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公开(公告)号：KR1020120054629A
公开(公告)日：2012-05-30
申请号：KR1020127006243
申请日：2010-08-06
Applicant: 무사시 엔지니어링 가부시키가이샤
Inventor： 이쿠시마가즈마사
CPC classification number: H01L21/563 , H01L24/743 , H01L2224/16225 , H01L2224/32225 , H01L2224/73203 , H01L2224/73204 , H01L2924/01004 , H01L2924/01055 , H01L2924/12042 , H01L2924/00
Abstract: 본 발명은, 범프(bump)가 비균등하게 배치되어 있는 경우의 침투도의 차이나 노즐의 방향 전환에 따른 속도차에 의한 필릿(fillet) 형상의 흐트러짐을 없게 하고, 필릿 형상을 일정하게 유지할 수 있는 도포 방법, 장치 및 프로그램을 제공한다. 본 발명은, 원하는 도포 패턴을 작성하고, 노즐과 공작물을 상대 이동시키면서 액체 재료를 노즐로부터 토출(吐出)하고, 기판과 그 위에 3개 이상의 범프를 사이에 두고 탑재된 공작물과의 간극(間隙)에 모세관 현상을 이용하여 액체 재료를 충전하는 액체 재료의 도포 방법으로서, 범프가 비균등하게 배치되어 있는 경우에, 상기 도포 패턴에서의 단위 면적당의 공급량을, 범프의 집적도가 낮은 영역과 인접하는 도포 영역과 비교하여 범프의 집적도가 높은 영역과 인접하는 도포 영역 쪽이 많아지도록 설정하는 것을 특징으로 하는 액체 재료의 도포 방법, 장치 및 프로그램에 관한 것이다.
Abstract translation: 公开了一种施加方法，装置和程序，其能够不改变由于与喷嘴方向的变化相关联的速度差异而形成的形状，或者当凸起布置在非喷射状态时穿透程度的差异， 均匀。 在液体材料施加方法中，产生期望的施加图案，液体材料从喷嘴排出，同时喷嘴和工件相对于彼此移动，并且基板和工件之间的间隙，工件被放置在基板上方 通过至少三个凸起，通过毛细作用填充液体材料。 如果凸起不均匀地布置，则施加图案的每单位面积的供给量被设定为使得向凸起的积分密度较高的区域旁边的施加区域提供更多的量，而不是供给到邻近的应用区域 凸块的集成密度低的区域。
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公开(公告)号：KR1020120036974A
公开(公告)日：2012-04-18
申请号：KR1020127001055
申请日：2010-06-11
Applicant: 무사시 엔지니어링 가부시키가이샤
Inventor： 이쿠시마가즈마사
CPC classification number: H01L21/563 , B05D7/22 , H01L24/743 , H01L2224/16225 , H01L2224/32225 , H01L2224/73203 , H01L2224/73204 , H01L2924/01004 , H01L23/295 , H01L2924/00
Abstract: 본 발명은, 토출(吐出) 장치의 이동 속도를 변경하지 않고, 토출량의 변화를 보정하고, 또한 도포 형상을 안정시킬 수 있는 액체 재료의 충전 방법, 그 장치 및 프로그램을 제공하는 것을 목적으로 한다. 본 발명은, 기판과 공작물과의 간극(間隙)에 모세관 현상을 이용하여 액체 재료를 충전하는 방법으로서, 연속된 복수 개의 도포 영역으로 이루어지는 도포 패턴을 작성하는 공정과, 각 도포 영역에 토출 펄스의 수와 휴지(休止) 펄스의 수를 소정 비율로 조합한 토출 사이클을 복수 할당하는 공정과, 보정 주기로 토출량을 계측하고, 토출량의 보정량을 산출하는 공정을 포함하고, 또한 산출한 보정량에 기초하여, 도포 패턴에 포함되는 토출 펄스와 휴지(休止) 펄스의 수를 조정하는 공정, 및/또는, 적어도 1의 도포 영역과 연속되는 다른 도포 영역의 길이를, 각 도포 영역에서의 단위 시간당의 토출량을 변경하지 않고 조정하는 공정을 포함하는, 액체 재료의 충전 방법, 그 장치 및 프로그램에 관한 것이다.
Abstract translation: 提供了一种用于填充液体材料的方法及其装置和程序，其可以在不改变喷射装置的移动速度的情况下，来校正喷射量的变化并稳定施加形状。 公开了一种通过使用毛细作用将液体材料填充到基板和工件之间的间隙中的方法; 以及用于其的装置和程序。 该方法包括以下步骤：产生由彼此连续的多个应用区域组成的应用模式; 分配多个喷射循环，每个喷射循环通过将喷射脉冲的数量和其间的预定比例的暂停脉冲数组合到每个应用区域而获得; 并以校正间隔测量喷射量并计算喷射量的校正量。 该方法还包括以下步骤中的至少一个：基于所计算的校正量，调整包括在应用模式中的喷射脉冲数和暂停脉冲数; 以及将连续的任何应用区域的长度调整到至少一个应用区域，而不改变各个应用区域中每单位时间的喷射量。
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公开(公告)号：KR101116711B1
公开(公告)日：2012-02-22
申请号：KR1020087012064
申请日：2006-10-20
Applicant: 무사시 엔지니어링 가부시키가이샤
Inventor： 이쿠시마가즈마사
IPC: B05C5/00
CPC classification number: B67D7/16 , B05C5/0229 , B67D7/428 , B67D7/64 , Y10T137/86863 , Y10T137/86871
Abstract: 본 발명은 액재 토출 장치에 관한 것으로서, 다양한 점도의 액재에 대응 가능하면서, 플런저 진퇴 방향에 대한 수평 방향으로 장치가 불필요하게 돌출하거나 넓어지지 않는 구조이며, 복수개의 장치를 연접 가능하게 하는 액재 토출 장치를 제공하는 것을 과제로 한다. 본 발명은, 액재가 공급되는 액재 공급구와, 액재가 토출되는 노즐과, 토출되는 액재가 충전되는 계량 구멍 및 액재 공급구와 연통시키는 액재 공급 유로를 포함하는 밸브 블록과, 계량 구멍과 액재 공급 유로를 연통시키는 제1 유로 및 계량 구멍과 노즐을 연통시키는 제2 유로를 포함하는 전환 밸브와, 계량 구멍 내를 진퇴 이동하는 플런저와, 플런저를 구동시키는 플런저 구동부와, 전환 밸브를 작동시키는 밸브 구동부와, 밸브 구동부의 구동을 전환 밸브에 전달하는 전달부로 구성되는 액재 토출 장치로서, 상기 플런저 구동부, 상기 밸브 구동부 및 상기 밸브 블록이 길이 방향으로 연장되는 것을 특징으로 하는 액재 토출 장치를 제공한다.
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公开(公告)号：KR1020100072324A
公开(公告)日：2010-06-30
申请号：KR1020107009473
申请日：2008-09-29
Applicant: 무사시 엔지니어링 가부시키가이샤
Inventor： 이쿠시마가즈마사
CPC classification number: H01L21/6715 , B05C5/0216 , B05C5/0225 , B05C11/1005
Abstract: [PROBLEMS] A liquid material applicator, an application method, and a program all for solving the problems, namely, the delay of the response time of a liquid material and the variation with time of the viscosity without preparing a large amount of control data. [MEANS FOR SOLVING PROBLEMS] A liquid material application method for continuously applying a liquid material to a work by a screw dispenser opposed to the work while relatively moving the work and the screw dispenser at a constant speed, with the amount of liquid material dispensed non-constantly. The method includes a response time calculating step of calculating the response delay time of when the amount of liquid material dispensed is varied before application. The response time calculating step includes a first sub-step of transmitting a signal for varying the amount of liquid material dispensed to the dispenser during the application during which the moving speed is constant and storing the time, a second sub-step of calculating the time when the variation of the amount of liquid material dispensed is started by measuring the applied liquid material and storing the time, and a third sub-step of storing the difference between the time stored at the first sub-step and that at the second sub-step as a response delay time of when the amount of liquid material dispensed is varied. An applicator and a program are also provided.
Abstract translation: [问题]用于解决问题的液体材料施加器，施加方法和程序，即液体材料的响应时间的延迟和粘度随时间的变化而不需要准备大量的控制数据。 解决问题的方法一种液体材料施加方法，用于在将工件和螺旋分配器以一定的速度相对移动的同时，通过与工件相对的螺钉分配器将液体材料连续地施加到工件上，同时分配非液体材料的量 -constantly。 该方法包括响应时间计算步骤，用于计算在施用之前分配的液体材料的量变化时的响应延迟时间。 响应时间计算步骤包括：第一子步骤，在移动速度恒定并且存储时间的应用期间发送用于改变分配给分配器的液体材料量的信号的信号;计算时间的第二子步骤 当通过测量施加的液体材料并存储时间来开始分配的液体材料的量的变化，并且存储第一子步骤和第二子步骤之间存储的时间之间的差的第三子步骤， 作为当分配的液体材料的量变化时的响应延迟时间的步骤。 还提供了涂抹器和程序。
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公开(公告)号：KR1020100057886A
公开(公告)日：2010-06-01
申请号：KR1020107007114
申请日：2008-09-04
Applicant: 무사시 엔지니어링 가부시키가이샤
Inventor： 이쿠시마가즈마사
IPC: G05B19/18 , G05B19/045 , G05B19/4099
CPC classification number: G05B19/4093 , G05B2219/35115 , G05B2219/35491 , G05B2219/35533 , G05B2219/49005 , Y02P90/265
Abstract: [PROBLEMS TO BE SOLVED] It is an object to provide a working environment in which work to draw a moving route or the like and programming work can be done in parallel with each other and, in addition, height information can be visually grasped in programming work of a moving program. [MEANS FOR SOLVING THE PROBLEMS] A program and a device are characterized in comprising a step for displaying a text input screen that makes it possible to input moving information of a working device on a character basis, a step for displaying a diagram input screen that makes it possible to input the moving information of the working device as a route on a two-dimensional plane associated with height information, a step for outputting on a real-time basis the moving information of the working device input from the text input screen to the diagram input screen as a route on a two-dimensional plane and its height information, a step for outputting on a real-time basis the moving information of the working device input from the diagram input screen to the text input screen on a character basis, a step for displaying a three-dimensional display screen of the route of the working device, and a program generating step for automatically generating a moving program of the working device.
Abstract translation: [待解决的问题]本发明的目的是提供一种工作环境，其中绘制移动路线等的工作和编程工作可以彼此并行进行，另外，高程度信息可以在编程中被视觉上掌握 移动程序的工作。 解决问题的手段程序和装置的特征在于包括用于显示文本输入屏幕的步骤，该文本输入屏幕使得可以以字符为基础输入工作装置的运动信息，用于显示图形输入屏幕的步骤 使得可以将工作装置的移动信息作为与高度信息相关联的二维平面上的路线输入，用于实时输出从文本输入屏幕输入的工作装置的移动信息的步骤 所述图形输入画面作为二维平面上的路线及其高度信息，用于以字符为基础实时地输出从图形输入画面输入到文本输入画面的工作装置的移动信息的步骤 用于显示工作装置的路线的三维显示画面的步骤，以及用于自动生成工作装置的移动程序的程序生成步骤。
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Patent Agency Ranking
公开(公告)号：KR1020100017172A
公开(公告)日：2010-02-16
申请号：KR1020097024183
申请日：2008-05-22
Applicant: 무사시 엔지니어링 가부시키가이샤
Inventor： 이쿠시마가즈마사
Abstract: [PROBLEMS] To provide a work apparatus capable of easily maintaining a work head and performing the maintenance without impairing cleanliness. [MEANS FOR SOLVING THE PROBLEMS] This gantry work apparatus comprises a rest having a passage extending in a first direction to which a worker can approach, a frame extending above the rest and in a second direction different from the first direction, a table movable in the first direction on the rest having the passage, and the work head disposed on the frame opposite to the table and movable in the second direction. The table and the work head are moved relative to each other, whereby a desired work can be applied to a workpiece placed on the table.
Abstract translation: [问题]提供一种能够容易地维护工作头并执行维护而不损害清洁的工作装置。 解决问题的手段本台架工作装置包括具有沿着工人可以接近的第一方向延伸的通道的搁板，在其余部分上延伸的框架和在与第一方向不同的第二方向上延伸的桌子， 其余的第一方向具有通道，并且工作头设置在与桌子相对的框架上并可在第二方向上移动。 工作台和工作头相对于彼此移动，从而可以将期望的工件施加到放置在工作台上的工件上。
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公开(公告)号：KR1020100015684A
公开(公告)日：2010-02-12
申请号：KR1020097021760
申请日：2008-04-22
Applicant: 무사시 엔지니어링 가부시키가이샤
Inventor： 이쿠시마가즈마사
CPC classification number: H01L21/6715 , B41J3/28 , B41J29/13
Abstract: Provided are a working apparatus, which can maintain a working head easily and which can perform the maintenance without deteriorating the cleanness, and a cover for the working apparatus. The working apparatus moves a table mounted on a carriage and a working head confronting the table, relative to each other, thereby to perform a desired work on a work mounted on the table. The working apparatus comprises a plurality of supports arranged on the carriage, a frame supported by the supports and extended in a first direction, and a working head arranged on the frame movably in a first direction. The working apparatus and the working apparatus cover are characterized in that the frame is constituted to have its end portions extended to the outer sides of the outer edges of the carriage, and in that the working head can move to the outer side of the outer edges of the carriage.
Abstract translation: 本发明提供一种可以容易地保持工作头并且可以进行维护而不会降低清洁度的工作装置和用于工作装置的盖子。 工作装置相对于彼此移动安装在托架和面对桌子的工作头上的工作台，从而对安装在工作台上的工件执行所需的工作。 该工作装置包括：设置在滑架上的多个支撑件，由支撑件支撑并沿第一方向延伸的框架;以及以第一方向可移动地布置在框架上的工作头。 工作装置和作业装置盖的特征在于，框架的端部部分延伸到托架的外边缘的外侧，并且工作头可以移动到外边缘的外侧 的马车。
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公开(公告)号：KR1020090088390A
公开(公告)日：2009-08-19
申请号：KR1020097011528
申请日：2007-11-26
Applicant: 무사시 엔지니어링 가부시키가이샤
Inventor： 이쿠시마가즈마사
CPC classification number: H01L21/563 , H01L2224/73203 , H01L2924/01004 , H01L2924/01067
Abstract: A method and device for placing a liquid material, in which the device has a high degree of construction freedom and can supply an appropriate amount of the liquid material without complex control. The method utilizes the capillary effect and is used to fill a gap between a substrate and work, held on the substrate, with a liquid material discharged from a discharge section, and the device is used for the method. The method has a supply step for supplying the liquid material to an edge of the work from the discharge section; an imaging step for capturing, by imaging means, an image of that edge of the work from which the liquid material supplied in the preceding supply step is assumed to exude by the capillary effect; a determination step for detecting the presence of the liquid material at the edge of the work based on the captured image and determining whether the liquid material is placed in the entire region of the gap between the substrate and the work; and a replenishment step for supplying the liquid material from the discharge section to the edge of the work when a failure is determined. ® KIPO & WIPO 2009
Abstract translation: 一种用于放置液体材料的方法和装置，其中该装置具有高度的结构自由度并且可以在没有复杂控制的情况下提供适量的液体材料。 该方法利用毛细管效应，用于填充保持在基板上的基板和工件之间的间隙，其中从排出部排出的液体材料，并且该装置用于该方法。 该方法具有供给步骤，用于将液体材料从排出部分供给到工件的边缘; 一种成像步骤，用于通过成像装置捕获所述工件的所述边缘的图像，所述工件边缘被假设为通过毛细管效应渗出在前一供给步骤中供应的液体材料; 确定步骤，用于基于所捕获的图像检测在工件边缘处的液体材料的存在，并且确定液体材料是否被放置在基板和工件之间的间隙的整个区域中; 以及补充步骤，当确定故障时，将液体材料从排出部分供应到工件的边缘。 ®KIPO＆WIPO 2009
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公开(公告)号：KR1020090079911A
公开(公告)日：2009-07-22
申请号：KR1020097008708
申请日：2007-11-01
Applicant: 무사시 엔지니어링 가부시키가이샤
Inventor： 이쿠시마가즈마사
CPC classification number: H01L21/563 , H01L24/27 , H01L24/743 , H01L2224/16225 , H01L2224/32225 , H01L2224/73203 , H01L2224/73204 , H01L2224/92125 , H01L2924/00011 , H01L2924/00014 , H01L2924/01004 , H01L2924/00012 , H01L2924/00 , H01L2224/0401
Abstract: Provided are easily controlled method, apparatus and program for filling a liquid material without requiring complicated parameter calculation. In the method, a gap between a substrate and a work placed thereon is filled with a liquid material discharged from a discharge section by using capillary phenomenon. An application pattern composed of a temporarily stopping point and a non-stopping region along the outer circumference of the work is formed. The liquid material filling method is characterized in correcting a liquid material discharge quantity by increasing or reducing a time when the discharge section is stopped at the temporarily stopping point. The apparatus and the program for performing such method are also provided.
Abstract translation: 提供了容易控制的用于填充液体材料的方法，装置和程序，而不需要复杂的参数计算。 在该方法中，通过使用毛细管现象，从放电部分排出的液体材料填充衬底和其上放置的工件之间的间隙。 形成由沿着工件的外周的临时停止点和不停止区域构成的施加图案。 液体填充方法的特征在于通过增加或减少在临时停止点处排出部停止的时间来校正液体材料排出量。 还提供了用于执行这种方法的装置和程序。
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公开(公告)号：KR1020090074225A
公开(公告)日：2009-07-06
申请号：KR1020097008707
申请日：2007-11-01
Applicant: 무사시 엔지니어링 가부시키가이샤
Inventor： 이쿠시마가즈마사
CPC classification number: H01L21/563 , H01L24/743 , H01L2224/16225 , H01L2224/32225 , H01L2224/73203 , H01L2224/73204 , H01L2224/92125 , H01L2924/00011 , H01L2924/00014 , H01L2924/01004 , H01L2924/01019 , H01L2924/00012 , H01L2924/00 , H01L2224/0401
Abstract: Provided are a method, an apparatus and a program for filling a liquid material, which do not require complicated parameter calculation and do not affect the moving speed of a discharge section. In the method, a gap between a substrate and a work placed thereon is filled with the liquid material discharged from the discharge section by using capillary phenomenon. The method is characterized in forming an application pattern composed of an application region and a non-application region along the outer circumference of a work and correcting a liquid material discharge quantity by expanding/contracting a liquid material discharge quantity by expanding/contracting the application region and the non-application region. The apparatus and the program for performing such method are also provided.
Abstract translation: 提供了一种用于填充液体材料的方法，装置和程序，其不需要复杂的参数计算，并且不影响放电部分的移动速度。 在该方法中，通过使用毛细管现象，从放电部分排出的液体材料填充基板和其上放置的工件之间的间隙。 该方法的特征在于，沿着工件的外周形成由应用区域和非施加区域构成的施加图案，并且通过扩展/收缩施加区域来扩大/收缩液体材料排出量来校正液体材料排出量 和非应用程序区域。 还提供了用于执行这种方法的装置和程序。
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