公开(公告)号：US07549314B2

公开(公告)日：2009-06-23

申请号：US11629018

申请日：2005-06-06

申请人： Helmut Fischer

发明人： Helmut Fischer

IPC分类号： G01B3/30

CPC分类号： G01B7/105

摘要： The invention relates to a calibrating device for adapting a measuring device for measuring the thickness of thin layers on an object to be measured, comprising a calibrating surface (12) having a flat upper side and a flat underside, which are provided at a distance with a predetermined thickness, characterized in that the calibrating surface (12) is arranged separate from at least one edge area (18) and the calibrating surface (12) is connected to the at least one edge area (18) via at least one transition area (14).

摘要翻译： 本发明涉及一种用于调整测量装置的校准装置，用于测量待测物体上的薄层的厚度，包括：具有平坦的上侧和平的下侧的校准表面（12），该校准表面（12）与 其特征在于，所述校准表面（12）与至少一个边缘区域（18）分开布置，并且所述校准表面（12）经由至少一个过渡区域（18）连接到所述至少一个边缘区域 （14）。

公开(公告)号：US07180286B2

公开(公告)日：2007-02-20

申请号：US10705107

申请日：2003-11-10

申请人： Helmut Fischer ,  Bernhard Scherzinger

发明人： Helmut Fischer ,  Bernhard Scherzinger

IPC分类号： G01B7/06

CPC分类号： G01B21/08

摘要： An apparatus for non-destructive measurement of the thickness of thin layers, has a housing and a probe which is connected to an evaluation unit and to which signals are emitted during a measurement for determining the layer thickness, and having a display apparatus which indicates at least the measurement data from the evaluation unit. At least one further display apparatus is positioned on the housing away from the plane of the first display apparatus.

摘要翻译： 用于非破坏性地测量薄层厚度的装置具有壳体和探头，其连接到评估单元并且在用于确定层厚度的测量期间发射信号，并且具有指示在 最少来自评估单元的测量数据。 至少一个另外的显示装置被定位在远离第一显示装置的平面的壳体上。

公开(公告)号：US07076021B2

公开(公告)日：2006-07-11

申请号：US10739673

申请日：2003-12-17

申请人： Helmut Fischer ,  Volker Rössiger

发明人： Helmut Fischer ,  Volker Rössiger

IPC分类号： G01N23/223

CPC分类号： G01B15/02 ,  G01N23/223 ,  G01N2223/076

摘要： An apparatus for measurement of the thickness of thin layers by means of X-rays using an X-ray tube which emits X-rays which are directed at a layer to be measured, has at least one aperture apparatus arranged between the X-ray tube and the layer to be measured. The apparatus includes an area absorbing X-rays and an aperture opening. At least one aperture opening in the aperture apparatus has a geometric shape which, seen in the beam direction, projects an area which at least in places is matched to the geometry of the layer to be measured.

摘要翻译： 一种利用X射线管测量薄层厚度的装置，该X射线管发射指向被测层的X射线，具有至少一个孔径装置，其设置在X射线管 和要测量的层。 该装置包括吸收X射线和孔径开口的区域。 开口装置中的至少一个开口开口具有几何形状，其在波束方向上看到至少在与被测量层的几何形状匹配的区域上突出。

公开(公告)号：US07448250B2

公开(公告)日：2008-11-11

申请号：US11454486

申请日：2006-06-16

申请人： Helmut Fischer

发明人： Helmut Fischer

IPC分类号： G01B21/08 ,  G01B7/06

CPC分类号： G01B7/105

摘要： The invention relates to a calibration standard, especially for the calibration of devices for the non-destructive measurement of the thickness of thin layers, with a carrier layer (12) consisting of a basic material and a standard (17) applied on the carrier layer (12), said standard having the thickness of the layer to be measured at which the device is to be calibrated, with the carrier layer (12) comprising a plane-parallel measuring surface (16) to its bearing surface (14), that the standard (17) comprises a bearing surface (18) plane-parallel with its measuring surface (19) for bearing on the measuring surface (16) of the carrier layer (12), and that the standard (17) is permanently provided on the carrier layer (12) by means of plating by rubbing.

摘要翻译： 本发明涉及一种校准标准，特别是用于校准用于薄层厚度的非破坏性测量的装置，其中载体层（12）由施加在载体层上的基本材料和标准物（17）组成， （12），所述标准具有要被校准的待测量层的厚度，载体层（12）包括与其支承表面（14）的平面平行的测量表面（16），所述载体层 标准（17）包括与其测量表面（19）平行平行的支承表面（18），用于承载在载体层（12）的测量表面（16）上，并且标准件（17）永久地设置在 载体层（12）通过摩擦电镀。

公开(公告)号：US08560269B2

公开(公告)日：2013-10-15

申请号：US11664402

申请日：2005-09-30

申请人： Helmut Fischer

发明人： Helmut Fischer

IPC分类号： G06F17/18 ,  G01N37/00

CPC分类号： G05B23/0267 ,  G01D1/14 ,  G05B2219/32195 ,  Y02P90/22

摘要： Method for emitting measuring values on a display (27) for a display device. According to the method, the measuring values that are recorded by a measuring device (24) on at least one test object (11) are forwarded to a signal processing device; a measuring value is detected at each measuring point (14-21) on the test object (11), or a plurality of measuring values are detected at each measuring point (14-21) on the test object (11); the average value is determined at each measuring point (14-21), from the number of detected measuring values; the average values of the respective measuring points (14-21) on at least one test object (11) are sorted according to the rank thereof in an evaluation device including an electronic calculator; and the average values are represented on the display (27) together with an upper and a lower boundary line.

摘要翻译： 用于在显示装置的显示器（27）上发射测量值的方法。 根据该方法，由测量装置（24）在至少一个测试对象（11）上记录的测量值被转发到信号处理装置; 在测试对象（11）上的每个测量点（14-21）处检测测量值，或者在测试对象（11）上的每个测量点（14-21）处检测到多个测量值; 根据检测到的测量值的数量，在每个测量点（14-21）确定平均值; 在包括电子计算器的评估装置中，根据其等级对至少一个测试对象（11）上的相应测量点（14-21）的平均值进行排序; 并且平均值与上边界线和下边界线一起在显示器（27）上表示。

公开(公告)号：US07690243B2

公开(公告)日：2010-04-06

申请号：US11803703

申请日：2007-05-15

申请人： Helmut Fischer

发明人： Helmut Fischer

IPC分类号： G01B13/08

CPC分类号： G01B7/105

摘要： The invention relates to a method and an apparatus for measurement of the thickness of thin layers by means of a measurement probe (11) which has a housing (14) which holds at least one sensor element (17) whose longitudinal axis lies in particular on a longitudinal axis (16) of the housing (14), in which at least during the measurement process, a gaseous medium is supplied to a supply opening (21) of the measurement probe (11) on a measurement surface (28), and is supplied via at least one connection channel (24), which is connected to the supply opening (21), to one or more outlet openings (26) which are provided on an end face (29), pointing towards the measurement surface (28), of the measurement probe (11), and in which at least one mass flow, which flows out of one or more outlet openings (26), of the gaseous medium is directed at the measurement surface (28), and in which the measurement probe (11) is held in a non-contacting manner with respect to the measurement surface (28) during the measurement process.

摘要翻译： 本发明涉及一种用于通过测量探头（11）测量薄层厚度的方法和装置，所述测量探针具有容纳至少一个传感器元件（17）的壳体，所述传感器元件（17）的纵轴特别位于 至少在测量过程期间，将气体介质供应到测量表面（28）上的测量探针（11）的供应开口（21）的壳体（14）的纵向轴线（16），以及 通过连接到供应开口（21）的至少一个连接通道（24）供应到设置在端面（29）上的一个或多个出口开口（26），所述端面指向测量表面（28） ），并且其中从所述气体介质的一个或多个出口（26）流出的至少一个质量流指向所述测量表面（28），其中所述测量表面 测量探针（11）相对于测量表面（28）以非接触的方式被保持 在测量过程中。

公开(公告)号：US07610690B2

公开(公告)日：2009-11-03

申请号：US11490382

申请日：2006-07-20

申请人： Helmut Fischer

发明人： Helmut Fischer

IPC分类号： G01B5/02

CPC分类号： G01B7/105 ,  G01B5/0004

摘要： A measurement stand for holding a measuring device (26), in particular a measuring arrangement (26) for measuring the thickness of thin layers, said measurement stand comprising a housing (18) in which a cam follower (23) is guided such that it can be moved up and down and the measuring device (26) is arranged at that end of said housing (18) that faces the measuring object (14), wherein a drive unit (29) with an electric drive (28) drives the lifting movement of the cam follower (23), wherein said drive unit (29) initiates in the down movement at least one first movement phase with a rapid motion and at least one further movement phase of the cam follower (23) with a creep motion until the measuring device (26) touches down on the measuring object (14).

摘要翻译： 用于保持测量装置（26）的测量台，特别是用于测量薄层厚度的测量装置（26），所述测量支架包括壳体（18），凸轮从动件（23）被引导到所述壳体 可以上下移动，并且测量装置（26）布置在所述壳体（18）的面向测量对象（14）的端部处，其中具有电驱动器（28）的驱动单元（29）驱动提升 凸轮从动件（23）的运动，其中所述驱动单元（29）以向下运动启动具有快速运动的至少一个第一运动相位和凸轮从动件（23）的至少一个进一步运动相位，其具有蠕变运动，直到 测量装置（26）在测量对象（14）上接触。

公开(公告)号：US07472491B2

公开(公告)日：2009-01-06

申请号：US11599627

申请日：2006-11-14

申请人： Helmut Fischer

发明人： Helmut Fischer

IPC分类号： G01B7/28

CPC分类号： G01B7/105

摘要： The invention relates to a Measuring probe for a device for the measurement of the thickness of thin layers, with a housing (14) comprising at least one sensor element (17), which is accepted along a longitudinal axis (16) of the housing (14) at least slightly movable to the housing (14) and with a contact spherical cap (21) assigned to the at least one sensor element (17) for setting the measuring probe (11) onto a surface of a measuring object, wereby in that the at least one sensor element (17) is accepted by a holding element (18)—along the longitudinal axis (16) of the housing (14)—which is designed spring-loaded resiliently and which is fastened on the housing (14).

摘要翻译： 本发明涉及一种用于测量薄层厚度的装置的测量探针，其中壳体（14）包括至少一个传感器元件（17），沿着壳体的纵向轴线（16）接受 14），至少可移动到壳体（14）并且具有分配给至少一个传感器元件（17）的接触式球形盖（21），用于将测量探针（11）设置在测量对象的表面上， 所述至少一个传感器元件（17）被所述壳体（14）的纵向轴线（16）接受，所述保持元件（18）被弹性地设计为弹簧加载并且被紧固在所述壳体（14）上 ）。