SEMICONDUCTOR DEVICE
    5.
    发明公开

    公开(公告)号:EP4092771A1

    公开(公告)日:2022-11-23

    申请号:EP21182315.8

    申请日:2021-06-29

    IPC分类号: H01L43/08 H01L27/22 G11C11/16

    摘要: A semiconductor device includes a substrate, a first magnetic tunnel junction (MTJ) structure, a second MTJ structure, and an interconnection structure. The first MTJ structure, the second MTJ structure, and the interconnection structure are disposed on the substrate. The interconnection structure is located between the first MTJ structure and the second MTJ structure in a first horizontal direction, and the interconnection structure includes a first metal interconnection and a second metal interconnection. The second metal interconnection is disposed on and contacts the first metal interconnection. A material composition of the second metal interconnection is different from a material composition of the first metal interconnection.

    METHODS OF FABRICATING MAGNETORESISTIVE DEVICES BY MULTI-STEP ETCHING

    公开(公告)号:EP4020606A2

    公开(公告)日:2022-06-29

    申请号:EP21216625.0

    申请日:2021-12-21

    IPC分类号: H01L43/12 H01L27/22

    摘要: Manufacturing of magnetoresistive devices comprises forming a first magnetic region (120), an intermediate region (130), and a second magnetic region (160) of a magnetoresistive stack above a via (105), removing at least a portion of the second magnetic region using a first etch, removing at least a portion of the intermediate region and at least a portion of the first magnetic region using a second etch, and treating at least a portion of redeposited material by removing it using a third etch and/or by rendering it electrically nonconductive, particularly by oxidation. The first, second, and third etches can be ion beam etching (IBE) or reactive ion etching (RIE) steps.