 , H01L51/0038 , H01L51/0039 , H01L51/0043 , H01L51/0052 , H01L51/0059 , H01L51/0062 , H01L51/0077 , H01L51/0081 , H01L51/0084 , H01L51/0085
摘要： A novel patterning method improved in degree of freedom in material selection, a film forming method, a patterning device, a film forming device, an electro-optic device and a production method therefor, an electronic apparatus, an electronic device and a production method therefor. A patterning device (1) comprising a vacuum chamber (2) controllable to a high degree of vacuum, a nozzle (3) connected to a material supply source (7) and mounted to the vacuum chamber (2), for supplying materials from the material supply source (7) into the vacuum chamber (2), and a substrate stage (4) provided in the chamber (2), for holding and fixing a substrate (S), a moving mechanism (11) being provided to the nozzle (3) or the substrate stage (4) to relatively move their positions. Ideally, it is preferable to generate a free jet of material molecules to effect patterning (free jet patterning) using this free jet. Accordingly, a high-accuracy patterning is made available.
摘要翻译： 增加提供了一种用于在其中一定程度的在材料选择的灵活性图案的新方法，并且此外，用于形成膜，图案化装置，膜形成装置的方法，对电光学装置及其制造方法的 同样，电子设备，以及电子设备以及用于制造设置有同样的方法。 设置有真空室2能够以高真空度的，连接到材料供给源7的喷嘴3被调整，同时被安装在真空室2，从而作为图案化装置1从供给材料 材料供给源7进入真空室2，和一个基片台4在真空腔室2布置为保持固定基片S的喷嘴3或基底台4相对移动设置有移动机构11 它们的位置。 理想情况下，希望没产生材料分子的自由射流，和图案化使用该自由射流（自由喷射图案化）进行。 。根据这一点，图案化可以以更高的精度进行。
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5.发明授权
公开(公告)号：EP0685696B1
公开(公告)日：1999-03-24
申请号：EP95902955.4
申请日：1994-12-14
CPC分类号： F27D99/0073 , C21D9/565 , F27B9/045 , F27B9/28 , F27D1/1858 , F27D2003/0053 , F27D2003/0067 , F27D2021/0071 , F27D2099/0078 , F27M2001/1578 , H05F3/02 , Y10S277/906 , Y10S277/919 , Y10S277/938
摘要： A sealing device used for preventing the risk of explosion or fire caused by the electrostatic spark occurring at the sealing section of doorway of a partition using flammable gases liable to cause explosion or fire in a continuous annealing furnace for conducting bright annealing or nonoxidative annealing of metal strips, continuous coating equipment, and the like, and for preventing the surface of a strip from being scuffed or scratched. The device is provided in the sealing section and comprises a combination of metallic sealing pieces (16), elastic pads (17) provided on the surface of each piece (16), and elastic rotating rolls (18) pressed against a metal strip (1) and the pads (17). The pad (17) has a surface resistivity of 10-3-106 Φ.cm and is made of a carbon-containing fiber, a chemical fiber made from polypyrrole, which is a conductive polymer with a conjugated electron system, a fiber prepared by treating an acrylic fiber with a copper (II) compound and a sulfur compound, or a conductive nonwoven fabric mainly comprising these fibers.
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公开(公告)号：EP0710157A1
公开(公告)日：1996-05-08
申请号：EP93919706.0
申请日：1993-07-19
发明人： EKENBERG, Tor
CPC分类号： B05B13/0431
摘要： PCT No. PCT/NO93/00117 Sec. 371 Date Jan. 19, 1996 Sec. 102(e) Date Jan. 19, 1996 PCT Filed Jul. 19, 1993 PCT Pub. No. WO95/03133 PCT Pub. Date Feb. 2, 1995A robot installation for painting objects inside a painting booth (CA) having walls (WA, WB) isolating the object (AU) to be painted from the surroundings, is suitably integrated in the booth walls in order to save interior booth space and achieve a robot operation better adapted to the painting process. The installation includes at least one main robot shaft (RS) associated with a painting tool and protruding through at least one slot (LS) penetrating the booth walls for servo-controlled movements along such slots and possibly also in the direction of and/or about the axis of the shaft. Servo-drive means are disposed for controlling the robot shaft movements in accordance with a preprogrammed motional pattern for the painting tool, including tracking of a travelling object to be painted. The slot is disposed on a rotatable element e.g., a disk or cylinder (CD,SC) supported in or on the booth walls, and the servo-drive means includes means for controlling the rotational movements of the rotatable element in accordance with a preprogrammed motional pattern.
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公开(公告)号：EP0309275A1
公开(公告)日：1989-03-29
申请号：EP88308866.8
申请日：1988-09-23
CPC分类号： B05B16/40 , Y10S118/07
摘要： A spray booth (1) for use when spraying artwork is of pyramidal shape, and foldable for storage. An aerosol spray may be applied to the artwork via an aperture (6) at the apex of the pyramid which can then be closed by e.g. a flap (7) while the aerosol settles.
摘要翻译： 用于喷涂艺术品时使用的喷雾室（1）为金字塔形，可折叠存放。 气雾剂喷雾可以通过金字塔顶点处的孔（6）施加到艺术品上，然后可以通过例如， 当气溶胶沉降时，挡板（7）。
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8.发明公开Absaughaube zum Entfernen von Schwebstoffen aus einem Behandlungsraum für Bauteile 失效Absaughaube zum Entfernen von Schwebstoffen aus einem BehandlungsraumfürBauteile。
公开(公告)号：EP0255698A1
公开(公告)日：1988-02-10
申请号：EP87111037.5
申请日：1987-07-30
发明人： Hell, Uwe
摘要： Die insbesondere bei oben offenen Tauchbädern mit wenigstens einer Kammer mit einer gefährliche Gase oder Dämpfe entwickelnden Behandlungsflüssigkeit eingesetzte Absaughaube (1) weist wenigstens einen seitlichen Durchgang (19) für die mittels eines Hebezeuges in die Kammer einzutauchenden Bauteile auf. Um die gefährlichen Gase oder Dämpfe mit einem Sauggebläse mit vergleichsweise geringerer Saugleistung vollständig und sicher absaugen zu können und um den Bau längerer Tauchbäder zu ermöglichen, ist in der Oberwand (6) der Absaughaube (1) wenigstens ein Längsschlitz (14) für den Durchlauf von Hebeseilen (23) oder dergleichen des Hebezeuges vorgesehen, wobei der Längsschlitz (14) und der seitliche Durchgang (19) in einer gemeinsamen, vertikalen Ebene liegen und wobei der seitliche Durchgang (19) unterbrechungsfrei in den Längsschlitz (14) übergeht.
摘要翻译： 1.用于从用于处理预制部件的空间中去除空气中的颗粒的排气罩，特别是从在顶部敞开的浸浴（8），并且具有至少一个包含产生有害气体或蒸气的处理液的隔室（13） ，所述罩（1）在侧面具有至少一个通道（19），用于通过提升机构浸入所述隔室中的部件，其特征在于，用于提升电缆（23）的至少一个纵向槽（14） ）等设置在排气罩（1）的顶壁（6）中，因为纵向槽（14）和侧通道（19）位于共同的垂直平面内 其特征在于，所述侧通道不间断地合并到所述纵向狭槽中，并且所述侧通道（19）至少基本上通过产生自闭合密封装置（20）而被关闭。
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公开(公告)号：EP0082016B1
公开(公告)日：1987-06-16
申请号：EP82306675.8
申请日：1982-12-14
CPC分类号： B01D53/1487 , B05B14/49 , Y02P70/36
摘要： An air handling system for paint spray booth (10) includes an exhaust duct (28) which delivers exhaust air to an air divider (340). One portion of the exhaust air is fed to a vapour absorber (30) which removes organic vapour therefrom. The other portion of the exhaust air is fed to an air mixer (346) and is mixed with conditioned fresh air from a supply (348). The mixture is then fed to the paint spray booth (10) by way of its inlet duct (14). Since less than the entire volume of exhaust air is being stripped of organic vapour both the capital and operating costs of the vapour removal process are less than in an arrangement where all the exhaust air is treated.
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10.发明公开
公开(公告)号：EP0140793A3
公开(公告)日：1986-04-23
申请号：EP84402166
申请日：1984-10-29
发明人： Roth, Mario , Termath, Günther
CPC分类号： C03B33/04 , C03B33/0235 , C03C17/001 , C03C17/002 , C23C14/04 , C23C14/042 , C23C14/044 , C23C14/562 , C23C16/04
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