公开(公告)号：JPH11323549A

公开(公告)日：1999-11-26

申请号：JP13214798

申请日：1998-05-14

Applicant: NHK SPRING CO LTD

Inventor： MIYAJI SHINYA ,  IGUCHI TADASHI ,  KAYAMOTO TAKASHI

IPC: C23C14/50 ,  H01L21/203 ,  H01L21/205 ,  H01L21/285 ,  H01L21/302 ,  H01L21/3065

Abstract: PROBLEM TO BE SOLVED: To prevent the deformation, by thermal distortion, of a substrate holder equipped with heating and cooling mechanisms used for production or inspection apparatuses for semiconductor devices, FPD devices, etc., with a simple construction. SOLUTION: Material having a relatively small coefft. of thermal expansion is used for a heating unit 1 contg. heating mechanisms and material having the coefft. of thermal expansion larger than the coefft. of thermal expansion of the heating unit is used for a cooling unit (2) contg. cooling mechanisms. The thickness, etc., of both are regulated, by which the thermal distortion may be reduced and the deformation suppressed even if a temp. gradient occurs across both units of the substrate holder.

公开(公告)号：JPH104160A

公开(公告)日：1998-01-06

申请号：JP17746396

申请日：1996-06-17

Applicant: NHK SPRING CO LTD

Inventor： AYADA TOMOHIKO ,  MIYAHARA JUNICHI ,  HIROKAWA NORIKO ,  KAYAMOTO TAKASHI

IPC: H01L23/373 ,  B22F3/14 ,  H01L23/36

Abstract: PROBLEM TO BE SOLVED: To provide heat radiating material for a semiconductor substrate and its manufacturing method which can reduce a manufacturing cost and can attempt a high performance of a material quality. SOLUTION: A two element mixture of metal particles and ceramic particles is sealed into sheath material by vacuum seal without adding such a third element as Ag and so on, by cold working the mixture and by heat working after a sudden heating. Compounds caused by isolating Si can be suppressed, sinter density is improved and thermal conductivity is improved. Additionally, the metal particles can largely be deformed by a high pressure during heating condition, and can tightly be contacted with a phase boundary with the ceramic particles, and the sinter density and the thermal conductivity are further improved.

公开(公告)号：JPH05174884A

公开(公告)日：1993-07-13

申请号：JP34304891

申请日：1991-12-25

Applicant: NHK SPRING CO LTD

Inventor： KATO SUNAO ,  SATO SHIGEMI ,  KAYAMOTO TAKASHI ,  MIYAHARA JUNICHI

IPC: H01R43/02

Abstract: PURPOSE:To feed a specific amount of brazing material to a specific position accurately and easily. CONSTITUTION:A connector main body 11 consists of a ceramics as an insulator, and a through hole 15 is formed therein. A conductor pin 12 is inserted to the through hole 15, and soldered to the connector main body 11. A brazing material 30 before heating has a coil form, and it is installed to a specific position of the conductor pin 12. The brazing material 30 is housed in a diameter expanding part 20 provided at the upper end side of the through hole 15. After the conductor pin 12 to which the brazing material 30 is installed to a specific position is set in the through hole 15 in such a way, it is heated, and the brazing material 30 is let flow to the lower side of the through hole 15 by utilizing the dead weight of the molten brazing material 30, so as to carry out the brazing.

公开(公告)号：JPH0569158A

公开(公告)日：1993-03-23

申请号：JP26138591

申请日：1991-09-13

Applicant: NHK SPRING CO LTD

Inventor： TAGUCHI KOHEI ,  KAYAMOTO TAKASHI ,  AYADA TOMOHIKO

IPC: B23K20/00

Abstract: PURPOSE:To obtain a joined part having performance, which is not inferior to a base material in the case of manufacturing a complex material composed of intermetallic compound in at least a part. CONSTITUTION:The complex material composed of the intermetallic compound in at least a part, is composed of a first member 11 composed of a mixed body of a Ti foil 15 and Al foils 16, 17 possible to form the intermetallic compound (TiAl+Ti3Al) and a second member 12 joining this first member 11. In the case of manufacturing this complex material, the foil 16 mainly containing Al being one component in the intermetallic compound is set on a joining interface between the first member 11 and the second member 12. Then these are mutually polymerized and also by heating to the temp. forming the intermetallic compound, the joining between both members is executed.

公开(公告)号：JPH04209587A

公开(公告)日：1992-07-30

申请号：JP40538190

申请日：1990-12-05

Applicant: NHK SPRING CO LTD

Inventor： SAITO SHINJI ,  TANGE AKIRA ,  KATO SUNAO ,  KAYAMOTO TAKASHI ,  SATO SHIGEMI

IPC: H05B3/20 ,  B32B15/04 ,  H01B17/62 ,  H01B19/00 ,  H05K1/05

Abstract: PURPOSE:To improve heat radiation property and improve the adhesion by temperature change by using glass, where ceramic particles are dispersed, for an insulating layer. CONSTITUTION:First, metallic alkoxide solution is applied on the surface of a metallic base material layer 2, and this substrate 1 is dried at, for example, approximately a room temperature to 200 deg.C, and then it is heated in atmospheric temperature, and kept at a specified temperature for, for example, ten minutes, and then it is cooled at a speed of specified temperature per minute, thus a metallic oxide layer 3 is baked. Next, at the surface of this metallic oxide layer 3 is printed the screen of paste, wherein ceramic Al2O3 particles and lead borosilicate crystallized glass powder are dispersed uniformly in vehicle consisting of an organic solvent at the ratio of 1:1 in this case, by raising the temperature at a speed of, for example, 35 deg.C per minute so as to bake an insulating layer 4.

公开(公告)号：JPH0275480A

公开(公告)日：1990-03-15

申请号：JP22806388

申请日：1988-09-12

Applicant: NHK SPRING CO LTD

Inventor： KAYAMOTO TAKASHI ,  TONO TOYOYUKI ,  TANGE AKIRA ,  KATO SUNAO

IPC: B23K20/00 ,  B32B15/04

Abstract: PURPOSE:To obtain the firm joined face without defects by setting a pressing tool having the peripheral surface corresponding to the tapered inside of metallic base material and setting material to be joined on the periphery side of the metallic base material and raising the temperature of these materials and pressing the pressing tool to subject the metallic base material and the material to be joined to diffusion joining together. CONSTITUTION:The graphite pressing tool 5 having the tapered peripheral surface 6 is inserted into the tapered inside 3 of the cylindrical metallic base material 1 in the normal temperature and the material 8 to be joined and a jig 15 having the inside diameter larger than the peripheral surface of the base material 1 and having the coefficiency of thermal expansion lower than the base material are set thereon. The base material 1, the material 8 to be joined, the pressing tool 5 and the jig 15 are heated together and the inside of a hot press is evacuated and the temperature thereof is raised up to the joining temperature of the base material 1 and the material 8 to be joined. In the course of the temperature-rise, low load is applied to the pressing tool 5 to push in it toward the bottom 2. The outside peripheral surface of the base material 1 is stuck fast to the inside peripheral surface 10 of the material 8 to be joined. At the stage attaining the joining temperature, the load is further increased on the pressing tool 5 and the diameters of the base material 1 and the material 8 to be joined are enlarged and these materials are held for a prescribed time to obtain a perfect joining state. By this method, the material to be joined with the desired thickness can be firmly joined without causing the defects.

公开(公告)号：JPH0146129B2

公开(公告)日：1989-10-06

申请号：JP2237881

申请日：1981-02-18

Applicant: NHK SPRING CO LTD

Inventor： KAYAMOTO TAKASHI

IPC: A47C7/28 ,  A47C7/35

公开(公告)号：JPS63273215A

公开(公告)日：1988-11-10

申请号：JP10817487

申请日：1987-05-01

Applicant: NHK SPRING CO LTD

Inventor： TANGE AKIRA ,  KAYAMOTO TAKASHI ,  KATO SUNAO ,  TONO TOYOYUKI

IPC: G11B5/82 ,  G11B5/73 ,  G11B5/84

Abstract: PURPOSE:To improve smoothness and heat resistance and to reduce the cost of production by joining borosilicate type sheet glass to both faces of a metallic core material consisting of an Al, Ti or austenitic stainless steel with low melting glass as a joining material. CONSTITUTION:The metallic core material 2 is formed of the Al, Ti or austenitic stainless steel. The glass sheets 3 are formed of the borosilicate type sheet glass having a specified thickness. The pasty low melting glass 4 is coated on the core material 2 and the glass sheets 3 and is subjected to tentative calcination. The glass sheets 3 are then superposed on both faces of the core material 2 and are subjected to calcination under pressurization and further to finishing by polishing, by which a hard disk substrate 1 is formed. Since the substrate 1 is formed by using the low melting glass 4 as the joining material, the residual stress by the calcination is small. The hard disk substrate which has the excellent smoothness and heat resistance, has no defects on the surface,and has the high joint strength is thereby produced at the low cost.

公开(公告)号：JPS63165132A

公开(公告)日：1988-07-08

申请号：JP31549486

申请日：1986-12-26

Applicant: NHK SPRING CO LTD

Inventor： KATO SUNAO ,  KAYAMOTO TAKASHI ,  TONO TOYOYUKI

IPC: C04B37/02 ,  B23K20/00 ,  B32B15/04

公开(公告)号：JPS6360080A

公开(公告)日：1988-03-16

申请号：JP20286886

申请日：1986-08-29

Applicant: NHK SPRING CO LTD

Inventor： KAYAMOTO TAKASHI ,  TONO TOYOYUKI ,  OTOGAWA KUNISUMI ,  TAKAGI YASUSHI

IPC: B23K20/00

Abstract: PURPOSE:To obtain satisfactory strength, heat resistance, compactness and hardness by coating nickel to one face of a thin sheet consisting of a glass material and press-welding the one face of the thin sheet to a core sheet via an insert material. CONSTITUTION:The core sheet 1 consisting of an aluminum alloy or pure aluminum is prepd. A nickel film 3 is then formed by ion plating, etc., on one face of the thin glass sheet 2 consisting of soda lime glass. The nickel film 3 may consists of titanium, nickel alloy or titanium alloy. A thin copper sheet 4 is then sandwiched as the insert material between the nickel film 3 and the surface of the core sheet 1 and is press-welded at a prescribed temp. The magnetic disk substrate obtd. in the above-mentioned manner is not adversely affected at all even in the case of sputtering a magnetic film.