Abstract:
PROBLEM TO BE SOLVED: To enable a deflection by a required high-perveance beam by limiting an eddy current induced at a beam line to a restrictive value. SOLUTION: A deflection device for a high-perveance ion beam is made to have a magnetic structure acting at a fundamental frequency of 20 Hz and a harmonic in a higher order than this and formed by a lamination layer (72) of a thickness in the range of 0.2 to 1 mm. In addition, it is a compensator of a similar lamination structure having a resonance excitation circuit acting at a frequency of 20 Hz or higher and made to have a constitution in a phase locked relation with a beam frequency deflected beforehand. COPYRIGHT: (C)2004,JPO
Abstract:
PROBLEM TO BE SOLVED: To provide the heavy ion implanting instrument of both a continuous hybrid type and a batch type using a magnetic scan system operated at a frequency from 20Hz to 300Hz condition. SOLUTION: A deflection apparatus for a high perveance ion beam, which works at a basic frequency of 20Hz or an order harmonic wave having a frequency higher than the basic frequency, and which has a magnetic structure formed by a stacked layer (72) having a thickness from 0.2 to 1mm. A compensator comprising a similar stacked layer structure having a resonance excitation circuit, which works at a frequency not less than 20 Hz, and which has a phase closure relation with a preliminary deflected beam frequency. A wide range of application for generating a strong magnetic field in a magnetic space is disclosed with another characteristics. COPYRIGHT: (C)2005,JPO&NCIPI