Heterodyne interferometer system
    3.
    发明公开
    Heterodyne interferometer system 失效
    HETERODYNE干扰仪系统

    公开(公告)号:EP0194941A3

    公开(公告)日:1988-06-08

    申请号:EP86400506

    申请日:1986-03-11

    Abstract: A heterodyne interferometer system utilizes a single stabilized frequency linearly polarized laser input beam (18) from a light source (10) which is provided to an acousto-optic device (20) along with a frequency stabilized electrical reference signal (32) from an oscillator (30) for transforming the input beam (18) into a pair of orthogonally polarized beams (40,50) differing in frequency by the reference signal frequency prior to providing these beams (40,50) to a polarization type interferometer (70). A mixing polarizer (60) mixes the beams (46,56) after they traverse the interferometer (70) and provides the mixed beams (62,64) to a photoelectric detector (65) where they are utilized to produce an electrical measurement signal (66). This electrical measurement signal (66) is processed in a phase meter/accumulator (68) along with the reference signal (32) to produce an output signal (80) which is the sum of phase difference on a cycle-by-cycle basis between the measurement signal (66) and the reference signal (32). The phase meter/accumulator (68) includes an analog-to-digital converter and a memory register for the previous cycle, with the measurement resolution being determined by the number of bits of the analog-to-digital converter.

    Method of and device for realtime measurement of the state of polarization of a quasi-monochromatic light beam
    4.
    发明公开
    Method of and device for realtime measurement of the state of polarization of a quasi-monochromatic light beam 失效
    用于实时测量准单色光束偏振状态的方法和装置

    公开(公告)号:EP0172568A3

    公开(公告)日:1987-09-02

    申请号:EP85110477

    申请日:1985-08-21

    CPC classification number: G01J4/00 G01J9/04

    Abstract: The method and the device are based on interference techniques. Two quasi-monochromatic radiations (2a, 2b; 102a, 102b; 202a, 202b) with slightly different optical frequencies are generated. A radiation is converted into a 45° linearly-polarized radiation, while the other presents the polarization state imposed by a body under test (4, 204). In each radiation, horizontal and vertical polarization components are separated, and then recombined into two different beams (20a, 21a; 34, 35) comprising radiations at both frequencies, respectively polarized in the same plane. Beatings between the two components of each beam are originated and from the two electrical signals in the radio frequency range thus obtained the information is extracted on the relative phase and the amplitude of the two components of the radiation with polarization imposed by the body under test (4, 204).

    Active mirror wavefront sensor
    5.
    发明公开
    Active mirror wavefront sensor 失效
    主动镜面波形传感器

    公开(公告)号:EP0158505A3

    公开(公告)日:1985-11-21

    申请号:EP85302338

    申请日:1985-04-03

    Applicant: TRW INC.

    CPC classification number: G01J9/02

    Abstract: An interferometer, and corresponding method, for use in the measurement and correction of wavefront aberrations in a beam of radiation. The interferometer includes optical elements for generating a reference beam with a known wavefront phase characteristic. The reference beam is recombined with the sample beam, to produce an interference pattern indicative of the phase aberrations in the sample beam as compared with the reference beam. An array of detectors produces electrical signals corresponding to discrete elements of the detected pattern, and an electrical circuit for each elemental detector generates phase correction signals to be applied to a set of movable mirror elements arranged to effect phase changes in the sample beam path. The movable mirror elements adjust the elemental path lengths of the sample beam to yield zero detected phase differences. The mirror elements may be integrated into the interferometer, or may take the form of a deformable mirror used for phase compensation of a light beam. The reference beam in the preferred form of the invention is dithered at a high frequency to minimize the effect of noise, and each electrical circuit includes a synchronous detector to remove the dither-frequency component. In accordance with one disclosed form of the invention, the reference beam is not planar but is aberrated in a conjugate relationship with the radiation beam to be corrected, to provide improved control loop performance.

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