摘要:
PROBLEM TO BE SOLVED: To provide an improved machine mount capable of isolating vibrations of a machine.SOLUTION: A support part for a machine, which isolates vibrations generated from a machine, includes a plurality of mounts. Each mount includes: an elastic block which perfectly supports a static load of the machine; and an active isolating means, which includes an inertia vibration generator configured so as to basically maintain zero rigidity of the mount relative to a structural excitation resonance and so as to correct the transmission of unbalanced force to a hull in a condition exceeding the resonant frequency of the mount and in a desirable frequency range. A control system connected to the inertia vibration generator includes a means which applies a damping force signal so as to damp the structural resonance to prevent a start of the resonant vibration.
摘要:
PROBLEM TO BE SOLVED: To provide a vibration isolation system for an imprint lithographic apparatus, capable of improving a throughput of an imprint lithographic apparatus. SOLUTION: An imprint lithographic apparatus 100 includes an actuator 130 displacing an imprint template holder 110 relative to a substrate holder 120. A support structure 140 of the imprint template holder 110 and/or the substrate holder 120 is attached to a vibration isolation system 150 attached to a base 160. The vibration isolation system 150 isolates vibration of the support structure 140 relative to the base 160. A control unit controlling the actuator 130 in an imprint process controls an adjusting member of the vibration isolation system 150, and adjusts a dynamic characteristic of the vibration isolation system 150 during at least part of the imprint process to reduce a displacement of the support structure 140 relative to the base 160, the displacement being caused by a force acting the support structure 140. COPYRIGHT: (C)2011,JPO&INPIT
摘要:
PROBLEM TO BE SOLVED: To provide an inexpensive suspension device with excellent control responsiveness, improved in vehicle ride quality. SOLUTION: The suspension device 100 for a vehicle is provided with a linear motor having coils 41 and permanent magnets 42 arranged respectively on a vehicle body side member and a wheel side member. The linear motor is a single-phase linear motor 40 of a single phase drive type, and is provided with: a state detection sensor 30 for detecting a relative movement state of the vehicle body side member and the wheel side member, or an absolute movement state of the vehicle body side member; and a control part 10 for controlling a load output by the single phase linear motor 40, based on a detection result of the state detection sensor 30. COPYRIGHT: (C)2009,JPO&INPIT
摘要:
PROBLEM TO BE SOLVED: To provide a suspension device using a motor whereby an increase of the size can be avoided even when a gas spring is applied thereto. SOLUTION: The suspension device A comprises a buffer S having a motion conversion mechanism H for converting the relative motion between a vehicle body side member and an axle side member into the rotational motion and a motor M having a rotor 8 to which the rotational motion is transferred, and a gas spring C to be interposed between the vehicle body side member and the axle side member. The motor M comprises a hollow casing 9, a bulkhead member 16 forming a rotor chamber r to store the rotor 8 in the casing 9, and a cylindrical stator 17 arranged between an outer periphery of the bulkhead member 16 and an inner periphery of the casing 9, and the rotor 8 to be rotatably held by the casing 9 in the rotor chamber r. The rotor chamber 6 is communicated with a gas chamber R of the gas spring C. COPYRIGHT: (C)2008,JPO&INPIT
摘要:
PROBLEM TO BE SOLVED: To provide a shock absorber capable of improving the reliability and driving comfort in a vehicle, applying constitution to generate damping force using electromagnetic force of a motor. SOLUTION: The shock absorber comprises a motion converting mechanism T to convert linear motion into rotational motion, a motor M transmitted by rotational motion converted by the motion converting mechanism T, an actuator A connected to a spring upper part B side of the vehicle, a cylinder C, a piston P slidably inserted into the cylinder C to partition into two pressure chambers in the cylinder C, a rod R having one end connected to the piston P, a hydraulic damper E which gets the linear motion of the actuator A transmitted to one end of the rod R or the cylinder C and keeps the other end of the rod R or the cylinder C connected to a spring lower part W side of the vehicle, and urging means 1, 2, X, Y, Z for urging the hydraulic damper E in the compression direction and the hydraulic damper E in the expansion direction. COPYRIGHT: (C)2008,JPO&INPIT