公开(公告)号：KR1020070097575A

公开(公告)日：2007-10-04

申请号：KR1020077018711

申请日：2006-01-20

申请人： 노반타 코포레이션

发明人： 존슨,쉬파드,디. ,  구,보 ,  콜딩레이,제임스,제이.

IPC分类号： B23K26/40 ,  B23K26/0622

CPC分类号： H01L23/5258 ,  B23K26/04 ,  B23K26/0622 ,  B23K26/08 ,  B23K26/0853 ,  B23K2201/36 ,  H01L2924/0002 ,  H01L2924/00

摘要： A high-speed, precise, laser-based material processing method and system are provided wherein relative movement of target material and a pulsed laser output used to process the material are synchronized. The laser-based system includes a pulsed laser source for generating a set of laser pulses, and a laser output control that controllably selects a subset of pulses from the set of laser pulses at a position beyond the laser source to obtain the pulsed laser output. The laser-based system further includes a mechanism for synchronizing the pulsed laser output with relative movement of the target material. A beam delivery and focusing subsystem delivers at least a portion of the synchronized pulsed laser output to the target material as a laser material processing output to process the target material. A positioning subsystem moves the target material relative to the pulsed laser output.

摘要翻译： 提供了高速，精确的基于激光的材料处理方法和系统，其中用于处理材料的目标材料和脉冲激光输出的相对运动是同步的。 基于激光的系统包括用于产生一组激光脉冲的脉冲激光源和激光输出控制器，该激光器输出控制器可在激光源之外的位置可控地选择来自该组激光脉冲的脉冲子集以获得脉冲激光输出。 基于激光的系统还包括用于使脉冲激光输出与目标材料的相对运动同步的机构。 光束传送和聚焦子系统将同步脉冲激光输出的至少一部分作为激光材料处理输出提供给目标材料，以处理目标材料。 定位子系统相对于脉冲激光输出移动目标材料。

公开(公告)号：KR1020070120489A

公开(公告)日：2007-12-24

申请号：KR1020077016468

申请日：2005-12-28

申请人： 노반타 코포레이션

发明人： 콜딩레이,제임스,제이.

IPC分类号： B23K26/36 ,  B23K26/40

CPC分类号： B23K26/03 ,  B23K26/032 ,  B23K26/034 ,  B23K26/0626

摘要： A laser-based material processing method, system and subsystem for use therein for precision energy control are provided, wherein a bulk attenuator is switched across an RF driver output to greatly lower the overall RF output and resulting laser energy per pulse. The value of the attenuator determines the range of energies achievable, pj or fractions of pj's. More than one attenuator and switch can be used to achieve multiple energy ranges. After the bulk attenuator is switched in, the laser energy is greatly reduced and the RF driver can then be run again near full RF power where the SNR is much better. The input voltage from a DAC is also much higher so it is also not at the low end of its range where it is also noisy due to poor SNR. The method and system provides increased dynamic range, greater extinction (lower possible energies), better accuracy and stability due to higher SNR of the DAC input voltage and higher SNR in the RF driver.

摘要翻译： 提供了一种用于精密能量控制的基于激光的材料处理方法，用于其中的系统和子系统，其中体衰减器跨越RF驱动器输出切换，以大大降低总体RF输出并产生每脉冲的激光能量。 衰减器的值确定可实现的能量范围，pj或pj的分数。 可以使用多个衰减器和开关来实现多个能量范围。 在大容量衰减器被切换之后，激光能量大大降低，然后RF驱动器可以再次运行在完全RF功率附近，其中SNR更好。 来自DAC的输入电压也高得多，所以它也不在其范围的低端，由于差的SNR，它的噪声也很低。 该方法和系统由于DAC输入电压的较高SNR和RF驱动器中的较高SNR而提供增加的动态范围，更大的消光（更低的可能能量），更好的精度和稳定性。