公开(公告)号：JP2004154986A

公开(公告)日：2004-06-03

申请号：JP2002321081

申请日：2002-11-05

申请人： Seiko Epson Corp ,  セイコーエプソン株式会社

发明人： KAMEI HIROYUKI

IPC分类号： B41J2/045 ,  B41J2/055 ,  B41J2/16

摘要： PROBLEM TO BE SOLVED: To provide a liquid ejection head in which production cost is reduced by decreasing the external width of a head and a driving IC and production quality is enhanced by protecting a sealing substrate against thermal damage thereby sealing a piezoelectric element holding part easily and surely, and to provide its manufacturing process and a liquid ejector.
SOLUTION: ICs 110 for driving piezoelectric elements are provided on a sealing substrate 30 independently for each array. In the region between piezoelectric element holding parts 31 juxtaposed for each array of the sealing substrate 30, through holes 34 for connecting the driving ICs 110 electrically with discrete electrodes of the piezoelectric element are provided on the sealing substrate 30 while being divided in the juxtaposing direction of the piezoelectric elements. In the divided region of the through hole 34, a sealing hole 35 penetrating in the thickness direction is provided along with a sealing passage 36 made in the surface being bonded to a channel forming substrate in the region provided with the sealing hole 35 and having one end communicating with the sealing hole 35 and the other end communicating with the piezoelectric element holding part 31.
COPYRIGHT: (C)2004,JPO

公开(公告)号：JP2003080705A

公开(公告)日：2003-03-19

申请号：JP2001278114

申请日：2001-09-13

申请人： Seiko Epson Corp ,  セイコーエプソン株式会社

发明人： KAMEI HIROYUKI

IPC分类号： B41J2/045 ,  B41J2/055 ,  B41J2/16

摘要： PROBLEM TO BE SOLVED: To provide an ink jet recording head, its manufacturing method and an ink jet recorder in which deformation and cracking of a substrate are prevented.
SOLUTION: The ink jet recording head comprises a nozzle plate 20 having a plurality of nozzle openings, a channel forming substrate 10 where pressure generating chambers 12 communicating with the nozzle openings 21 are defined, and piezoelectric elements 300 provided on one side of the channel forming substrate 10 through a diaphragm and generating a pressure variation in the pressure generating chambers 12. A reservoir forming substrate 30 having a reservoir part 31 constituting at least a part of a reservoir 150 becoming a common ink chamber for respective pressure generating chambers 12 is bonded to the piezoelectric element 300 side of the channel forming substrate 10, and mounting parts 110 being connected with an external wire 100 for driving the piezoelectric elements 300 are provided on the channel forming substrate 10 and a mounting substrate 120 made of a member different from that of the reservoir forming substrate 30 thus preventing the channel forming substrate 10 and the reservoir forming substrate 30 from cracking by heat at the time of connecting the external wire 100.
COPYRIGHT: (C)2003,JPO

摘要翻译： 要解决的问题：提供一种防止基板变形和破裂的喷墨记录头，其制造方法和喷墨记录器。 解决方案：喷墨记录头包括具有多个喷嘴开口的喷嘴板20，其中限定了与喷嘴开口21连通的压力产生室12的通道形成基板10以及设置在通道形成部分的一侧的压电元件300 基板10通过隔膜并产生压力发生室12中的压力变化。具有构成储存器150的至少一部分的储存器部分31的储存器形成基板30成为用于各个压力发生室12的公共墨水室，其结合到 沟道形成基板10的压电元件300侧和与用于驱动压电元件300的外部导线100连接的安装部110设置在沟道形成基板10上，并且安装基板120由不同于 储存器形成基板30因此防止通道形成基板10和 储存器形成基板30在连接外部导线100时由于热而破裂。

公开(公告)号：JP2010247511A

公开(公告)日：2010-11-04

申请号：JP2009183904

申请日：2009-08-06

申请人： Seiko Epson Corp ,  セイコーエプソン株式会社

发明人： KAMEI HIROYUKI

IPC分类号： B41J2/045 ,  B41J2/055

摘要： PROBLEM TO BE SOLVED: To provide a liquid jetting head having improved drive durability, liquid jetting device, and actuator device.
SOLUTION: Reinforcing portions 65 composed of a material harder than the film forming a first electrode 60 are provided in the regions on the first electrode 60, wherein the regions correspond to both-end portions of a piezoelectric layer 70 in the width-direction of a piezoelectric element 300. The thickness of the reinforcing portions 65 is gradually reduced toward the inside of the width direction of the piezoelectric element 300.
COPYRIGHT: (C)2011,JPO&INPIT

摘要翻译： 要解决的问题：提供具有改进的驱动耐久性的液体喷射头，液体喷射装置和致动器装置。 解决方案：在第一电极60上的区域中设置由比形成第一电极60的膜更硬的材料构成的加强部分65，其中该区域对应于宽度方向上的压电层70的两端部分， 压电元件300的方向。加强部分65的厚度朝向压电元件300的宽度方向的内侧逐渐减小。版权所有（C）2011，JPO＆INPIT

公开(公告)号：JP2008188922A

公开(公告)日：2008-08-21

申请号：JP2007027249

申请日：2007-02-06

申请人： Seiko Epson Corp ,  セイコーエプソン株式会社

发明人： TAKABE HONKI ,  KAMEI HIROYUKI ,  SUMI KOJI

IPC分类号： B41J2/16

摘要： PROBLEM TO BE SOLVED: To manufacture a liquid discharge head suppressed in the change of the displacing amount of a piezoelectric element by giving no load higher than that at the time of a real use to the piezoelectric element etc. in an aging process and having a stable ink discharge characteristic.
SOLUTION: This manufacturing method of the liquid discharge head having a channel forming substrate 10 formed of a pressure generating chamber 12 communicating with a nozzle opening 21 for injecting liquid, and a piezoelectric element 300 formed of a lower electrode 60, a piezoelectric element layer 70 and an upper electrode 80 provided on one surface side of the channel forming substrate 10 has a piezoelectric element forming step of forming the piezoelectric element 300 on the channel forming substrate 10, an aging step of driving the piezoelectric element 300 by inputting a drive signal to the piezoelectric element 300 formed by the piezoelectric element forming step, and a pressure generating chamber forming step of forming the pressure generating chamber 12 on the channel forming substrate 10 wherein the aging step is performed in a restricting state that the restricting member for more restricting the displacement of the piezoelectric element 300 as compared with that at the time of the actual use is provided in the piezoelectric element 300.
COPYRIGHT: (C)2008,JPO&INPIT

摘要翻译： 要解决的问题：通过在老化处理中不向压电元件等施加比实际使用时更高的压力元件的位移量的变化来制造液体排出头 并具有稳定的喷墨特性。 解决方案：具有由与用于注入液体的喷嘴开口21连通的压力产生室12形成的通道形成基板10的液体排出头的制造方法以及由下部电极60形成的压电元件300，压电体 元件层70和设置在沟道形成衬底10的一个表面侧上的上电极80具有在沟道形成衬底10上形成压电元件300的压电元件形成步骤，通过输入压电元件300来驱动压电元件300的老化步骤 驱动信号输送到由压电元件形成步骤形成的压电元件300，以及压力产生室形成步骤，在通道形成基板10上形成压力产生室12，其中，在限制状态下进行老化步骤， 与t相比，更能限制压电元件300的位移 压电元件300中提供实际使用的ime。版权所有（C）2008，JPO＆INPIT

公开(公告)号：JP2007149858A

公开(公告)日：2007-06-14

申请号：JP2005340656

申请日：2005-11-25

申请人： Seiko Epson Corp ,  セイコーエプソン株式会社

发明人： RI KINZAN ,  KAMEI HIROYUKI

IPC分类号： B41J2/045 ,  B41J2/055 ,  B41J2/135 ,  B41J2/14 ,  B41J2/16 ,  H01L41/09 ,  H01L41/18 ,  H01L41/187 ,  H01L41/22 ,  H01L41/29

摘要： PROBLEM TO BE SOLVED: To provide a piezoelectric element which shows an improved displacement quantity, a liquid jet head using the piezoelectric element, and a liquid jet device. SOLUTION: The piezoelectric element includes a lower electrode film 60 disposed on one surface of a board, a piezoelectric layer 70 made of a piezoelectric material in which piezoelectric layer 70 is formed on the lower electrode film 60, and an upper electrode film 80 formed on the piezoelectric layer 70. The hardness of the upper electrode film 80 is determined to be 14 GPa or less. COPYRIGHT: (C)2007,JPO&INPIT

摘要翻译： 要解决的问题：提供一种显示改进的位移量的压电元件，使用该压电元件的液体喷射头和液体喷射装置。 解决方案：压电元件包括​​设置在板的一个表面上的下电极膜60，由压电材料制成的压电层70，其中压电层70形成在下电极膜60上，上电极膜 80，形成在压电层70上。上电极膜80的硬度确定为14GPa以下。 版权所有（C）2007，JPO＆INPIT

公开(公告)号：JP2006310877A

公开(公告)日：2006-11-09

申请号：JP2006166231

申请日：2006-06-15

申请人： Seiko Epson Corp ,  セイコーエプソン株式会社

发明人： SHIMADA KATSUTO ,  KAMEI HIROYUKI ,  TAKAHASHI TETSUJI ,  QIU HONG

IPC分类号： B41J2/045 ,  B41J2/055 ,  B41J2/135 ,  B41J2/14 ,  B41J2/16 ,  H01L41/09 ,  H01L41/18 ,  H01L41/187 ,  H01L41/22

CPC分类号： H01L41/318 ,  B41J2/14233 ,  B41J2002/14258 ,  C04B35/493 ,  C04B35/6264 ,  C04B2235/3206 ,  C04B2235/3213 ,  C04B2235/3215 ,  C04B2235/3224 ,  C04B2235/3225 ,  C04B2235/3241 ,  C04B2235/3251 ,  C04B2235/3255 ,  C04B2235/3258 ,  C04B2235/3262 ,  C04B2235/3272 ,  C04B2235/3275 ,  C04B2235/3279 ,  C04B2235/3284 ,  C04B2235/3286 ,  C04B2235/3294 ,  C04B2235/3296 ,  C04B2235/441 ,  C04B2235/449 ,  C04B2235/656 ,  C04B2235/661 ,  C04B2235/76 ,  C04B2235/765 ,  C04B2235/768 ,  C04B2235/787 ,  C04B2235/80 ,  H01L41/0805 ,  H01L41/094 ,  H01L41/0973 ,  H01L41/1876 ,  H01L41/316

摘要： PROBLEM TO BE SOLVED: To provide a piezoelectric body thin film element that does not generate cracks in film during production, has a high piezo-electric constant, and is excellent in adhesion with a lower electrode; and to provide an ink jet recording head capable of performing a high definition printing using such a piezoelectric body thin film element.
SOLUTION: The piezoelectric body thin film element is one configured by including a piezoelectric body film comprising a polycrystal of thickness of 0.5-25 μm and two electrodes that sandwich the piezoelectric body film, air holes are present in the piezoelectric body film, an average diameter of the air holes is 0.01 μm or more, and the surface density is 0.3% or more.
COPYRIGHT: (C)2007,JPO&INPIT

摘要翻译： 要解决的问题：提供一种在制造过程中不产生膜的裂纹的压电体薄膜元件，具有高的压电常数，并且与下电极的粘附性优异; 并且提供一种能够使用这种压电体薄膜元件执行高清晰度印刷的喷墨记录头。 解决方案：压电体薄膜元件是通过包括包括厚度为0.5-25μm的多晶体的压电体膜和夹着压电体膜的两个电极构成的，压电体膜中存在空气孔， 气孔的平均直径为0.01μm以上，表面密度为0.3％以上。 版权所有（C）2007，JPO＆INPIT

公开(公告)号：JP2006269391A

公开(公告)日：2006-10-05

申请号：JP2005090034

申请日：2005-03-25

申请人： Seiko Epson Corp ,  セイコーエプソン株式会社

发明人： KAMEI HIROYUKI ,  SUMI KOJI

IPC分类号： H01B19/00 ,  B41J2/14 ,  B41J2/16 ,  B82Y10/00 ,  H01L41/09 ,  H01L41/187 ,  H01L41/22 ,  H01L41/318 ,  H01L41/39 ,  H01L41/43

摘要： PROBLEM TO BE SOLVED: To provide a manufacturing method of a ferroelectric thin film with excellent ferroelectric characteristics without microcrystalline particles in the film, a manufacturing method of piezoelectric element, and a composition for formation of a ferroelectric thin film.
SOLUTION: In the method, a precursor film made of a composition for forming a ferroelectric thin film at least containing colloidal solution containing at least Pb as a material constituting the ferroelectric thin film and a carbon material is formed on an object for treatment, and is crystallized to form the ferroelectric thin film, at which time, a temperature-raising speed is to be 120°C/sec or more. Further, the manufacturing method of the piezoelectric element and the composition for formation of the ferroelectric thin film are also disclosed.
COPYRIGHT: (C)2007,JPO&INPIT

摘要翻译： 要解决的问题：为了提供薄膜中没有微晶粒子的优异的铁电特性的铁电薄膜的制造方法，压电元件的制造方法和用于形成铁电薄膜的组合物。 解决方案：在该方法中，在用于形成铁电薄膜的至少含有至少含有Pb作为构成铁电薄膜的材料的胶体溶液的组合物和碳材料上形成的前体膜形成在待处理物体上 并结晶形成铁电薄膜，此时升温速度为120℃/秒以上。 此外，还公开了压电元件的制造方法和用于形成铁电薄膜的组合物。 版权所有（C）2007，JPO＆INPIT

公开(公告)号：JP2011054977A

公开(公告)日：2011-03-17

申请号：JP2010228976

申请日：2010-10-08

申请人： Seiko Epson Corp ,  セイコーエプソン株式会社

发明人： SHIMADA KATSUTO ,  KAMEI HIROYUKI ,  TAKAHASHI TETSUJI ,  QIU HONG

IPC分类号： H01L41/09 ,  B41J2/045 ,  B41J2/055 ,  B41J2/135 ,  B41J2/14 ,  C04B35/49 ,  C04B35/493 ,  H01L41/08 ,  H01L41/18 ,  H01L41/187 ,  H01L41/22 ,  H01L41/319

摘要： PROBLEM TO BE SOLVED: To provide a piezoelectric thin film element which dose not generate a crack in a film during manufacturing, has a high piezoelectric strain constant, and has good close contactness with a lower electrode; and to further provide an inkjet recording head using such piezoelectric thin film element, the inkjet recording head being capable of high resolution printing. SOLUTION: The piezoelectric thin film element includes a piezoelectric film made of a polycrystal body, and an upper electrode and a lower electrode that are arranged by sandwiching the piezoelectric film. A crystal body of the piezoelectric film is formed in a direction substantially perpendicular to the electrode surfaces. COPYRIGHT: (C)2011,JPO&INPIT

摘要翻译： 要解决的问题：提供一种在制造过程中不产生裂纹的压电薄膜元件，具有高的压电应变常数，并且与下电极具有良好的紧密接触; 并且为了进一步提供使用这种压电薄膜元件的喷墨记录头，喷墨记录头能够进行高分辨率打印。 解决方案：压电薄膜元件包括由多晶体制成的压电膜，以及通过夹持压电膜而布置的上电极和下电极。 压电膜的晶体体形成在大致垂直于电极表面的方向上。 版权所有（C）2011，JPO＆INPIT

公开(公告)号：JP2008078408A

公开(公告)日：2008-04-03

申请号：JP2006256203

申请日：2006-09-21

申请人： Seiko Epson Corp ,  セイコーエプソン株式会社

发明人： KAMEI HIROYUKI

IPC分类号： H01L41/09 ,  B41J2/045 ,  B41J2/055 ,  B41J2/135 ,  B41J2/14 ,  B41J2/145 ,  B41J2/16 ,  H01L41/18 ,  H01L41/187 ,  H01L41/22 ,  H01L41/29

摘要： PROBLEM TO BE SOLVED: To provide an actuator device having improved response properties of vibration and durability, and to provide a fluid injecting head.
SOLUTION: The actuator device has a piezoelectric element comprising a lower electrode provided at one surface side of a substrate, a piezoelectric layer provided on the lower electrode, and an upper electrode provided on the piezoelectric layer; and the lower electrode. The lower electrode has a density elasticity adjustment layer made of an alloy of Pt and TiO
X (0.1≤x≤2).
COPYRIGHT: (C)2008,JPO&INPIT

摘要翻译： 要解决的问题：提供具有改善的振动和耐久性的响应特性的致动器装置，并且提供流体注入头。 解决方案：致动器装置具有压电元件，其包括设置在基板的一个表面侧的下电极，设置在下电极上的压电层和设置在压电层上的上电极; 和下电极。 下部电极具有由Pt和TiO （0.1≤x≤2）的合金制成的密度弹性调节层。 版权所有（C）2008，JPO＆INPIT

公开(公告)号：JP2007306014A

公开(公告)日：2007-11-22

申请号：JP2007160546

申请日：2007-06-18

申请人： Seiko Epson Corp ,  セイコーエプソン株式会社

发明人： KAMEI HIROYUKI

IPC分类号： H01L41/09 ,  B41J2/14 ,  B41J2/145 ,  B41J2/16 ,  C04B35/638 ,  H01L41/187 ,  H01L41/22 ,  H01L41/318 ,  H01L41/39

摘要： PROBLEM TO BE SOLVED: To provide a process for manufacturing a piezoelectric element in which uniformity of piezoelectric characteristics can be enhanced.
SOLUTION: The process for manufacturing a piezoelectric element comprises a step for drying sol of organic metal, and a step for degreasing it where a substrate 512 is heated by applying one side of the substrate entirely and tightly to a hot plate 100. More specifically, there are a method employing a substrate suction type hot plate equipped with a small hole 104, and a method for applying a load by means of a weight 101. Alternatively, the substrate 512 may be pressed tightly onto a metal plate 105 and mounted on the hot plate 100 with warp being corrected. Furthermore, it may be heated not through heat conduction but through radiation by placing a ceramic plate 102 on the hot plate 100 or using an electric heating wire 103.
COPYRIGHT: (C)2008,JPO&INPIT

摘要翻译： 要解决的问题：提供一种可以提高压电特性均匀性的压电元件的制造方法。 解决方案：用于制造压电元件的方法包括用于干燥有机金属溶胶的步骤，以及通过将基板的一侧完全紧密地施加到热板100来加热基板512的脱脂步骤。 更具体地说，存在采用装有小孔104的基板抽吸式加热板的方法，以及通过重物101施加负载的方法。或者，可以将基板512紧压在金属板105上， 安装在加热板100上，其中经线被校正。 此外，它可以不通过热传导而被加热，而是通过将陶瓷板102放置在热板100上或使用电加热丝103而被加热。（C）2008，JPO和INPIT