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公开(公告)号:JP5418268B2
公开(公告)日:2014-02-19
申请号:JP2010028242
申请日:2010-02-10
Applicant: Jsr株式会社
IPC: G03F7/039 , C08F220/28 , C08F220/34 , H01L21/027
Abstract: PROBLEM TO BE SOLVED: To provide a radiation sensitive resin composition which satisfies not only fundamental characteristics such as sensitivity, resolution or light exposure margin, but also LWR (line width roughness) performance. SOLUTION: The radiation sensitive resin composition contains: a polymer component (A) comprising one or more kinds of polymers; a radiation sensitive acid generator (B); and a solvent (C). The polymer component (A) contains a repeating unit (a1) represented by general formula (a1) and a repeating unit (a2) represented by general formula (a2). In the general formulas (a1) and (a2), R 1 represents hydrogen atom or methyl group; R 2 represents divalent hydrocarbon group; and R 3 represents hydrogen atom or alkyl group. In the general formula (a2), R 4 represents a single bond or divalent hydrocarbon group, and A 1 represents trivalent organic group. COPYRIGHT: (C)2011,JPO&INPIT
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公开(公告)号:JP5321781B2
公开(公告)日:2013-10-23
申请号:JP2008000584
申请日:2008-01-07
Applicant: Jsr株式会社
IPC: G02F1/1337
Abstract: A liquid crystal aligning agent is provided to show a high voltage holding ratio, and to ensure good reliability of the voltage holding ratio. A liquid crystal aligning agent contains (A) polyamic acid obtained by reacting tetracarboxylic acid dianhydride with a diamine compound, and/or imidized polymer thereof, and (B-1) a compound having at least two oxetane rings in the molecule or (B-2) a combination of a compound having at least two epoxy groups in the molecule and a compound having at least two oxetane rings in the molecule. A liquid crystal display device has a liquid crystal aligning layer formed from the liquid crystal aligning agent.
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