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公开(公告)号：JP2003307187A
公开(公告)日：2003-10-31
申请号：JP2003151756
申请日：2003-05-29
申请人： Hitachi Ltd , 株式会社日立製作所
发明人： TAKAO KUNIHIKO , TAKEBAYASHI MASAHIRO , ENDO KIJU , YOSHITOMI YUJI , MACHIDA SHIGERU , TOJO KENJI , SEKIGAMI KAZUO
摘要： PROBLEM TO BE SOLVED: To provide a scroll compressor of small size assuring a good performance and good reliability.
SOLUTION: The scroll compressor includes a revolving scroll 6 which is put in an eccentric circle motion with respect to stationary scrolls 4 and 5 while the rotation round its own axis is hindered whereby a gas is compressed, wherein the revolving scroll 6 is furnished with a groove 6e at the peripheral surface of a flat plate so as to accommodate an Oldham joint 15 to engage with the revolving scroll and admit an eccentric circle motion of the revolving scroll while its rotation round the own axis is hindered.
COPYRIGHT: (C)2004,JPO摘要翻译： 要解决的问题：提供小尺寸的涡旋压缩机，确保良好的性能和良好的可靠性。 涡旋压缩机包括旋转涡卷6，该旋转涡卷6相对于固定涡卷4和5以偏心圆周运动，同时绕其自身轴线的旋转被阻碍，从而气体被压缩，其中回转涡卷6是 在平板的圆周表面上设置有槽6e，以便容纳一个十字接头15，以便与旋转涡卷啮合并允许旋转涡卷的偏心圆周运动，同时围绕自身轴的转动被阻碍。 版权所有（C）2004，JPO
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公开(公告)号：JP2002340911A
公开(公告)日：2002-11-27
申请号：JP2001144485
申请日：2001-05-15
申请人： HITACHI LTD
发明人： YOSHIMURA YASUHIRO , ENDO KIJU
摘要： PROBLEM TO BE SOLVED: To provide a space-saving sheet-type microreactor having high productivity and capable of simply performing a blood test and chemical reaction, and a mobile type chemical analyzer using the same. SOLUTION: The sheet-type microreactor is constituted by providing a non- adhesion part for passing or holding a liquid or air, a first gap part becoming a non-contact part for injecting a specimen, a second gap part becoming a plurality of non-adhesion parts becoming reagent passing flow channels and a third gap part becoming a plurality of non-adhesion parts for holding a reagent to perform chemical reaction in a laminate formed by closely bonding and superposing a plurality of flexible sheets. The mobile type chemical analyzer has the sheet-type microreactor, a rotary drive means performing rotation for applying centrifugal force to the specimen along the surfaces of the sheets of the sheet-type microreactor, a moving means for moving the centrifugally separated specimen from the second gap part to the third gap part, a light emitting element for irradiating a separated reaction product of the specimen and the reagent with light and a photodetector for detecting the light emitted from the reaction product.
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公开(公告)号：JP2002107378A
公开(公告)日：2002-04-10
申请号：JP2000303750
申请日：2000-10-03
申请人： HITACHI LTD
发明人： AONO TAKANORI , KANAMARU MASATOSHI , ENDO KIJU , HOSOGANE ATSUSHI , MIYATAKE TOSHIO , AOKI HIDEYUKI , IWASAKI TOMIO
摘要： PROBLEM TO BE SOLVED: To provide a substrate for semiconductor inspection which can widely inspect starting from low-speed operation to high-speed operation and has long life time. SOLUTION: This substrate for semiconductor inspection, which has probes 2 and an external connection electrode 5 for connecting an external inspecting device arranged on a silicon substrate 1a, is used to inspect the electrical characteristics of a semiconductor element, by bringing electrode pads of the semiconductor element into contact with the probes 2; and wires 4 connecting the probes 2 and external connection electrode 5 are formed of a film in at least three layers on an insulating film 1b, formed on the silicon substrate 1a and the wiring structure composed of the metal film in at least three layers is adaptive to wide inspection, extending from the low-speed operation to high- speed operation and tends not to break, even when repeatedly used for the inspection, so the substrate for semiconductor inspection which has long life time can be provided.
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公开(公告)号：JP2001302135A
公开(公告)日：2001-10-31
申请号：JP2000128947
申请日：2000-04-25
申请人： HITACHI LTD
发明人： KATO KENSUKE , NAGASE HIROSHI , NAKAMURA ICHIRO , YOSHITOMI YUJI , ENDO KIJU
摘要： PROBLEM TO BE SOLVED: To provide an elevator having a means for grasping a deterioration advancing state of a rope with the lapse of time and determining a rope scrap ping time. SOLUTION: In this elevator where a car and a counter weight are connected by plural ropes, and the ropes are wound on sheaves to be frictionally driven, optical fibers are mounted in the ropes, a light emitting means is mounted on one end of each rope, a light receiving means is mounted on the other end of each rope, and further a means for detecting and recording the change of the transmittance amount of the light passing through the optical fiber, a means for determining the deterioration and the life of the rope, and a means for informing the scrapping time of the rope and a result of the detection to a manager of the elevator, are installed. As the deterioration advancing state of the rope can be continuously grasped on-line, the time to replace or scarp the rope can be quickly determined, which improves the safety and the reliability on the elevator. Further by automatically recording and informing the deterioration advancing state of the rope, the labor for maintenance can be saved.
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公开(公告)号：JP2001165052A
公开(公告)日：2001-06-19
申请号：JP34827899
申请日：1999-12-08
申请人： HITACHI LTD
发明人： YOSHIMURA YASUHIRO , KOIDE AKIRA , SASAKI YASUHIKO , TERAYAMA TAKAO , MIYAKE AKIRA , ENDO KIJU
摘要： PROBLEM TO BE SOLVED: To provide a micro pump which can discharge liquid with high accuracy without leaving any droplet even when discharging a small amount of liquid. SOLUTION: The micro pump 53 is mounted on a nozzle holder 20, and a bottle joint 203 for supporting a reagent container 201 is mounted on the micro pump 53. The nozzle holder 20 is formed with a through hole 202A. An outlet port 100A of the micro pump 53 and a cylindrical nozzle 200 are fit into each end of the through hole 202A. The nozzle 200 facilitates discharging of reagent in the reagent container 201 out of a discharge port 200A of the nozzle 200. Specifically, no droplet is left after the discharge and a highly accurate discharge is performed even when the amount of liquid to discharge is very small.
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公开(公告)号：JP2001091544A
公开(公告)日：2001-04-06
申请号：JP27180599
申请日：1999-09-27
申请人： HITACHI LTD
发明人： KONO RYUJI , MIURA HIDEO , ENDO KIJU , KANAMARU MASATOSHI , HOSOGANE ATSUSHI , AOKI HIDEYUKI , BAN NAOTO
摘要： PROBLEM TO BE SOLVED: To inspect a plurality of semiconductor devices easily collectively by a plurality of probes by eliminating problems such as the accuracy of the probes in the probes of a semiconductor inspecting device. SOLUTION: This method for manufacturing a semiconductor inspecting device is provided with a process to form a coating on the surfaces of a silicon substrate and to form a plurality of pyramidical or conical probes by etching after patterning by photolithography (FR), a process to form a coating on the surfaces of the silicon substrate again after removing the coating and to form a beam or diaphragm for every probe by etching after patterning by FR, a process to form a coating on the surfaces of the silicon substrate again after removing the coating and to form through holes by etching after patterning by FR, and a process to form an insulating coating on the surfaces of the silicon substrate again after removing the coating, to form a metal coating on the surfaces of the insulating coating, and to form wiring by etching after patterning by FR.
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公开(公告)号：JP2000297761A
公开(公告)日：2000-10-24
申请号：JP10621999
申请日：1999-04-14
申请人： HITACHI LTD
发明人： YOSHIMURA YASUHIRO , KOIDE AKIRA , SASAKI YASUHIKO , MIYAKE AKIRA , TERAYAMA TAKAO , UCHIDA HIROYASU , ENDO KIJU
摘要： PROBLEM TO BE SOLVED: To increase the leakage angle of a liquid relative to a discharge face at the instant when the liquid is discharged and separated from a discharge port and improve the shutoff property of the liquid immediately after the discharge is completed by forming a groove around the discharge port on the discharge face including the discharge port of the liquid on a discharge nozzle section. SOLUTION: A discharge nozzle 101 is provided at the center section of a nozzle substrate 100. The discharge nozzle 101 is constituted of a discharge port 110 discharging or dripping a liquid and a bank 113 formed as a projection 113, and an inlet 111 is provided on the liquid entering side of the nozzle substrate 100. A groove 112 is formed around the discharge port 110. A half or above of the thickness of the nozzle substrate 100 is enough for the depth of the groove 111 in consideration of the strength of the discharge nozzle 101, and the reduction of discharge precision and stains around the discharge port 110 caused by the sticking of the liquid can be prevented. Discharge resolution and discharge stability can be improved without requiring periodic disassembling and cleaning.
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公开(公告)号：JP2000171483A
公开(公告)日：2000-06-23
申请号：JP34644498
申请日：1998-12-07
申请人： HITACHI LTD
发明人： HOSOGANE ATSUSHI , KANAMARU MASATOSHI , KONO RYUJI , ENDO KIJU , ARIGA AKIHIKO , BAN NAOTO , AOKI HIDEYUKI
摘要： PROBLEM TO BE SOLVED: To collectively inspect the electrode pads having a large area of a wafer to be inspected by forming such a beam or diaphragm structure that probes are changed by pressing forces in a substrate on which the probes are formed and pressing or fixing the wafer in which the electrode pads are formed. SOLUTION: A plurality of probes 13 is formed in an inspection wafer 11 by forming a coating film on the surface of a silicon substrate and, after the film is patterned by photolithography, a plurality of probes 13 by etching. Then, after the coating film is removed, diaphragms 12 are formed at every probe 13 in the same process. In the same process, in addition, through holes 14 are formed correspondingly to the probes 13 and wiring 16 is formed from the probes 13 to secondary-side electrode pads 17 through the through holes 14. The electrode pads 17 are connected to POGO pins 25 and the wafer 11 fixed to a pressing mechanism supporting substrate 23 is pressed against a wafer 21 to be inspected on a wafer fixing stage 22. Therefore, the probes 13 can evenly inspect the primary-side electrode pads 23 of the wafer 21 for electric characteristics, because the probes 13 come into contact with the electrodes pads 23, resulting in the deformation of the diaphragms 12, and a fixed load is applied between the probes 13 and electrode pads 23.
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公开(公告)号：JPH11351161A
公开(公告)日：1999-12-21
申请号：JP16659798
申请日：1998-06-15
申请人： HITACHI LTD
发明人： NATORI TATSUO , MIZUMOTO MUNEO , YANASE YUICHI , ENDO KIJU , YOSHITOMI YUJI , MACHIDA SHIGERU , SHIIKI KAZUAKI
IPC分类号： F04C18/02
摘要： PROBLEM TO BE SOLVED: To increase abrasion resistance so as to allow long-term use by forming a tip seal for a scroll from a material containing PTFE as a principal constituent and applying a coating containing PTFE-PAI-MoS2 substance as a main principal constituent onto a mirror finished surface at least in a mating part sliding on the tip seal. SOLUTION: In a scroll compressor, a tip seal insertion groove formed in a spiral shape substantially is formed in the position facing a mirror finished surface part in a mating side scroll member in each of a rotary scroll member and a fixed scroll member, and in these grooves, a tip seal is mounted so as to prevent gas leakage from the high pressure side to the lower pressure side. The tip seal member is formed of a material in which PTFE is contained as a principal constituent, an inorganic substance such as carbon fiber and glass fiber is added, and polyimice is mixed as filler for improving thermal resistance. On the other hand, on the scroll mirror finished surface, a coating containing a PTFE-PAI-MoS2 substance as a principal constituent is applied after treatment with hard anodized aluminum is applied.
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公开(公告)号：JPH11134626A
公开(公告)日：1999-05-21
申请号：JP29669997
申请日：1997-10-29
申请人： HITACHI LTD
发明人： YOSHIMURA YASUHIRO , AONO TAKANORI , IKEDA YUKIKO , ENDO KIJU , TOKISUE HIROMITSU , YONEKAWA SUNAO
摘要： PROBLEM TO BE SOLVED: To prevent spacing loss and the sticking of a slider to a magnetic disk by producing the slider by coating with a fluorine-contg. compd. and irradiation with UV-contg. light. SOLUTION: In the production of a magnetic disk device with a magnetic head which performs the recording and reproduction of data to a magnetic disk 1 with a lubricant formed on the surface and a slider mounted with the magnetic head and confronting the magnetic disk, at least the surface of a slider confronting the magnetic disk is irradiated with argon plasma, coated with a fluorine-contg. compd. and dried by heating or irradiated with UV to produce the objective slider. Since the surface material of the slider is activated by irradiated with the argon plasma, bonding to the fluorine-contg. compd. is made tighter and the surface of the slider is made irregular. The lubricant or grease on the magnetic disk comes is contact with only the irregularities of the slider and oil repellency increases.
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