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公开(公告)号:TWI412090B
公开(公告)日:2013-10-11
申请号:TW095130764
申请日:2006-08-22
Applicant: 日立化成杜邦微系統股份有限公司 , HITACHI CHEMICAL DUPONT MICROSYSTEMS LTD.
Inventor: 小島康則 , KOJIMA, YASUNORI , 板橋俊明 , ITABASHI, TOSHIAKI
CPC classification number: H01L23/3171 , H01L21/563 , H01L23/3128 , H01L2224/0554 , H01L2224/05548 , H01L2224/05573 , H01L2224/056 , H01L2224/16225 , H01L2224/32225 , H01L2224/73203 , H01L2224/73204 , H01L2924/00014 , H01L2924/01004 , H01L2924/0102 , H01L2924/01078 , H01L2924/01079 , H01L2924/15311 , H01L2924/00 , H01L2224/05599 , H01L2224/0555 , H01L2224/0556
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公开(公告)号:TWI386121B
公开(公告)日:2013-02-11
申请号:TW095130765
申请日:2006-08-22
Applicant: 日立化成杜邦微系統股份有限公司 , HITACHI CHEMICAL DUPONT MICROSYSTEMS LTD. , 日立化成工業股份有限公司 , HITACHI CHEMICAL COMPANY, LTD.
Inventor: 金谷雄一 , KANEYA, YUUICHI , 田中俊明 , TANAKA, TOSHIAKI , 板橋俊明 , ITABASHI, TOSHIAKI
IPC: H05K13/04
CPC classification number: H05K3/323 , H01L24/29 , H01L24/83 , H01L24/90 , H01L2224/2919 , H01L2224/2929 , H01L2224/293 , H01L2224/29311 , H01L2224/29339 , H01L2224/29344 , H01L2224/29347 , H01L2224/29355 , H01L2224/29357 , H01L2224/29369 , H01L2224/29384 , H01L2224/29387 , H01L2224/29388 , H01L2224/29393 , H01L2224/83101 , H01L2224/83851 , H01L2924/00013 , H01L2924/01004 , H01L2924/01005 , H01L2924/01006 , H01L2924/01015 , H01L2924/01018 , H01L2924/01019 , H01L2924/01023 , H01L2924/01027 , H01L2924/01029 , H01L2924/01033 , H01L2924/01045 , H01L2924/01047 , H01L2924/0105 , H01L2924/01051 , H01L2924/01074 , H01L2924/01078 , H01L2924/01079 , H01L2924/01082 , H01L2924/014 , H01L2924/0665 , H01L2924/07802 , H01L2924/0781 , H01L2924/07811 , H01L2924/09701 , H01L2924/14 , H01L2924/15787 , H01L2924/15788 , H05K3/381 , H05K2203/095 , H01L2924/00 , H01L2924/3512 , H01L2924/00014 , H01L2224/29099 , H01L2224/29199 , H01L2224/29299
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