部分表面処理装置
    8.
    发明专利
    部分表面処理装置 有权
    部分表面处理装置

    公开(公告)号:JP2015059265A

    公开(公告)日:2015-03-30

    申请号:JP2013195805

    申请日:2013-09-20

    CPC classification number: C25F7/00 C25D11/022 C25D17/00 C25D17/004

    Abstract: 【課題】表面処理の能率向上を図り易く、加圧機構の破損などが生じ難い。【解決手段】外周面Bに周溝A1を形成した被処理物Aに接続される第1電極部材と、被処理物Aに対して対向する内周面31を形成した第2電極部材17と、周溝A1の両側で外周面Bと内周面31との隙間Cをシール可能な一対の環状弾性シール材40と、環状弾性シール材40の夫々を縮径方向に移動可能に収容する周溝部41と、環状弾性シール材40を外周面Bに圧接可能、かつ、圧接を解除自在な加圧機構51と、一対の環状弾性シール材40でシールされた外周面Bと内周面31との間に電解液を供給する流路とを備え、環状弾性シール材40が、周溝部41の溝側面45に対して摺接可能な一対の環状側壁部分および当該一対の環状側壁部分の内周側どうしを一連に接続する環状先端部分を有し、周方向一箇所に外周側の縁部から内周側に向けて延出する切り込みを形成してある。【選択図】図5

    Abstract translation: 要解决的问题:为了促进表面处理的效率提高和减轻压缩机构的断裂等。解决方案:所提供的装置配备有:连接到处理对象A的第一电极构件,其中周边 槽A1形成在其外周面B上; 在其上形成有与处理对象A相对的内周面31的第二电极部件17; 能够在外周面A1的两侧密封外周面B和内周面31的间隙C的一对循环弹性密封材料40; 周边槽单元41沿着直径方向以可移动的方式存储各个循环弹性密封材料40; 压缩机构51,其能够在压力下与循环弹性密封材料40与外周面B接触并抵消其加压接触; 以及在循环弹性密封材料40具有可滑动于槽的一对循环侧壁部的状态下,在由一对循环弹性密封材料40密封的外周面B与内周面31之间供给电解液的流路 周缘槽单元41的轮廓表面45和用于连续地连接一对循环侧壁部的各个内周侧的周向端部以及从外周侧的边缘向内周侧延伸的切口为 沿着周边方向形成在一个位置。

    Pattern formation apparatus and pattern formation method
    9.
    发明专利
    Pattern formation apparatus and pattern formation method 审中-公开
    模式形成装置和模式形成方法

    公开(公告)号:JP2014040633A

    公开(公告)日:2014-03-06

    申请号:JP2012183261

    申请日:2012-08-22

    Abstract: PROBLEM TO BE SOLVED: To enable the reduction of the number of steps in a case where films of different types are formed respectively within multiple regions on the surface F of a workpiece W and where a specified film pattern is obtained from these films.SOLUTION: The provided pattern formation apparatus includes multiple tanks 11 through 19 and a power supply device 10. The tanks 11 through 19 possess aperture edges having shapes identical respectively to contour shapes of multiple regions in which films of mutually different types are scheduled to be formed, and electrodeposition liquids for forming films of different types are stocked respectively therein in a state where the aperture edges thereof are being contacted with the surface F of a workpiece W. The power supply device 10 impresses a specified voltage between the workpiece W serving as a first electrode and each of second electrodes positioned respectively within the multiple tanks 11 through 19.

    Abstract translation: 要解决的问题:为了能够在工件W的表面F上的多个区域内分别形成不同类型的膜的情况下的步骤数目的减少,并且从这些膜获得指定的膜图案。解决方案: 所提供的图案形成装置包括多个容器11至19和电源装置10.容器11至19具有孔边缘,其具有与其中预定形成彼此不同类型的膜的多个区域的轮廓形状相同的形状;以及 用于形成不同类型薄膜的电沉积液分别在其孔边缘与工件W的表面F接触的状态下放置。电源装置10在作为第一电极的工件W之间施加指定的电压 并且每个第二电极分别位于多个罐11至19内。

    Seal structure of the cylinder block plating apparatus

    公开(公告)号:JP5332416B2

    公开(公告)日:2013-11-06

    申请号:JP2008225262

    申请日:2008-09-02

    CPC classification number: C25D7/04 C25D5/02 C25D17/004 C25D17/12

    Abstract: A cylinder block plate processing apparatus in which one end side of an inner peripheral surface of a cylinder of a cylinder block is sealed to circulate a process liquid to perform pre-plating or plating processing of the cylinder inner peripheral surface. The apparatus includes: an apparatus body having a workpiece mount table on which the cylinder block is placed; a workpiece holding tool that is provided on the workpiece mount table so as to be vertically movable; an electrode support member including an electrode cylinder mounted to the apparatus body; a processing solution supply member that supplies a processing solution to the electrode support member; an electrode operated by the electrode cylinder; a sealing jig provided to one end of the electrode; a driving mechanism that drives the sealing jig; and a control circuit that controls operations of the processing solution supply member and the driving mechanism.

Patent Agency Ranking