公开(公告)号：EP3818380A1

公开(公告)日：2021-05-12

申请号：EP19749838.9

申请日：2019-07-05

申请人： Nederlandse Organisatie voor toegepast- natuurwetenschappelijk onderzoek TNO

发明人： HERFST, Roelof Willem ,  BIJNAGTE, Anton Adriaan ,  DEKKER, Albert ,  BIEMOND, Jan Jacobus Benjamin

IPC分类号： G01Q70/02 ,  G01Q70/10

公开(公告)号：EP3811086A1

公开(公告)日：2021-04-28

申请号：EP19761946.3

申请日：2019-06-17

申请人： Physik Instrumente (PI) GmbH & Co. KG

发明人： JORDAN, Scott

IPC分类号： G01Q20/04 ,  G01B7/012 ,  G01N21/95 ,  G01Q70/02 ,  G01Q70/10 ,  H01L21/66

公开(公告)号：EP3692378A1

公开(公告)日：2020-08-12

申请号：EP18812331.9

申请日：2018-10-02

申请人： Nederlandse Organisatie voor toegepast- natuurwetenschappelijk Onderzoek TNO

发明人： DEKKER, Albert ,  VAN RIEL, Martinus Cornelius Johannes Maria ,  KASTELIJN, Aukje Arianne Annette

IPC分类号： G01Q10/04 ,  G01Q70/02

公开(公告)号：EP3548903A1

公开(公告)日：2019-10-09

申请号：EP17817275.5

申请日：2017-11-28

申请人： Nederlandse Organisatie voor toegepast- natuurwetenschappelijk onderzoek TNO

发明人： SADEGHIAN MARNANI, Hamed ,  BIJNAGTE, Anton Adriaan ,  DEKKER, Albert

IPC分类号： G01Q70/02

公开(公告)号：EP3327448A1

公开(公告)日：2018-05-30

申请号：EP16201131.6

申请日：2016-11-29

申请人： Nederlandse Organisatie voor toegepast- natuurwetenschappelijk onderzoek TNO

发明人： Sadeghian Marnani, Hamed ,  Binagte, Anthon Adriaan ,  Dekker, Albert

IPC分类号： G01Q70/02 ,  G01B13/00

CPC分类号： G01Q70/02 ,  G01B13/00 ,  G01Q30/12

摘要： A scanning probe microscopy system (1) comprises a gap width measuring system for measuring, during probe exchange operations, a gap width (D1, D2) of a gap (3) in-between a probe (2) and a probe holder (21). The gap width measuring system comprises: a gas flow system (4, 5, 6, 7, 8) for controlling a gas flow of a gas by applying predetermined gas flow excitation conditions to said gas, wherein said gas flow occurs at least in said gap (3); a pressure sensor (9) for sensing a time-dependently variable pressure of said gas; and an evaluation system (10) for determining said gap width based on at least said sensed pressure and said predetermined gas flow excitation conditions. The invention allows for accurate measurement of the gap width, without substantially sacrificing building space of the SPM system nearby the location where the probe and the probe holder meet.

公开(公告)号：EP2859360A1

公开(公告)日：2015-04-15

申请号：EP13742483.4

申请日：2013-06-10

申请人： Israelachvili, Jacob

发明人： Israelachvili, Jacob

IPC分类号： G01Q30/02 ,  G01Q70/02 ,  G01N3/04 ,  G01N19/02 ,  G01B21/26 ,  G01Q30/18 ,  B82Y35/00

CPC分类号： G01N13/00 ,  B01L3/00 ,  G01N1/00 ,  G01N1/28 ,  G01N3/04 ,  G01N19/02 ,  G01Q30/02 ,  G01Q30/18 ,  G01Q30/20 ,  G01Q70/02 ,  G02B21/26

摘要： A mounting system for samples and instruments for use with a measuring device such as a surface forces apparatus has a housing and a sample mount assembly positioned within the housing. The sample mount assembly has a pivot arm having a first edge and a flexing section. A spring has a first end coupled to the pivot arm. A first sample holder is coupled to the second end of the spring. A second sample holder is positioned in proximity to the first sample holder.

公开(公告)号：EP2435837A4

公开(公告)日：2014-04-16

申请号：EP10781335

申请日：2010-05-28

申请人： UNIV NEW YORK STATE RES FOUND

发明人： CHOPRA HARSH DEEP ,  ARMSTRONG JASON N ,  HUA ZONGLU

IPC分类号： G01Q10/02 ,  G01Q10/04 ,  G01Q70/02

CPC分类号： G01Q10/02 ,  G01Q10/04 ,  G01Q70/02

公开(公告)号：EP1012584A4

公开(公告)日：2006-10-04

申请号：EP98904705

申请日：1998-01-21

申请人： RAVE L L C

发明人： KLEY VICTOR B

IPC分类号： G01N27/00 ,  G01B7/34 ,  G01Q10/00 ,  G01Q30/02 ,  G01Q30/16 ,  G01Q40/00 ,  G01Q40/02 ,  G01Q60/06 ,  G01Q60/10 ,  G01Q60/18 ,  G01Q60/24 ,  G01Q70/02 ,  G01Q70/08 ,  G01Q70/16 ,  G01Q80/00 ,  G03F1/00 ,  G03F7/20 ,  G11B5/23 ,  G11B5/31

CPC分类号： G01Q70/16 ,  G01Q30/02 ,  G01Q30/16 ,  G01Q40/00 ,  G01Q40/02 ,  G01Q60/06 ,  G01Q70/02 ,  G01Q70/06 ,  G01Q80/00 ,  G03F1/84 ,  G03F7/2049 ,  G03F7/704 ,  G03F7/70616 ,  G11B5/232 ,  G11B5/3116 ,  G11B5/3163 ,  G11B5/3166

摘要： A system and method for measuring, analysis, removal, addition or imaging of material using nanostructures in conjunction with mechanical, electromagnetic (optical) and electrical means. Techniques for fabricating such nanostructures and techniques for combining these elements in a system which can modify bulk or large area objects such as silicon wafers, and masks for lithography.

公开(公告)号：EP4055393A1

公开(公告)日：2022-09-14

申请号：EP20807915.2

申请日：2020-11-06

申请人： Nederlandse Organisatie voor toegepast-natuurwetenschappelijk Onderzoek TNO

发明人： HERFST, Roelof Willem ,  KRAMER, Lukas ,  BIJNAGTE, Anton Adriaan

IPC分类号： G01Q70/00 ,  G01Q70/02

公开(公告)号：EP3164720B1

公开(公告)日：2021-09-29

申请号：EP15738770.5

申请日：2015-07-03

发明人： SADEGHIAN MARNANI, Hamed ,  WINTERS, Jasper ,  CROWCOMBE, William Edward ,  VAN DEN DOOL, Teunis Cornelis ,  KRAMER, Geerten Frans Ijsbrand

IPC分类号： G01Q10/06 ,  G01Q70/02