MICROSYSTEM AND METHOD FOR MAKING A MICROSYSTEM

    公开(公告)号:EP4386340A2

    公开(公告)日:2024-06-19

    申请号:EP24172530.8

    申请日:2020-02-17

    IPC分类号: G01J5/34

    摘要: The invention relates to a microsystem (1) comprising a substrate (12), a bottom electrode (3) arranged on the substrate (12), a ferroelectric layer (4) arranged on the bottom electrode (3), a top electrode (5) arranged on the ferroelectric layer (4) and an isolation layer (6) that is electrically isolating, that is arranged on the top electrode (5), that extends from the top electrode (5) to the substrate (12) so that the isolation layer (6) covers the bottom electrode (3), the ferroelectric layer (4) and the substrate (12) in a region around the complete circumference of the bottom electrode (3), and the isolation layer (6) has the shape of a ring that confines in its centre a through hole (11) that is arranged in the region of the top electrode (5).

    INFRARED SENSOR AND CIRCUIT SUBSTRATE EQUIPPED THEREWITH

    公开(公告)号:EP2489998A4

    公开(公告)日:2017-12-13

    申请号:EP10823431

    申请日:2010-10-14

    摘要: Provided is an infrared sensor wherein a large temperature difference can arise between the two temperature sensor devices for detection of infrared rays and for temperature compensation; minimization of the size thereof is easily possible; and the cost of the structure thereof is low. The infrared sensor comprises: an electrical insulating film sheet 2; first temperature sensor device 3A and second temperature sensor device 3B which are provided on one side face of the electrical insulating film sheet 2, and are located at a distance from each other; first foil conductor patterns 4A which are formed on one side face of the electrical insulating film sheet 2, and are connected to the first temperature sensor device 3A; second foil conductor patterns 4B which are formed on the one side face of the electrical insulating film sheet 2, and are connected to the second temperature sensor device 3B; and an infrared reflector film 6 which is provided on the other side face of the electrical insulating film sheet 2, and is opposite the second temperature sensor device 3B across the electrical insulating film sheet 2.

    INFRARED TEMPERATURE MEASUREMENT AND STABILIZATION THEREOF
    8.
    发明公开
    INFRARED TEMPERATURE MEASUREMENT AND STABILIZATION THEREOF 审中-公开
    INFRAROT-TEMPERATURMESSUNG UND STABILISIERUNG DAVON

    公开(公告)号:EP3146301A1

    公开(公告)日:2017-03-29

    申请号:EP15795558.4

    申请日:2015-05-14

    发明人: MASTON, Robert A.

    IPC分类号: G01K1/08 G01J5/10

    摘要: Infrared (IR) temperature measurement and stabilization systems, and methods related thereto are provided. One or more embodiments passively stabilizes temperatures of objects in proximity and within the path between an infrared (IR) sensor and target object. A protective housing may encase an IR sensor, which may include a sensing element or IR element, a circuit or signal processor, and a housing seal plug. The IR element may be thermally bonded with a frame or conductive top hat.

    摘要翻译: 提供红外(IR)温度测量和稳定系统及其相关方法。 一个或多个实施例被动地稳定了红外(IR)传感器和目标物体之间的路径内的物体的温度。 保护壳体可以包含IR传感器,其可以包括感测元件或IR元件,电路或信号处理器以及壳体密封塞。 IR元件可以用框架或导电顶帽热粘合。

    MIKROELEKTROMECHANISCHE VORRICHTUNG
    9.
    发明公开
    MIKROELEKTROMECHANISCHE VORRICHTUNG 有权
    微机电装置

    公开(公告)号:EP3124926A1

    公开(公告)日:2017-02-01

    申请号:EP16174595.5

    申请日:2016-06-15

    申请人: ROBERT BOSCH GMBH

    摘要: Die Erfindung betrifft eine mikroelektromechanische Vorrichtung mit: einem an einer Substratoberseite (101a) eines Substrats (101) und/oder einem an einer Substratrückseite (101b) des Substrats (101) angeordneten Magneten (102, 202); einem im Substrat (101) integrierten Mikrowellensender (503); einem im Substrat (101) integrierten Mikrowellenempfänger (506); und einem von dem Substrat beabstandeten Absorberniveau (203) mit einer dem Substrat (101) zugewandten paramagnetischen Schicht (201) und einer vom Substrat (101) abgewandten Infrarot-Absorberschicht (107).

    摘要翻译: 本发明涉及一种微机电装置,包括:在所述基板的基板表面侧(101A)的基板(101)和/或在基片背面侧(101B)(101),其设置磁体(102,202); 一个在所述基板(101)集成的微波发射器(503); 一个在所述基板(101)集成的微波接收器(506); 并从与衬底(101)的顺磁性层(201)和背离所述基板(101)的红外吸收层(107)远的一侧朝向吸收体水平(203)间隔开的基片。