A method of cleaning the slit nozzle of a coating apparatus

    公开(公告)号:JP5363204B2

    公开(公告)日:2013-12-11

    申请号:JP2009140413

    申请日:2009-06-11

    Abstract: PROBLEM TO BE SOLVED: To provide a method of cleaning slit nozzle which can wash away a coating liquid remaining within a supply tube and a slit nozzle with a small amount of a solvent used and without disassembling the slit nozzle, allow rapid drying after cleaning and enable resuming quickly the coating process using the slit nozzle. SOLUTION: The method is for cleaning the slit nozzle 1 which discharges the coating liquid supplied by the supply pipe (2) from a slit formed between lips 1a and 1b arranged oppositely with a slight clearance and allows discharging and removing the coating liquid remaining within the slit nozzle 1 efficiently by introducing liquefied carbon dioxide into the supply pipe (2) after completion of discharge of the coating liquid and discharging the liquefied carbon dioxide from the slit. COPYRIGHT: (C)2011,JPO&INPIT

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