Manufacturing method for electron emission device having high packing density
    1.
    发明专利
    Manufacturing method for electron emission device having high packing density 有权
    具有高包装密度的电子发射装置的制造方法

    公开(公告)号:JP2005285778A

    公开(公告)日:2005-10-13

    申请号:JP2005135104

    申请日:2005-05-06

    Abstract: PROBLEM TO BE SOLVED: To provide a structure of an electron emission device having high packing density of an emitter and to provide its manufacturing process. SOLUTION: An electron emission property element suitable for a flat panel type display is manufactured by high packing density. An electronic emitter has a base supporting the structure. A lower side non-insulation region patterned into a shape forming a plurality of parallel lines is formed on an insulation material which is the base. An electron emission property filament is formed in a hole extending in an insulation layer provided on the lower side non-insulation region. Typically, a patterned non-insulation gate layer is provided on the insulation layer to form a gate control type device. Preferably, a position of an electron emission mechanism is delimited using a charged particle track. By using the charged particle track, the electron emission mechanism is greatly miniaturized and is arranged by bringing mutual interval close. COPYRIGHT: (C)2006,JPO&NCIPI

    Abstract translation: 解决的问题:提供具有高发射极堆积密度的电子发射装置的结构并提供其制造工艺。 解决方案:适用于平板型显示器的电子发射特性元件以高堆积密度制造。 电子发射器具有支撑结构的基座。 在作为基底的绝缘材料上形成图案化为形成多条平行线的形状的下侧非绝缘区域。 在设置在下侧非绝缘区域上的绝缘层中延伸的孔中形成电子发射特性长丝。 通常,在绝缘层上设置图案化的非绝缘栅极层以形成栅极控制型器件。 优选地,使用带电粒子轨道限定电子发射机构的位置。 通过使用带电粒子轨道,电子发射机构大大地小型化并且通过使相互间隔接近来布置。 版权所有(C)2006,JPO&NCIPI

    Method for manufacturing field emission element with carbon nanotube having tripolar structure
    3.
    发明专利
    Method for manufacturing field emission element with carbon nanotube having tripolar structure 有权
    具有三重结构的碳纳米管制备场致发射元件的方法

    公开(公告)号:JP2009049019A

    公开(公告)日:2009-03-05

    申请号:JP2008278142

    申请日:2008-10-29

    Abstract: PROBLEM TO BE SOLVED: To provide a field emission element with carbon nanotubes and a method for manufacturing the same, capable of preventing short-circuit between a gate electrode and a cathode. SOLUTION: The method for manufacturing the field emission element includes: a first step of performing vapor deposition of a protective layer on an insulation layer and a gate electrode such that the protective layer surrounds them and subsequently patterning the protective layer such that it is left only on the insulation layer and the gate electrode; a second step of coating a carbon nanotubes paste on the protective layer such that the paste is laminated on the protective layer with a well and an opening filled; a third step of irradiating light from a back side surface of a substrate so as to make the carbon nanotubes paste and the protective layer exposed and subsequently lifting off unexposed portions during development of the carbon nanotubes paste and the protective layer so as to form a carbon nanotubes column; and a fourth step of sintering the carbon nanotubes column so as to lower its height and subsequently performing surface treatment thereon so as to form a field emitting source, in which carbon nanotubes chips are aligned on a surface of the carbon nanotubes column. COPYRIGHT: (C)2009,JPO&INPIT

    Abstract translation: 要解决的问题:为了提供具有碳纳米管的场发射元件及其制造方法,能够防止栅电极和阴极之间的短路。 解决方案:用于制造场致发射元件的方法包括:在绝缘层和栅电极上进行保护层的气相沉积的第一步骤,使得保护层围绕它们并随后对保护层进行图案化,使得其 仅留在绝缘层和栅电极上; 第二步是在保护层上涂覆碳纳米管糊料,使得糊料层压在保护层上并填充开口; 第三步骤,从基板的背面照射光,以使碳纳米管浆料和保护层暴露,随后在碳纳米管浆料和保护层的显影期间将其暴露出来,从而形成碳 纳米管柱 以及烧结碳纳米管柱以降低其高度并随后在其上进行表面处理以形成其中碳纳米管芯片在碳纳米管柱的表面上排列的场发射源的第四步骤。 版权所有(C)2009,JPO&INPIT

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