Liquid-phase laser ablation method and device
    71.
    发明专利
    Liquid-phase laser ablation method and device 有权
    液相激光扫描方法和装置

    公开(公告)号:JP2012170881A

    公开(公告)日:2012-09-10

    申请号:JP2011035060

    申请日:2011-02-21

    发明人: NAGAREI SANSHIRO

    IPC分类号: B01J19/12 B23K26/12 B23K26/36

    摘要: PROBLEM TO BE SOLVED: To provide a liquid-phase laser ablation device and a method therefor, in each of which a liquid is not stuck to optical components or the likes of the liquid-phase laser ablation device, the optical components are hardly soiled or damaged, and a laser ablation operation can be lasted continuously and safely over a long period of time.SOLUTION: The liquid-phase laser ablation device includes: a container for storing the liquid comprising a component to be atomized; a laser oscillation unit for oscillating laser light with which the component to be atomized is irradiated through the liquid; a reflection mirror configured to freely change an incident angle of the laser light onto the surface of the liquid; a light collecting lens for collecting the laser light oscillated from the laser oscillation unit; a cover for covering the upper surface of the container; and a laser light introduction port arranged on the cover or on the side face of the container above the surface of the liquid.

    摘要翻译: 要解决的问题:为了提供一种液相激光烧蚀装置及其方法,其中每个液体不粘附到液相激光烧蚀装置的光学部件等,光学部件是 几乎没有污染或损坏,激光烧蚀操作可以持续和安全地持续很长一段时间。 解决方案:液相激光烧蚀装置包括:用于储存包含待雾化部件的液体的容器; 激光振荡单元,用于振荡通过液体照射被雾化的组分的激光; 反射镜,被配置为将激光的入射角自由地改变到液体的表面上; 聚光透镜,用于收集从激光振荡单元振荡的激光; 用于覆盖容器的上表面的盖子; 以及布置在所述容器的所述盖上或所述容器的侧表面上方的所述液体的表面上的激光引入口。 版权所有(C)2012,JPO&INPIT

    Imprint device, and article manufacturing method
    72.
    发明专利
    Imprint device, and article manufacturing method 有权
    IMPRINT DEVICE,AND ARTICLE MANUFACTURING METHOD

    公开(公告)号:JP2012164785A

    公开(公告)日:2012-08-30

    申请号:JP2011023516

    申请日:2011-02-07

    IPC分类号: H01L21/027 B29C59/00 G11B5/84

    摘要: PROBLEM TO BE SOLVED: To provide an imprint device advantageous to realize both of accurate pattern formation and throughput.SOLUTION: In an imprint device 1, an imprint material 12 on a substrate 10 is molded and hardened by a die 8, so as to form a pattern on the substrate 10. The imprint device 1 has supply means 6 for supplying gas between the imprint material 12 on the substrate 10 and the die 8. The supply means 6 supplies mixture gas formed by mixing permeable gas permeating at least one of the die 8, the imprint material 12, and the substrate 10, and condensable gas liquified by pressure generated by molding.

    摘要翻译: 要解决的问题:提供一种有利于实现准确的图案形成和生产量的压印装置。 解决方案:在压印装置1中,基板10上的压印材料12由模具8模制和硬化,以在基板10上形成图案。压印装置1具有用于供应气体的供给装置6 在基板10上的压印材料12和模具8之间。供给装置6提供通过混合渗透至模具8,压印材料12和基板10中的至少一个的可渗透气体而形成的混合气体,以及可冷凝气体 通过模制产生的压力。 版权所有(C)2012,JPO&INPIT

    Method for manufacturing metallic mold, method for manufacturing functional film and functional film
    78.
    发明专利
    Method for manufacturing metallic mold, method for manufacturing functional film and functional film 有权
    制造金属模具的方法,制造功能膜和功能膜的方法

    公开(公告)号:JP2010058474A

    公开(公告)日:2010-03-18

    申请号:JP2008229362

    申请日:2008-09-08

    IPC分类号: B29C33/40

    摘要: PROBLEM TO BE SOLVED: To solve such a problem that a seam remains at an outer peripheral surface of a metallic mold and the presence of the seam generates unnecessary parts in a functional film when a pattern is formed by machining a cylindrical metallic mold material. SOLUTION: A method for manufacturing the metallic mold comprises a step of forming the pattern by carrying out laser processing onto a surface to be processed of a cylindrical resin original plate 9, and a step of manufacturing a cylindrical metallic mold 18 by an electrocasting method using the resin original plate 9 having the formed pattern. A method for manufacturing the functional film comprises a step of transferring a pattern of the metallic mold to a film base material by using the metallic mold obtained by the method for manufacturing the metallic mold. COPYRIGHT: (C)2010,JPO&INPIT

    摘要翻译: 要解决的问题为了解决在金属模具的外周面处留下接缝的问题,并且当通过机加工圆柱形金属模具形成图案时,接缝的存在在功能膜中产生不必要的部分 材料。 解决方案:一种用于制造金属模具的方法包括通过对圆柱形树脂原版9的待加工表面进行激光加工来形成图案的步骤,以及通过以下步骤制造圆柱形金属模具18: 使用具有形成图案的树脂原版9的电铸方法。 用于制造功能膜的方法包括通过使用通过金属模具的制造方法获得的金属模将金属模的图案转印到膜基材的步骤。 版权所有(C)2010,JPO&INPIT