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160 条记录 (耗时 0.024 秒)

    기판 이송 장치
    63.
    发明公开
    기판 이송 장치 审中-实审
    用于传送基板的装置

    公开(公告)号：KR1020140019490A

    公开(公告)日：2014-02-17

    申请号：KR1020120073965

    申请日：2012-07-06

    申请人： 세메스 주식회사

    发明人： 도대용

    IPC分类号： B65G49/06 ,  G02F1/13 ,  H01L21/677

    CPC分类号： B65G49/061 ,  B65G39/02 ,  B65G49/063 ,  G02F1/1303 ,  H01L21/67706

    摘要： An apparatus for transferring a substrate includes: at least two process chambers arranging an exit through which the substrate exits adjacent to an entrance into which the substrate enters; and shafts installed at the process chambers respectively for transferring the substrate by rotation. The apparatus for transferring the substrate may include a distance compensation part installed between the exist and the entrance to support a rear surface of the substrate in order that a distance between the exist and the entrance may be compensated when the substrate passes between the exit and the entrance, and including a brush structured roller to prevent a damage to the rear surface of the substrate when the rear surface of the substrate is supported.

    摘要翻译： 一种用于转移衬底的设备包括：至少两个处理室，其布置出口，衬底通过该出口邻近衬底进入的入口离开; 以及安装在处理室处的轴，用于通过旋转传送基板。 用于传送基板的装置可以包括安装在存在的和存在于基板的后表面的入口之间的距离补偿部分，以便当基板在出口和出口之间通过时可以补偿存在和入口之间的距离 并且包括刷结构的辊，以在支撑衬底的后表面时防止对衬底的后表面的损坏。

    롤러 유닛
    64.
    发明公开
    롤러 유닛 审中-实审
    滚动单元

    公开(公告)号：KR1020130037521A

    公开(公告)日：2013-04-16

    申请号：KR1020110101967

    申请日：2011-10-06

    申请人： 세메스 주식회사

    发明人： 최홍림

    IPC分类号： G02F1/13 ,  H01L21/677

    CPC分类号： G02F1/1303 ,  B65G39/02 ,  B65G49/061 ,  B65G49/063 ,  H01L21/67706

    摘要： PURPOSE: A roller unit is provided to remove a chemical solution remaining on a substrate. CONSTITUTION: The body of a roller unit has a pad providing part(210) and a connecting part(230). The outer pad part(252) of a pad(250) is formed in the outer surface of the pad providing part. The inner pad part(256) of the pad is formed in the inner surface of the pad providing part. A connection pad part(254) is formed in the hole of the pad providing part. The inner pad part is integrated with the connection pad part. A clamp(290) fixes a rotary shaft(270) inserted into a body.

    摘要翻译： 目的：提供辊单元以去除残留在基板上的化学溶液。 构成：辊单元的主体具有垫供给部（210）和连接部（230）。 垫（250）的外垫部分（252）形成在垫提供部分的外表面中。 衬垫的内垫部分（256）形成在衬垫提供部分的内表面中。 连接焊盘部分（254）形成在焊盘提供部分的孔中。 内垫部分与连接垫部分集成。 夹具（290）固定插入体内的旋转轴（270）。

    기판 반송 장치
    65.
    发明公开
    기판 반송 장치 无效
    基板运输装置

    公开(公告)号：KR1020100026985A

    公开(公告)日：2010-03-10

    申请号：KR1020090072703

    申请日：2009-08-07

    申请人： 도쿄엘렉트론가부시키가이샤

    发明人： 소마야스타카 ,  야히로슌이치

    IPC分类号： H01L21/677 ,  B65G49/06 ,  B65G13/00 ,  G02F1/13

    CPC分类号： H01L21/67706 ,  B65G13/00 ,  B65G39/02 ,  B65G49/061 ,  B65G49/063 ,  G02F1/1303

    摘要： PURPOSE: A device for transferring a substrate is provided to prevent a stain on a process layer from generating by reducing the heat-transfer differences between a transfer roller and the substrate. CONSTITUTION: A transfer roller(50) is supported by a rotary shaft(51) The transfer roller is rotatable to the direction of a substrate transfer. One end(50b) of the transfer roller is connected and fixed to an adjacent roller unit(52). A driving part drives the rotary shaft. The outer surface of the transfer roller is a concavo-convex shape.

    摘要翻译： 目的：提供一种用于转移基板的装置，以通过减少转印辊和基板之间的传热差异来防止工艺层上的污染。 构成：转印辊（50）由旋转轴（51）支撑。转印辊可以旋转到基板转印的方向。 转印辊的一端（50b）连接并固定到相邻的辊单元（52）上。 驱动部件驱动旋转轴。 转印辊的外表面是凹凸形状。

    링 부재 및 이를 갖는 기판 반송 장치
    66.
    发明公开
    링 부재 및 이를 갖는 기판 반송 장치 有权
    用于输送玻璃的环形构件和装置

    公开(公告)号：KR1020100026679A

    公开(公告)日：2010-03-10

    申请号：KR1020080085780

    申请日：2008-09-01

    申请人： 세메스 주식회사

    发明人： 최재영

    IPC分类号： H01L21/683 ,  H01L21/677 ,  H01L21/02

    CPC分类号： H01L21/67706 ,  B65G39/02 ,  B65G49/063 ,  H01L21/67736

    摘要： PURPOSE: A ring unit and an apparatus for conveying a substrate including the same are provided to prevent slip between the substrate and a roller by installing the ring unit on the outer surface of the roller. CONSTITUTION: A friction band(310) generates friction. A first socket(320) is installed on one end of the friction band. An insertion opening(322) is formed in the center of the first socket. A second socket(330) is installed on the other end of the friction band. The second socket includes a protrusion part(332). The first socket and the second socket are combined with the insertion opening and the protrusion part. The first socket includes a hook(323) on the inner side of the insertion opening in order to fix the protrusion part.

    摘要翻译： 目的：提供环形单元和用于输送包括该基板的基板的设备，以通过将环单元安装在辊的外表面上来防止基板和辊之间的滑动。 构成：摩擦带（310）产生摩擦。 第一套筒（320）安装在摩擦带的一端。 在第一插座的中心形成插入口（322）。 第二套筒（330）安装在摩擦带的另一端。 第二插座包括突出部分（332）。 第一插座和第二插座与插入开口和突出部分组合。 第一插座包括在插入开口的内侧上的钩子（323），以便固定突起部分。

    반송 롤러 및 이를 구비하는 기판 이송 장치
    67.
    发明公开
    반송 롤러 및 이를 구비하는 기판 이송 장치 无效
    输送机滚筒及其传送装置

    公开(公告)号：KR1020090125983A

    公开(公告)日：2009-12-08

    申请号：KR1020080052103

    申请日：2008-06-03

    申请人： 세메스 주식회사

    发明人： 이길우

    IPC分类号： H01L21/68 ,  H01L21/677 ,  H01L21/683

    CPC分类号： H01L21/67706 ,  B65G39/02 ,  B65G49/063

    摘要： PURPOSE: A disengagement prevent element is provided to prevent the secession of the rolling member using the disengagement prevent element. CONSTITUTION: The through hole formed in the center of the rolling member(112) is the disc shape and is contacted with substrate. The shaft(104) is inserted into the through hole. The fixing member is combined with the rolling member and fixes the rolling member on shaft. The disengagement prevent element(130) prevents the fixing member from being deviated from the rolling member of shaft. The rolling member is expended according to the inner surface of the through hole as the cylindrical shape. The connecting part in which the screw thread is formed in the outer circumference is included. The fixing member is combined with the connecting part.

    摘要翻译： 目的：提供防脱离元件以防止使用防脱离元件的滚动元件的分离。 构成：形成在滚动部件（112）的中心的通孔是圆盘形状并与基板接触。 轴（104）插入到通孔中。 固定构件与滚动构件组合，并将滚动构件固定在轴上。 脱离防止元件（130）防止固定构件偏离轴的滚动构件。 根据通孔的内表面将滚动部件作为圆筒状而消耗。 包括在外周形成螺纹的连接部。 固定构件与连接部分组合。

    대면적 기판 처리 시스템의 기판 이송 장치
    68.
    发明公开
    대면적 기판 처리 시스템의 기판 이송 장치 失效
    用于在大面积底层处理系统中传送基板的装置

    公开(公告)号：KR1020090114269A

    公开(公告)日：2009-11-03

    申请号：KR1020080040122

    申请日：2008-04-29

    申请人： 주식회사 테라세미콘

    发明人： 강호영

    IPC分类号： H01L21/68 ,  H01L21/677

    CPC分类号： H01L21/67706 ,  B65G39/02 ,  B65G49/063

    摘要： PURPOSE: An apparatus for transferring substrate in large area substrate treating system is provided to move the boat including the glass substrates up and down within the chamber. CONSTITUTION: A plurality of the electromotion part(M) provides the power for the transfer of a substrate. A plurality of the deceleration part(M1) decelerates the speed of rotation of the electromotion part. A plurality of the driving part(2) transfers a substrate while moving up and down by the power delivered through the deceleration part. The driving belt(1) delivers the power happened from the electromotion part to the driving part. The tension control part(100) controls the tension of the driving belt. A plurality of the driving part is simultaneously driven by a plurality of the electromotion part.

    摘要翻译： 目的：提供一种用于在大面积基板处理系统中传送基板的装置，以在室内上下移动包括玻璃基板的船。 构成：多个电动部分（M）提供用于转移衬底的功率。 多个减速部（M1）减速电动部的旋转速度。 多个驱动部（2）通过由减速部输送的动力上下移动基板。 驱动带（1）将从电动部件发生的动力传递到驱动部件。 张力控制部（100）控制驱动带的张力。 多个驱动部由多个电动部同时驱动。

    회전 롤러 및 이를 구비하는 기판 이송장치
    70.
    发明公开
    회전 롤러 및 이를 구비하는 기판 이송장치 无效
    滚筒和传送装置

    公开(公告)号：KR1020090046571A

    公开(公告)日：2009-05-11

    申请号：KR1020070112796

    申请日：2007-11-06

    申请人： 박해신

    发明人： 박해신 ,  김순옥

    IPC分类号： H01L21/677

    CPC分类号： H01L21/67706 ,  B65G39/02 ,  B65G49/063

    摘要： 본 발명은 글래스 등 기판을 수평 이동시키는데 이용되는 회전 롤러 및 이를 구비하는 기판 이송 장치에 관한 것이다. 본 발명에 따른 회전 롤러는 중앙에 관통홀을 가지는 도우넛 형상의 롤러; 상기 관통홀에 삽입되는 봉 형상의 회전축; 상기 관통홀에 나사 결합되는 제1 고정부재; 상기 제1 고정부재와 상기 회전축 사이에 억지끼움 결합되어 상기 롤러를 상기 회전축에 고정하는 제2 고정부재;를 포함한다.
    롤러, 기판, 이송