ELECTROCHEMICAL MACHINING METHOD AND POWER SOURCE FOR CARRYING OUT SAID METHOD
    3.
    发明公开
    ELECTROCHEMICAL MACHINING METHOD AND POWER SOURCE FOR CARRYING OUT SAID METHOD 审中-公开
    程序用于电化学处理及功率源实施的过程

    公开(公告)号:EP2639002A1

    公开(公告)日:2013-09-18

    申请号:EP11839519.3

    申请日:2011-08-10

    IPC分类号: B23H3/00 B23H3/02 B23H7/16

    CPC分类号: B23H3/02 B23H7/30 B23H2300/10

    摘要: The invention relates to electrochemical machining of current-conducting materials and can be used in the production of punches, pressing molds and other complex-shaped components at the finishing stage. The method comprises supplying square microsecond current pulses synchronized with the moment of maximum convergence of an electrode instrument and an electrode blank for machining within the following parameter range: pulse length t = 10...500 µs, length of the leading and trailing pulse edges τ f = 0,5...5,0 µs, voltage amplitude U a =10-100 V, amplitude density of the current j = 100...10000 A/cm 2 . The process is carried out with the amplitude and pulse length being adjusted in such a manner that the trailing edge of each pulse corresponds to the moment of the greatest electro-conductivity across an inter-electrode gap. The power source is in the form of current generators connected in parallel, in which each generator is connected to a load via a current switch so as to short out the current generator when the current of the generator is not yet at the specified value or when there needs to be a pause between the pulses and switching of the current to pick up and carry the load, in order to form a pulse of the specified length on the load. The normally closed contact of the current switch is connected to a common point while the normally opened contact is connected to the current generator via a diode. The invention makes it possible to increase the efficiency of the electrochemical machining of current-conducting materials and to provide a high-quality surface by optimizing the current pulse parameters and the use of a reliable power source with a common control system.

    摘要翻译: 本发明涉及一种电流传导材料的电化学加工,并且可以在生产冲头的使用,在精阶段压模和其它复杂形状的部件。 该方法包括提供与电极的仪器的最大收敛的时刻和下列参数范围内电极坯进行加工同步方微秒电流脉冲:脉冲长度t = 10 ... 500微秒,前缘和后脉冲沿的长度 A F = 0.5 ... 5.0微秒,电压幅值U A = 10-100伏,电流密度j = 100 ... 10000 A /厘米2的振幅。 该过程与幅度和脉冲长度在寻求做每个脉冲的后沿对应于最大电导率的对面电极间间隙的时刻的方式被调整开展。 电源是在并联连接的电流发生器,其中每个发生器经由电流开关连接到负载以便短路电流发生器的形式。当所述发电机的电流尚未达到规定值时或者当 需要有脉冲和电流的开关之间的休息拿起和携带的负载,以形成负载上的指定长度的脉冲。 电流开关的常闭触点被连接到一个公共点,而常开触点通过二极管连接到电流发生器。 本发明使得有可能增加电流传导材料的电化学加工的效率和通过优化电流脉冲参数,并用共同的控制系统中使用的可靠电源的,以提供一个高质量的表面。

    ELECTROLYTIC PROCESSING APPARATUS AND METHOD
    7.
    发明公开
    ELECTROLYTIC PROCESSING APPARATUS AND METHOD 审中-公开
    装置和方法用于电解处理

    公开(公告)号:EP1470269A4

    公开(公告)日:2007-02-21

    申请号:EP03734903

    申请日:2003-01-31

    申请人: EBARA CORP

    摘要: This invention relates to an electrolytic processing apparatus and method useful for processing a conductive material formed in the surface of a substrate, or for removing impurities adhering to the surface of a substrate. An electrolytic processing apparatus, including, a processing electrode that can come close to a workpiece, a feeding electrode for feeding electricity to the workpiece, an ion exchanger disposed in the space between the workpiece and the processing and the feeding electrodes, a fluid supply section for supplying a fluid between the workpiece and the ion exchanger, and a power source, wherein the processing electrode and/or the feeding electrode is electrically divided into a plurality of parts, and the power source applies a voltage to each of the divided electrode parts and can control voltage and/or electric current independently for each of the divided electrode parts.

    A METHOD AND AN ARRANGEMENT TO DETERMINE A RUNNING VALUE OF THE GAP DURING THE ELECTROCHEMICAL MACHINING
    8.
    发明公开
    A METHOD AND AN ARRANGEMENT TO DETERMINE A RUNNING VALUE OF THE GAP DURING THE ELECTROCHEMICAL MACHINING 有权
    装置和方法来确定柱KONTIUIERLICHEN GREAT处理ELEKRTOCHEMISCHEN期间

    公开(公告)号:EP1509356A1

    公开(公告)日:2005-03-02

    申请号:EP03717496.8

    申请日:2003-04-25

    IPC分类号: B23H3/02 B23H7/18

    CPC分类号: B23H3/02 B23H7/18 B23H2300/10

    摘要: A method and an arrangement (1) for determining an actual value of the gap (4) between the work piece (2) and the electrode (3) during a process of electrochemical machining. According to the invention first process control means (30) are arranged to supply a set of machining current pulses (Im) to the electrode and the work piece. Second process control means (32) are arranged to perform a measurement of an operational parameter (U) representing a value of the gap (4) in real time under operational conditions. The second process control means (32) comprise means to determine the actual value of the gap (55a) based on the measurement of the operational parameter and logical unit (55b) to actuate the positioning means (8) to translate the electrode (3) in case the measured value of the gap deviates from the preset value of the gap.

    摘要翻译: 一种方法和电极(1),用于确定开采布置的工件(2)和在电化学加工的过程中的(3)之间的间隙(4)的实际值。 。根据本发明第一过程控制装置(30)被布置为提供设定的加工电流脉冲(在),以在电极和工件。 第二过程控制装置(32)被布置成执行较操作条件下在实时的间隙(4)的值的操作参数(U)的测量。 所述第二过程控制装置(32)包括用于确定性矿的基于操作参数的测量和逻辑单元中的缝隙55a中的实际值(55B)来致动的定位装置(8)连接到电极翻译(3) 在壳体的间隙的测量值从该间隙的预设值偏离。

    METHOD OF AND ARRANGEMENT FOR ELECTROCHEMICAL MACHINING
    9.
    发明授权
    METHOD OF AND ARRANGEMENT FOR ELECTROCHEMICAL MACHINING 有权
    方法和设备电化学处理WORKPIECES

    公开(公告)号:EP0998366B1

    公开(公告)日:2003-01-29

    申请号:EP99907820.7

    申请日:1999-03-29

    IPC分类号: B23H3/02

    摘要: The invention relates to a method of electrochemically machining an electrically conductive workpiece in an electrolyte by applying electrical pulses between the workpiece and an electrically conductive electrode, one or more machining pulses (MP) alternating with voltage pulses (PP) for depositing passivation layers on the workpiece. The amplitude of the voltage pulses is adjusted during an adjustment procedure in which the amplitude of the voltage pulses is increased gradually from zero to the voltage at which the workpiece starts to dissolve in the electrolyte. After each voltage increase the resistance of the gap between the electrode and the workpiece is measured. The voltage value for the highest gap resistance is stored in a memory and used during further machining. The time span of the voltage pulses may be divided into time slices (Dt) and for each time slice the voltage is adjusted for maximum gap resistance during that time slice.

    Verfahren und Vorrichtung zur elektrischen oder elektrochemischen Manipulation von Proben
    10.
    发明公开
    Verfahren und Vorrichtung zur elektrischen oder elektrochemischen Manipulation von Proben 审中-公开
    用于样品的电或电化学处理的方法和装置

    公开(公告)号:EP0987077A2

    公开(公告)日:2000-03-22

    申请号:EP99115278.6

    申请日:1999-08-02

    IPC分类号: B23H3/02

    摘要: Es wird ein Verfahren und eine Vorrichtung zur gleichzeitigen elektrischen oder elektrochemischen Manipulation mehrerer Materialproben (4.1 - 4.4) beschrieben. Bei dieser Manipulation handelt es sich beispielsweise um elektrochemisches Ätzen Elektropolieren Galvanisieren und insbesondere um eine anodische Ätzung zur Herstellung von porösem Silizium. Die zu behandelnden Materialproben (4.1 - 4.4) werden dabei in ein gemeinsames Behandlungsbecken (1) gebracht und individuell mit steuerbaren Stromquellen (7.1 - 7.4) verbunden, so daß eine gleichzeitige und doch individuelle Bearbeitung der einzelnen Proben möglich ist. Das Verfahren und die Vorrichtung können auch auf eine großflächige Materialprobe angewandt werden, die über verschiedene Kontaktstellen mit individuell steuerbaren Stromquellen verbunden ist. Dadurch ist eine unterschiedliche Bearbeitung einzelner Bereiche der großflächigen Materialprobe möglich.

    摘要翻译: 公开了一种用于若干材料样品(4.1 - 4.4)的同时电或电化学处理的方法和装置进行说明。 在这种操作是,例如,电化学蚀刻电解电镀,特别是用于生产多孔硅的阳极蚀刻。 待处理的材料样品(4.1 - 4.4)在共同的处理槽(1)和单独可控电流源(7.1 - 7.4)从而带来的,从而使每个样品的同时,但单独的处理是可能的。 该方法和装置也可以应用于材料的大面积的样品,其被连接到具有独立可控的电流源接触的各个点。 这种不同的处理材料的大样本的各个区域是可能的。