公开(公告)号：JP5337531B2

公开(公告)日：2013-11-06

申请号：JP2009045029

申请日：2009-02-27

Applicant: 株式会社日立ハイテクノロジーズ

Inventor： 和之 平尾 ,  周一 中川 ,  秀樹 板井

IPC: H01J37/22 ,  H01J37/20

Abstract: PROBLEM TO BE SOLVED: To provide a charged particle beam device for accurately specifying an object to be measured without depending on coordinate errors owing to heat generated by the continuous movement of a stage mechanism or others. SOLUTION: The charged particle beam device includes an arithmetic unit for specifying a measurement position with template matching. It also includes a storing medium for storing a relationship for a change of a shift length between an ideal measurement position for the object to measured, which is specified with an increase in the number of measurement points and the template matching of the increase in the number of measurement points, and an actual measurement position. The arithmetic unit calculates the shift length at the next measurement point in accordance with the relationship. When the calculation value exceeds a predetermined threshold value, it calculates a displacement that the shift length is corrected in accordance with the calculation value. COPYRIGHT: (C)2010,JPO&INPIT

公开(公告)号：JP5473556B2

公开(公告)日：2014-04-16

申请号：JP2009266129

申请日：2009-11-24

Applicant: 株式会社日立ハイテクノロジーズ

Inventor： 秀樹 板井

IPC: H01L21/66 ,  G01R31/302 ,  H01J37/20 ,  H01J37/22