公开(公告)号：JPS6417363A

公开(公告)日：1989-01-20

申请号：JP17303687

申请日：1987-07-13

Applicant: MITSUBISHI ELECTRIC CORP

Inventor： IWAMI TAIZO ,  MURAKAMI EISHIN ,  YASUNAGA MASASHI

IPC: H01J37/147 ,  H01L21/027 ,  H01L21/30

Abstract: PURPOSE:To make a beam irradiating position locatable in a highly accurate manner by setting up a ring, consisting of a ferromagnetic material, in at least either side of both upper and lower parts of a deflecting lens. CONSTITUTION:In both upper and lower parts or either side of a deflecting lens 6 with a ferromagnetic material core, there is provided with a deflecting lens system which has deliberately set up a ferromagnetic ring 21 with a hysteresis characteristic. This magnetic material ring 21 is passed through a leakage magnetic field of the deflecting lens 6, generating a residual magnetic field 25 in the opposite direction to another residual magnetic field 24 of a deflector in a beam passage, and it negates an error of a beam irradiating position by the residual magnetic field attributable to the hysteresis characteristic. With this constitution, such a deflecting lens system that is high in beam irradiating position accuracy is realizable.

公开(公告)号：JPS6321734A

公开(公告)日：1988-01-29

申请号：JP16456486

申请日：1986-07-15

Applicant: MITSUBISHI ELECTRIC CORP

Inventor： MURAKAMI EISHIN ,  MARUYAMA TOSHIRO ,  YASUNAGA MASASHI

IPC: B23K15/00 ,  B23K15/02 ,  H01J37/06 ,  H01J37/248

Abstract: PURPOSE:To prevent beam focusing position from changing even if the thermal electron emitting performance of a cathode changes due to the fluctuation of the cathode heating characteristic or the aging, by regulating the temperature of the cathode so that bias voltage is kept constant against the specified acceleration voltage and the beam current. CONSTITUTION:Acceleration voltage VA is detected by an acceleration voltage detection resistor 14, beam current IK is detected by a beam current detection resistor 10, and bias voltage VC is detected by a bias voltage transmission circuit 15, a 2nd optical fiber 16 and a bias voltage receiver circuit 17 and those detected data are fed to a cathode temperature control circuit 18. VA and VC fed to the cathode temperature control circuit 18 are subjected to calculation by an attenuator 20, an adder 21, function operator 22 and an amplifier 23 and are compared with the measurement result of beam current Ik in a PID circuit 24. If the thermal electron emitting has decreased, the PID circuit 24 increases the output of a heating power source 7 of a thermal cathode 1 through a 3rd optical fiber 19 to increase the cathode temperature.

公开(公告)号：JPS60205611A

公开(公告)日：1985-10-17

申请号：JP5960984

申请日：1984-03-29

Applicant: MITSUBISHI ELECTRIC CORP

Inventor： ISHIMI TAIZOU ,  YASUNAGA MASASHI

IPC: B23Q15/013 ,  G05B19/40 ,  G05B19/4103

Abstract: PURPOSE:To draw a trace consisting of circles and straight lines at a high speed by calculating a pulse train previously on the basis of data on the trace to be drawn on the XY table and storing it previously, and reading the pulses at a specific speed and outputting them a pulse motor. CONSTITUTION:An input device 8 inputs data generated while the movement trace on the XY table 1 is decomposed into circles and straight lines and movement speed data on the XY table 1. An arithmetic unit 9 which receives the data from the input device 8 converts the movement trace on the XY table 1 into a driving pulse train and rotation-directional signal sequence for pulse motors 2X and 2Y. A storage device 10 stores pulse trains calculated as to every section of the track as the pulse train of the whole trace. A pulse output device 11 outputs the stored pulse train from the storage device 10 to driving power sources 3X and 3Y at a speed specified by the input device 8. Consequently, the trace formed of the circles and straight lines is drawn on the XY table.

公开(公告)号：JPS5913587A

公开(公告)日：1984-01-24

申请号：JP12250682

申请日：1982-07-12

Applicant: Mitsubishi Electric Corp

Inventor： KOBAYASHI TOSHIYUKI ,  YASUNAGA MASASHI ,  MORI DAISUKE

IPC: B23K15/06 ,  B23K15/00

CPC classification number: B23K15/00

Abstract: PURPOSE:To seal surely a vacuum chamber for welding with a simple mechanism in an electron beam welding device, by using a slide sheet of specific construction between a moving electron gun and the vacuum chamber. CONSTITUTION:A packing 10 having many through-holes 10c in the cylindrical part 10b between lips 10a adjacent to a slide seal 3 having roughly an X shape in section is disposed in the packing groove 11 formed by enclosing an electron beam passage hole 6 on the top surface of a vacuum chamber 1 in the stage of welding the objects 8 to be welded in the chamber 1 with the electron beam B from a movable electron gun 2 in the upper part of the vacuum chamber. An evacuation hole 12 for double-stage evacuation is provided successively with the groove 11 and through the holes 10c of the packing 10; further, a fixing pin 13 for packing which prevents the movement of the packing 10 in the groove 10 by its sliding resistance is inserted into the holes 10c and the hole provided in the groove 11. The vacuum chamber is sealed during electron beam welding with the simple sealing mechanism.

Abstract translation: 目的：通过在电子束焊接装置中使用简单的机构来确定地密封用于焊接的真空室，通过使用移动的电子枪和真空室之间的特定结构的滑动片材。 构成：在圆筒部10b中具有与滑动密封件3相邻的具有大致X形截面的滑动密封件3之间的许多通孔10c的填料10设置在通过在电子束通孔6上封闭而形成的填料槽11中 在真空室的上部将来自可动电子枪2的电子束B焊接在室1中的待焊接物体8的阶段中的真空室1的顶面。 连续设置有用于双层抽空的抽空孔12，槽11和填料10的孔10c; 此外，用于防止填料10在槽10中由于其滑动阻力而移动的用于填料的固定销13插入到孔10c和设置在槽11中的孔中。真空室在电子束焊接期间被密封， 简单的密封机制。

公开(公告)号：JPS5858800B2

公开(公告)日：1983-12-27

申请号：JP3064277

申请日：1977-03-18

Applicant: Mitsubishi Electric Corp

Inventor： YASUNAGA MASASHI ,  KAMYAMA ZENJI ,  YABUNAKA FUMIHARU

IPC: H05H5/02 ,  H05H5/00

公开(公告)号：JPS5857275B2

公开(公告)日：1983-12-19

申请号：JP7291579

申请日：1979-06-07

Applicant: Mitsubishi Electric Corp

Inventor： YASUNAGA MASASHI ,  SASAKI SHIGEO ,  MANABE MASARU

IPC: H01J37/315 ,  B23K15/00

公开(公告)号：JPS5857274B2

公开(公告)日：1983-12-19

申请号：JP5950479

申请日：1979-05-14

Applicant: Mitsubishi Electric Corp

Inventor： YASUNAGA MASASHI ,  YOSHIDA KAZUO ,  MANABE MASARU

IPC: H01J37/315 ,  B23K15/00

公开(公告)号：JPS58173089A

公开(公告)日：1983-10-11

申请号：JP5769182

申请日：1982-04-05

Applicant: MITSUBISHI ELECTRIC CORP

Inventor： MURAKAMI EISHIN ,  YASUNAGA MASASHI

IPC: H01J37/315 ,  B23K15/00

Abstract: PURPOSE:To provide a titled device which does not break down thermally a material to be welded and can be constituted inexpensively by the constitution wherein a weld line is scanned by superposing the oscillation waveform of a frequency sufficiently higher than the basic signal of the deflection signal of an electron beam on said deflection signal. CONSTITUTION:The detection signal obtained by scanning an electron beam on a material to be welded by a periodic or intermittent signal and detecting the reflected ray generated from the surface of said material by the scanning electron beam and the current signal of an X-axis and a Y-axis inputted to a deflection coil for deflecting said scanning beam are inputted to a signal processing unit so as to be processed therewith, whereby the weld line of electron beam welding is detected. The current signal of the high frequency from a high frequency transmitter is inputted to the X-axis of one deflection signal of the electron beam and an ordinary sine wave signal is inputted to the other Y-axis in the above-mentioned method, and both signals are superposed to deflect the electron beam, whereby the locus of the scanning electron beam is made equivalently wide in line, the current density is decreased and heating power is decreased while the resolving power for the position in the Y-axis direction is kept unvaried.

公开(公告)号：JPS5492541A

公开(公告)日：1979-07-21

申请号：JP16027077

申请日：1977-12-29

Applicant: MITSUBISHI ELECTRIC CORP

Inventor： YASUNAGA MASASHI ,  SASAKI SHIGEO ,  NIWA TAKASHI

IPC: B23K15/00

Abstract: PURPOSE:To make preventable the cracking to be generated at the toe of weld, when the carbon steels of dissimilar carbon content are to be welded along the closed curve, by gradually displacing the position of irradiation of the electron beam to the side of low carbon steel, after finishing one turn of the welding. CONSTITUTION:First, the electron beam 5 is directed to the seam 3 of the butt face of materials 1 and 2 to be welded, which are then rotated for finishing one turn of the welding along the entire circumference. And then, after the time t0 passes, the current of electron beam is held at Ib0 while the time ti; under this condition, the gradually increasing deflecting current IR is supplied to the deflecting coil 8, until the current is increased up to IRO. Hereby, the tip of the electron beam 5 displaced from 5a to 5b, and heats and melts the position along the outer circumference of the formerly formed welding bead 6; hereupon, the electron beam 5 gradually attenuates, so that the shape of bead at the toe of weld becomes smooth. This displacement is carried out gradually transferring to the low carbon steel material 1 to be welded. Hereby, the concentration of impurities gradually decreases, so that the cracking generated at the toe of weld of the second layer can be reduced.

公开(公告)号：JPS5451781A

公开(公告)日：1979-04-23

申请号：JP11815977

申请日：1977-09-30

Applicant: MITSUBISHI ELECTRIC CORP

Inventor： KAMIYAMA ZENJI ,  YASUNAGA MASASHI ,  YOSHIKAWA KANZOU

IPC: H01J37/04 ,  H01J37/28 ,  H01J37/30 ,  H01L21/26

Abstract: PURPOSE:To secure measurement of the output current supplied to more than two units of the charged particle beam generator which are connected to a power source via the coaxial cable, by incorporating the current transformer into the receptacle to measure the current flowing through the connection part of the connector. CONSTITUTION:Connector 9 to connect acceleration power source 3 and high- voltage cable 4 is provided at the output terminal of each beam dissolving unit 1, and DC current transformer 5 is incorporated into the connector. The current of high-voltage power source 30 circulates through the load current measurement unit via pin 91 of socket 99, cable core 41, dissolving unit 1, cable external conductor 43 and current transformer cover 96 respectively. The output current to be supplied to the dissolving unit flows through within transformer 5, so the current flowing through the output terminal can be detected by transformer 5. In such constitution, the coaxial cable with external conductor is connected normally to drive parallel more than two units of the charged particle beam generator with one power source.