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公开(公告)号：JP5950855B2
公开(公告)日：2016-07-13
申请号：JP2013056306
申请日：2013-03-19
Applicant: 住友重機械イオンテクノロジー株式会社
IPC: H01L21/265 , H01J37/317
CPC classification number: C23C14/564 , H01J37/08 , H01J37/3171 , B08B7/00 , H01J2237/006 , H01J2237/022 , H01J2237/182
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