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    A PLASMA POLYMERISATION METHOD FOR COATING A SUBSTRATE WITH A POLYMER
    4.
    发明公开
    A PLASMA POLYMERISATION METHOD FOR COATING A SUBSTRATE WITH A POLYMER 审中-公开

    公开(公告)号：EP4234106A2

    公开(公告)日：2023-08-30

    申请号：EP23163278.7

    申请日：2020-01-08

    申请人： Europlasma NV

    发明人： SERCU, Marc ,  LOULIDI, Samir

    IPC分类号： B05D3/14 ,  B05D5/08 ,  B05D7/00 ,  B05D1/00

    摘要： A plasma polymerisation method for coating a substrate with a polymer layer, which method includes:
    providing a substrate to be coated within a plasma chamber;
    introducing a flow of a first polymer precursor to the plasma chamber;
    applying a power at a level greater than zero Watts (W) and converting the first polymer precursor to a first polymer precursor plasma;
    exposing the substrate to the first polymer precursor plasma;
    introducing a flow of a second polymer precursor to the plasma chamber;
    applying a power at a level greater than zero Watts (W) and converting the second polymer precursor to a second polymer precursor plasma; and
    exposing the substrate to the second polymer precursor plasma,
    wherein exposing the substrate to the first polymer precursor plasma forms a first polymer layer thereon and exposing the substrate to the second polymer precursor plasma forms a second polymer layer thereon, characterised by maintaining the power at a level greater than zero Watts (W) between exposing the substrate to the first polymer precursor plasma and exposing the substrate to the second polymer precursor plasma.