Abstract:
PROBLEM TO BE SOLVED: To solve the problem that is produced by the mutual overlapping of a plurality of radiation beams to be used, or corresponding to the induced radiation light signals in a manner of the wavelength region. SOLUTION: The specimen 12, which is supported on the imager stage of a specimen imaging scanning type imager and in which a plurality of kinds of probes are inserted, are scanned in a time division multiplexed manner by a rotating polygon scanner set 160 or the like, by using the radiation beams from a plurality of the radiation sources 62' and 62" arranged in a predetermined positional relation, based on the incident side opening of an optical path 154. The light signal, which is produced by the action of the radiation beams on the specimen 12 and time-multiplexed scanning, while excluding interference, is transmitted to a photosensor system by the optical path 154. The light signal due to a photosensor 98 is received and detected corresponding to the group of the radiation sources, and the light signal sensed by the photosensor 98 is processed by a control unit 80 that is a processor. COPYRIGHT: (C)2006,JPO&NCIPI
Abstract:
PROBLEM TO BE SOLVED: To provide a surface inspection apparatus and a surface inspection method capable of detecting the state of defects in the surface of matter in detail. SOLUTION: In the surface inspection apparatus and the surface inspection method for inspecting a surface to be inspected 40 on the basis of the intensity of reflected light when irradiating light irradiated to the surface to be inspected 40 is reflected, an optical fiber 41 and a diffusing plate 42 irradiate the surface to be inspected 40 with the irradiating light having a light intensity distribution more intense to the side of the surface to be inspected 40, and a CCD sensor 44 detects the intensity of reflected light when the irradiating light is reflected by the surface to be inspected 40. COPYRIGHT: (C)2006,JPO&NCIPI
Abstract:
PROBLEM TO BE SOLVED: To more accurately detect cells, while suppressing the occurrence number of false images or ghosts by enhancing the throughput, reliability (accuracy) and the scanning speed. SOLUTION: The sweep irradiation with a radiation beam 64' is applied to a specimen 12', which is supported on the stage 20' of an imager 10', from an orthogonal direction by a scanning-type radiation source 110 so that preferably almost circular irradiation spot due to the radiation beam 64' traverses the specimen 12'. Optical paths, for example, the incident side openings 124 and 126 of branch optical fiber bundles 120 and 122 orthogonally face and are arranged with respect to the specimen 12' so as to approach the locus of the irradiation spot. The light signal, emitted by the specimen 12' corresponding to irradiation with the radiation beam 64', is transmitted to the emission side opening 52' by the optical paths to be sensed in the emission side opening 52' by a photosensor 90' and is processed by a processor 80' to form an image the specimen 12'. COPYRIGHT: (C)2006,JPO&NCIPI
Abstract:
PURPOSE: To well perform detection, by providing a light source to one side of a shield plate, of which the leading end is contacted with the surface of plywood in a slidable manner while providing an optical fiber to the other side thereof and contacting one end of the optical fiber with the surface of the plywood in a slidable manner and directing the other end thereof to a light detector. CONSTITUTION: When plywood 1 is inspected while moved, light emitted to the direction shown by the arrow from the light source provided to the left side of a shield part 2 passes through a concaved flaw 1a to be incident to a large number of optical fibers 3 from one terminals 3a thereof and only the optical fiber 3, of which the terminal part is positioned above said flaw 1a, strongly emits light from the other terminal part 3b thereof toward a light detector. The light detector detects the presence of the concaved flaw 1a, for example, due to a worm-eaten hole by the difference in the brightness with the other optical fiber 3. Furthermore, the flaw at a built-up part can be detected in the same way. COPYRIGHT: (C)1986,JPO&Japio