めっき装置
    3.
    发明专利
    めっき装置 审中-公开

    公开(公告)号:JPWO2018123059A1

    公开(公告)日:2019-10-31

    申请号:JP2016089200

    申请日:2016-12-28

    Abstract: ハーリングセル試験等において電流分布の乱れ及び一対の陰極の電位のずれを防止することが可能なめっき装置を提供する。 めっき装置(1)は、めっき槽(11)内に設けられる陽極(12)及び一対の陰極(13X)(13Y)と、陽極(12)と一対の陰極(13X)(13Y)との間にめっき電流を流すためのめっき電源(14)と、一対の陰極(13X)(13Y)に流れる電流の合計値が一定に保たれた状態で、一方の陰極(13X)の電位と他方の陰極(13Y)の電位とを一致させるフィードバック回路(21)と、を備える。

    Electrode production method, electrode production apparatus, and electrode
    6.
    发明专利
    Electrode production method, electrode production apparatus, and electrode 有权
    电极生产方法,电极生产设备和电极

    公开(公告)号:JP2012237027A

    公开(公告)日:2012-12-06

    申请号:JP2011105396

    申请日:2011-05-10

    CPC classification number: Y02P70/54

    Abstract: PROBLEM TO BE SOLVED: To provide an electrode production method capable of easily producing an electrode which has a specific surface shape, for example, suitable for having chiral selectivity formed.SOLUTION: The electrode production method for producing an electrode which has a specific surface shape formed on the surface thereof is provided, wherein while allowing rotation of an electrolysis tank 6 in the counterclockwise direction or in the clockwise direction around the axis of rotation arranged parallel to the direction of a magnetic field B generated by a magnet, electrolysis is performed by applying at least one of voltage and current through an electrolytic medium to a pair of electrodes 71 and 72 arranged in the electrolysis tank 6 so as to rotate around the axis of rotation with the electrolysis tank 6.

    Abstract translation: 解决的问题:提供能够容易地制造具有比表面形状的电极的电极制造方法,例如适合于形成手性选择性的电极。 解决方案:提供一种用于制造具有形成在其表面上的比表面形状的电极的电极制造方法,其中,同时允许电解槽6沿着旋转轴线的逆时针方向或顺时针方向旋转 平行于由磁体产生的磁场B的方向排列,通过将电解质中的至少一个电压和电流施加到布置在电解槽6中的一对电极71和72以进行电解而进行电解,以便围绕 电解槽6的旋转轴。版权所有(C)2013,JPO&INPIT

    Barrel plating apparatus
    9.
    发明专利
    Barrel plating apparatus 审中-公开
    BARREL电镀设备

    公开(公告)号:JP2007291446A

    公开(公告)日:2007-11-08

    申请号:JP2006120392

    申请日:2006-04-25

    CPC classification number: C25D17/20

    Abstract: PROBLEM TO BE SOLVED: To provide a barrel plating apparatus capable of preventing the occurrence of the burning of a plated film formed on the surface of a material to be plated by preventing the occurrence of a gap between the material-to-be-plated housed in a drum and a rod-like conductive member which causes the formation of a high current density part. SOLUTION: The barrel plating apparatus is provided with the cylindrical drum 2 dipped in a plating solution in a horizontal state and housing the material to be plated, a supporting member 6 for supporting the drum 2 rotatable, a driving mechanism 5 for rotatively driving the drum 2 and a center bar 3 arranged coaxially with the drum 2 and connected to an axial rod 26B integrally rotating with the drum 2. COPYRIGHT: (C)2008,JPO&INPIT

    Abstract translation: 要解决的问题:提供一种滚镀装置,其能够防止在被镀材料的表面上形成的镀膜的燃烧的发生,从而防止在要被镀的材料之间产生间隙 电镀容纳在鼓中和导致形成高电流密度部分的棒状导电构件。 解决方案:滚镀装置设置有以水平状态浸在电镀液中的圆筒形滚筒2,并容纳待镀材料,用于支撑滚筒2可旋转的支撑部件6,用于旋转的驱动机构5 驱动滚筒2和与滚筒2同轴设置并连接到与滚筒2一体旋转的轴向杆26B的中心杆3.版权所有(C)2008,JPO&INPIT

    Fixture for electroplating
    10.
    发明专利
    Fixture for electroplating 审中-公开
    电镀设备

    公开(公告)号:JP2006233296A

    公开(公告)日:2006-09-07

    申请号:JP2005051215

    申请日:2005-02-25

    CPC classification number: C25D17/001 C25D17/06 H05K2203/1147

    Abstract: PROBLEM TO BE SOLVED: To provide a fixture for electroplating with which, in the object to be plated, plating of parts other than a face to be plated can be securely prevented, and whose performance, reliability or the like can be improved.
    SOLUTION: The air in a space part S surrounded by first and second insulation plates 10, 20, an inside seal 40, and an outside seal 50 is sucked by a pump P through an air suction passage 60. In this way, the space part S is held to a negative pressure state, the whole of the inside seal 40 is made to abut against a wafer W with uniform pressing force (facial pressure), and further, the whole of the outside seal 50 is made to abut against the second insulator 20 with uniform pressing force (plane pressure).
    COPYRIGHT: (C)2006,JPO&NCIPI

    Abstract translation: 要解决的问题:提供一种用于电镀的固定装置,在待镀物体中,可以可靠地防止除了被镀面以外的部分的电镀,并且可以改善其性能,可靠性等 。 解决方案:由第一和第二绝缘板10,20包围的空间部分S中的空气,内密封件40和外部密封件50通过空气吸入通道60被泵P吸入。这样, 空间部分S被保持在负压状态,整个内部密封件40以均匀的压力(面部压力)抵靠晶片W,此外,使整个外部密封件50抵靠 以均匀的压力(平面压力)抵靠第二绝缘体20。 版权所有(C)2006,JPO&NCIPI

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