Method of decomposing nf3 and apparatus using the same
    79.
    发明专利
    Method of decomposing nf3 and apparatus using the same 审中-公开
    分解NF3的方法和使用其的装置

    公开(公告)号:JP2010194416A

    公开(公告)日:2010-09-09

    申请号:JP2009039835

    申请日:2009-02-23

    IPC分类号: B01D53/68 H01L21/205

    摘要: PROBLEM TO BE SOLVED: To provide a method of decomposing NF 3 used in cleaning equipment for manufacture of semiconductors, liquid crystals and solar cells which is inexpensive, controls formation of gases having high greenhouse effects and allows industrial decomposition, and to provide an NF 3 decomposition apparatus or a detector which is inexpensive and low in running cost. SOLUTION: The method of decomposing NF 3 includes decomposing NF 3 by reacting NF 3 with a metal, a metal oxide, a metal fluoride or a hydrate of a metal fluoride. COPYRIGHT: (C)2010,JPO&INPIT

    摘要翻译: 要解决的问题:为了提供廉价的用于制造半导体,液晶和太阳能电池的清洁设备中使用的NF SB 3的方法,控制具有高温室效应的气体的形成和 允许工业分解,并提供便宜且运行成本低的NF 3 分解装置或检测器。 解决方案:分解NF 3 的方法包括通过使NF 3 与金属,金属氧化物,金属 氟化物或金属氟化物的水合物。 版权所有(C)2010,JPO&INPIT