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公开(公告)号:JP5363204B2
公开(公告)日:2013-12-11
申请号:JP2009140413
申请日:2009-06-11
Applicant: エア・ウォーター株式会社
Abstract: PROBLEM TO BE SOLVED: To provide a method of cleaning slit nozzle which can wash away a coating liquid remaining within a supply tube and a slit nozzle with a small amount of a solvent used and without disassembling the slit nozzle, allow rapid drying after cleaning and enable resuming quickly the coating process using the slit nozzle. SOLUTION: The method is for cleaning the slit nozzle 1 which discharges the coating liquid supplied by the supply pipe (2) from a slit formed between lips 1a and 1b arranged oppositely with a slight clearance and allows discharging and removing the coating liquid remaining within the slit nozzle 1 efficiently by introducing liquefied carbon dioxide into the supply pipe (2) after completion of discharge of the coating liquid and discharging the liquefied carbon dioxide from the slit. COPYRIGHT: (C)2011,JPO&INPIT
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公开(公告)号:JP4223010B2
公开(公告)日:2009-02-12
申请号:JP2005022815
申请日:2005-01-31
Applicant: エア・ウォーター株式会社
CPC classification number: Y02E60/366
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公开(公告)号:JP3532293B2
公开(公告)日:2004-05-31
申请号:JP12372495
申请日:1995-05-23
Applicant: エア・ウォーター株式会社
CPC classification number: F25J3/04054 , F25J3/04157 , F25J3/04163 , F25J3/04181 , F25J3/04254 , F25J3/04303 , F25J3/04351 , F25J3/04424 , F25J3/04878 , F25J2200/54 , F25J2205/70 , F25J2205/82 , F25J2210/42 , F25J2270/90
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公开(公告)号:JP3841732B2
公开(公告)日:2006-11-01
申请号:JP2002259754
申请日:2002-09-05
Applicant: エア・ウォーター株式会社
IPC: H01M8/02
CPC classification number: Y02E60/50
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