公开(公告)号：US12050188B2

公开(公告)日：2024-07-30

申请号：US17441944

申请日：2020-03-27

Applicant: IHI Corporation

Inventor： Sayo Yamaha ,  Takahiro Fukumaru ,  Yuichi Yamaguchi

IPC: G01N23/046 ,  G01N3/08 ,  B32B5/02 ,  G01B15/02 ,  G01N21/84

CPC classification number: G01N23/046 ,  G01N3/08 ,  B32B5/02 ,  G01B15/02 ,  G01N2021/8444

Abstract: A strength evaluation method is a strength evaluation method for a composite material in which a plurality of fiber layers are laminated and includes a meandering state measuring process of measuring a meandering state of fibers of the plurality of fiber layers in a direction along the fiber layers, a meandering thickness measuring process of measuring a meandering thickness that is a thickness in a lamination direction of a part in which meanderings of fibers of the plurality of fiber layers occur, and a strength evaluation process of evaluating a strength of the composite material based on the meandering state and the meandering thickness.

公开(公告)号：US20240085174A1

公开(公告)日：2024-03-14

申请号：US18453266

申请日：2023-08-21

Applicant: NOVA MEASURING INSTRUMENTS INC.

Inventor： Heath POIS ,  Wei T LEE ,  Lawrence BOT ,  Michael KWAN ,  Mark KLARE ,  Charles LARSON

IPC: G01B15/02 ,  G01N23/223 ,  G01N23/225 ,  G01N23/2251 ,  G01N23/2273

CPC classification number: G01B15/02 ,  G01N23/223 ,  G01N23/225 ,  G01N23/2251 ,  G01N23/2273 ,  G01N23/22

Abstract: Methods and systems for feed-forward of multi-layer and multi-process information using XPS and XRF technologies are disclosed. In an example, a method of thin film characterization includes measuring first XPS and XRF intensity signals for a sample having a first layer above a substrate. The first XPS and XRF intensity signals include information for the first layer and for the substrate. The method also involves determining a thickness of the first layer based on the first XPS and XRF intensity signals. The method also involves combining the information for the first layer and for the substrate to estimate an effective substrate. The method also involves measuring second XPS and XRF intensity signals for a sample having a second layer above the first layer above the substrate. The second XPS and XRF intensity signals include information for the second layer, for the first layer and for the substrate. The method also involves determining a thickness of the second layer based on the second XPS and XRF intensity signals, the thickness accounting for the effective substrate.

公开(公告)号：US20230408430A1

公开(公告)日：2023-12-21

申请号：US18206033

申请日：2023-06-05

Applicant: Nova Measuring Instruments, Inc.

Inventor： Wei Ti Lee ,  Heath Pois ,  Mark Klare ,  Cornel Bozdog

IPC: G01N23/2273 ,  H01L21/66 ,  G01B11/06 ,  G01B15/02 ,  G01N23/2208 ,  G01N23/223

CPC classification number: G01N23/2273 ,  H01L22/12 ,  G01B11/06 ,  G01B15/02 ,  G01N23/2208 ,  G01N23/223 ,  G01N2223/305 ,  G01N2223/633 ,  G01N2223/61

Abstract: Determining a property of a layer of an integrated circuit (IC), the layer being formed over an underlayer, is implemented by performing the steps of: irradiating the IC to thereby eject electrons from the IC; collecting electrons emitted from the IC and determining the kinetic energy of the emitted electrons to thereby calculate emission intensity of electrons emitted from the layer and electrons emitted from the underlayer calculating a ratio of the emission intensity of electrons emitted from the layer and electrons emitted from the underlayer; and using the ratio to determine material composition or thickness of the layer. The steps of irradiating IC and collecting electrons may be performed using x-ray photoelectron spectroscopy (XPS) or x-ray fluorescence spectroscopy (XRF).

公开(公告)号：US11712604B2

公开(公告)日：2023-08-01

申请号：US17734754

申请日：2022-05-02

Applicant: Callaway Golf Company

Inventor： David M. Melanson

IPC: A63B37/06 ,  A63B37/00 ,  G01B15/02 ,  G01B15/04

CPC classification number: A63B37/0051 ,  A63B37/0039 ,  A63B37/0044 ,  A63B37/0045 ,  A63B37/0074 ,  A63B37/0075 ,  A63B37/0076 ,  G01B15/02 ,  G01B15/04 ,  A63B2209/00

Abstract: A golf ball comprising layers that have from 0.05% to 70% by weight of a radio-opaque filler, and wherein the concentration of the radio-opaque filler is measurably different in each layer is disclosed herein. The radio-opaque filler is preferably a compound based on barium, bismuth, tungsten, iodine, or reduced iron.

公开(公告)号：US11644429B2

公开(公告)日：2023-05-09

申请号：US17241536

申请日：2021-04-27

Applicant: TOYOTA JIDOSHA KABUSHIKI KAISHA

Inventor： Takuya Omoto ,  Yuzo Miura ,  Yuichi Nagamatsu

IPC: G01N23/04 ,  G01B15/02

CPC classification number: G01N23/04 ,  G01B15/02

Abstract: A method for calculating a laminate state of a CFRP laminate according to an embodiment includes acquiring a plurality of images of a cross section of the CFRP laminate orthogonal to a lamination direction by imaging the CFRP laminate with X-rays at a plurality of different positions in the lamination direction, the CFRP laminate including first layers including carbon fibers oriented in a first direction orthogonal to the lamination direction and second layers including carbon fibers oriented in a second direction orthogonal to the lamination direction and different from the first direction, and calculating a parameter correlated with a quantity of voids formed in the first layers and the second layers from the plurality of acquired images, and distinguishing between the first layers and the second layers using the calculated parameter.

公开(公告)号：US20190242938A1

公开(公告)日：2019-08-08

申请号：US15887357

申请日：2018-02-02

Applicant: GLOBALFOUNDRIES Inc. ,  KLA-Tencor

Inventor： Min DAI ,  Dominic SCHEPIS ,  Qiang ZHAO ,  Ming DI ,  Dawei HU

IPC: G01R31/265 ,  H01L21/66 ,  H01L21/28 ,  G01R31/02 ,  G01R31/26 ,  G01B15/02 ,  G01N21/21 ,  G01N21/33 ,  G01N33/00

CPC classification number: G01R31/2656 ,  G01B15/02 ,  G01N21/211 ,  G01N21/33 ,  G01N33/00 ,  G01N2021/213 ,  G01N2033/0095 ,  G01R31/025 ,  G01R31/2601 ,  H01L21/28185 ,  H01L21/28202 ,  H01L22/12 ,  H01L29/42364 ,  H01L29/517 ,  H01L29/518

Abstract: Methods of precisely analyzing and modeling band gap energies and electrical properties of a thin film are provided. One method includes: obtaining a substrate and a thin film disposed above the substrate, the thin film including an interfacial layer above the substrate, and a high-k layer above the interfacial layer; determining a thickness of the thin film; analyzing the thin film using deep ultraviolet spectroscopy ellipsometry to determine the photon energy of reflected light; using a model to determine a set of bandgap energies extracted from a set of results of the photon energy of the analyzing step; and determining at least one of: a leakage current from a main bandgap energy, a nitrogen content from a sub bandgap energy, and an equivalent oxide thickness from the nitrogen content and a composition of the interfacial layer.

公开(公告)号：US09885676B2

公开(公告)日：2018-02-06

申请号：US14634979

申请日：2015-03-02

Applicant: Helmut Fischer GmbH Institut fur Elektronik und Messtechnik

Inventor： Volker Roessiger

IPC: G01N23/223 ,  G01B15/02

CPC classification number: G01N23/223 ,  G01B15/02 ,  G01N2223/076 ,  G01N2223/6113 ,  G01N2223/633

Abstract: A method for measurement of the thickness of thin layers or determination of an element concentration of a measurement object. A primary beam is directed from an X-ray radiation source onto the measurement object. A secondary radiation emitted by the measurement object is detected by a detector and is relayed to an evaluation device. The primary beam is moved within a grid surface which is divided into grid partial surfaces as well as subdivided into at least one line and at least one column. For each grid partial surface a primary beam is directed onto the grid surface. A measuring spot of the primary beam fills at least the grid point. A lateral dimension of the measurement surface is detected and compared to the size of the measuring spot of the primary beam appearing on the measurement object, for size determination of the measurement surface of the measurement object.

公开(公告)号：US09880110B2

公开(公告)日：2018-01-30

申请号：US15346161

申请日：2016-11-08

Applicant: PaneraTech, Inc.

Inventor： Alexander C. Ruege ,  Yakup Bayram

IPC: G01N22/02 ,  G01B15/02 ,  F27D21/00 ,  G01N33/38

CPC classification number: G01N22/02 ,  F27D21/0021 ,  G01B15/02 ,  G01N33/386 ,  G01N33/388

Abstract: Disclosed is an improved system and method to evaluate the status of a material. The system and method are operative to identify flaws and measure the erosion profile and thickness of different materials, including refractory materials, using electromagnetic waves. The system is designed to reduce a plurality of reflections, associated with the propagation of electromagnetic waves launched into the material under evaluation, by a sufficient extent so as to enable detection of electromagnetic waves of interest reflected from remote discontinuities of the material. Furthermore, the system and method utilize a configuration and signal processing techniques that reduce clutter and enable the isolation of electromagnetic waves of interest. Moreover, the launcher is impedance matched to the material under evaluation, and the feeding mechanism is designed to mitigate multiple reflection effects to further suppress clutter.

公开(公告)号：US20170343340A1

公开(公告)日：2017-11-30

申请号：US15533489

申请日：2014-12-10

Applicant: Hitachi High-Technologies Corporation

Inventor： Hiroki KAWADA ,  Muneyuki FUKUDA ,  Yoshinori MOMONOI ,  Shou TAKAMI

IPC: G01B15/02 ,  H01J37/317

CPC classification number: G01B15/02 ,  G01B15/00 ,  G01B2210/56 ,  H01J37/28 ,  H01J37/317 ,  H01J2237/2814 ,  H01J2237/31749

Abstract: The objective of the present invention is to provide a height measurement device capable of highly accurate measurement in the depth direction of a structure on a sample. To achieve this objective, proposed are a charged particle beam device and a height measurement device that is provided with a calculation device for determining the size of a structure on a sample on the basis of a detection signal obtained by irradiating the sample with a charged particle beam, wherein the calculation device calculates the distance from a first charged particle beam irradiation mark formed at a first height on the sample and a second charged particle beam irradiation mark formed at a second height on the sample and on the basis of this distance and the charged particle beam irradiation angle when the first charged particle beam irradiation mark and second charged particle beam irradiation mark were formed, calculates the distance between the first height and the second height.

公开(公告)号：US20170212233A1

公开(公告)日：2017-07-27

申请号：US15328444

申请日：2017-01-23

Applicant: Pedram MOUSAVI ,  Adam MAUNDER

Inventor： Pedram MOUSAVI ,  Adam MAUNDER

IPC: G01S13/88 ,  G01F23/284 ,  G01S13/02 ,  G01B15/02

CPC classification number: G01S13/88 ,  G01B15/02 ,  G01F23/284 ,  G01S7/03 ,  G01S13/0209 ,  G01S13/10 ,  H01Q13/02 ,  H01Q13/085 ,  H01Q21/00

Abstract: The sensing system for measuring a parameter of a dielectric substance generally has a tank for containing the dieletric substance; a directional sensor having; an antenna comprising at least one array of at least two antenna elements, the antenna elements being ultra-wide band antenna elements, the antenna being mounted to the tank and adapted to emit a signal comprising radiated electromagnetic energy toward the at least one dielectric substance and along a signal path, the antenna being further adapted to detect a signal after propagation thereof along the signal path; an antenna controller being operatively coupled to the antenna, the antenna controller being adapted to drive the emitted signal based on emission data, adapted to detect the detected signal and to generate detection data indicative of the detected signal; and a computing device operatively coupled to the antenna controller, the computing device being configured to determine the parameter. Methods and apparatus for evaluating properties of layered substances in tanks are disclosed. In particular, such properties can include a layer thickness of a first substance, a layer thickness of a second substance and also one or more dielectric properties of the substances in a multilayer system. The methods and apparatus involve the transmission of radiated electromagnetic energy toward the multilayer system and the detection of radiated electromagnetic energy reflected from the multilayer system to evaluate one or more properties of the layered substances.