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    Approximating cycle times within material flow network
    1.
    发明授权
    Approximating cycle times within material flow network 失效
    材料流网络中的近似周期时间

    公开(公告)号：US08185420B2

    公开(公告)日：2012-05-22

    申请号：US12038134

    申请日：2008-02-27

    申请人： Alfred Degbotse ,  Brian T. Denton ,  Robert J. Milne

    发明人： Alfred Degbotse ,  Brian T. Denton ,  Robert J. Milne

    IPC分类号： G06Q10/00

    CPC分类号： G06Q10/06 ,  G06Q10/06312 ,  G06Q10/0633 ,  G06Q10/0875 ,  G06Q50/06

    摘要： Approximating cycle times within a material flow network is disclosed. One embodiment includes assigning an approximate cycle time for completion of a part number PN within the material flow network by using a model that rounds the approximate cycle time to a nearest aggregate time period and adjusting the assigned approximate cycle time based on a mathematical function representing an aggregate accuracy of an aggregation of cycle times throughout the material flow network.

    摘要翻译： 公开了材料流网络内的近似循环时间。 一个实施例包括通过使用将近似周期时间舍入到最近聚合时间周期的模型来分配在材料流网络内完成零件号PN的近似周期时间，并且基于表示一个数学函数的数学函数来调整所分配的近似周期时间 整个材料流网络周期时间聚合的聚合精度。

    APPROXIMATING CYCLE TIMES WITHIN MATERIAL FLOW NETWORK
    2.
    发明申请
    APPROXIMATING CYCLE TIMES WITHIN MATERIAL FLOW NETWORK 失效
    在材料流网络中大大缩短周期时间

    公开(公告)号：US20090216583A1

    公开(公告)日：2009-08-27

    申请号：US12038134

    申请日：2008-02-27

    申请人： Alfred Degbotse ,  Brian T. Denton ,  Robert J. Milne

    发明人： Alfred Degbotse ,  Brian T. Denton ,  Robert J. Milne

    IPC分类号： G06Q10/00

    CPC分类号： G06Q10/06 ,  G06Q10/06312 ,  G06Q10/0633 ,  G06Q10/0875 ,  G06Q50/06

    摘要： Approximating cycle times within a material flow network is disclosed. One embodiment includes assigning an approximate cycle time for completion of a part number PN within the material flow network by using a model that rounds the approximate cycle time to a nearest aggregate time period and adjusting the assigned approximate cycle time based on a mathematical function representing an aggregate accuracy of an aggregation of cycle times throughout the material flow network.

    摘要翻译： 公开了材料流网络内的近似循环时间。 一个实施例包括通过使用将近似周期时间舍入到最近聚合时间周期的模型来分配在材料流网络内完成零件号PN的近似周期时间，并且基于表示 整个材料流网络周期时间聚合的聚合精度。

    METHOD AND SYSTEM FOR INTELLIGENT AUTOMATED RETICLE MANAGMENT
    5.
    发明申请
    METHOD AND SYSTEM FOR INTELLIGENT AUTOMATED RETICLE MANAGMENT 有权
    智能自动化管理的方法与系统

    公开(公告)号：US20070168318A1

    公开(公告)日：2007-07-19

    申请号：US11669179

    申请日：2007-01-31

    申请人： Richard Burda ,  Alfred Degbotse ,  Brian Denton ,  Kenneth Fordyce ,  Sanjay Hegde ,  Robert Milne ,  Sameer Shikalgar ,  Guogang Zuo

    发明人： Richard Burda ,  Alfred Degbotse ,  Brian Denton ,  Kenneth Fordyce ,  Sanjay Hegde ,  Robert Milne ,  Sameer Shikalgar ,  Guogang Zuo

    IPC分类号： G06F17/30

    CPC分类号： G03F7/70741

    摘要： A method, system, and program storage device for implementing the method of controlling a manufacturing system, wherein the method comprises providing a plurality of workpieces to be processed on a processing tool, the plurality of workpieces located at processing stations prior to the processing tool, determining auxiliary equipment allocation needs for the processing tool based on characteristics associated with the plurality of workpieces prior to the workpieces arriving at the processing tool, and sending auxiliary equipment to the processing tool based on the allocation needs prior to the workpieces arriving at the processing tool. According to an embodiment of the invention, the processing tool comprises a photolithographic system, the auxiliary equipment comprises a reticle, and the plurality of workpieces comprise semiconductor substrates.

    摘要翻译： 一种用于实现控制制造系统的方法的方法，系统和程序存储装置，其中所述方法包括在处理工具上提供待加工的多个工件，所述多个工件位于处理工具之前的处理站， 在工件到达处理工具之前，基于与多个工件相关联的特性来确定处理工具的辅助设备分配需求，以及基于在工件到达处理工具之前的分配需求将辅助设备发送到处理工具 。 根据本发明的实施例，处理工具包括光刻系统，辅助设备包括掩模版，并且多个工件包括半导体衬底。

    METHOD, SYSTEM, AND COMPUTER PROGRAM PRODUCT FOR CONTROLLING THE FLOW OF MATERIAL IN A MANUFACTURING FACILITY USING AN EXTENDED ZONE OF CONTROL
    6.
    发明申请
    METHOD, SYSTEM, AND COMPUTER PROGRAM PRODUCT FOR CONTROLLING THE FLOW OF MATERIAL IN A MANUFACTURING FACILITY USING AN EXTENDED ZONE OF CONTROL 失效
    方法，系统和计算机程序产品，用于使用扩展的控制区控制制造设备中材料的流动

    公开(公告)号：US20070100486A1

    公开(公告)日：2007-05-03

    申请号：US11163793

    申请日：2005-10-31

    申请人： Richard Burda ,  Alfred Degbotse ,  Brian Denton ,  Kenneth Fordyce ,  Robert Milne

    发明人： Richard Burda ,  Alfred Degbotse ,  Brian Denton ,  Kenneth Fordyce ,  Robert Milne

    IPC分类号： G06F19/00

    CPC分类号： G06Q10/06

    摘要： The present invention provides a method, system, and computer program product for controlling the flow of material in a manufacturing facility using an extended zone of control. A method in accordance to an embodiment of the present invention comprises establishing an extended zone of control including a high impact tool set and at least one other tool set, analyzing projected job arrivals at the high impact tool set, and adjusting a flow of material between the high impact tool set and the at least one other tool set based on the analysis of projected job arrivals at the high impact tool set.

    摘要翻译： 本发明提供一种方法，系统和计算机程序产品，用于使用扩展控制区域来控制制造设备中的材料的流动。 根据本发明的实施例的方法包括建立包括高冲击工具组和至少一个其他工具组的扩展控制区域，分析在高冲击工具组上的投影作业到达，以及调整在高冲击工具组之间的材料流动 高冲击工具组和至少一个其他工具组，其基于对高冲击工具组的预期工作到达的分析。

    METHOD OF RELEASE AND PRODUCT FLOW MANAGEMENT FOR A MANUFACTURING FACILITY
    7.
    发明申请
    METHOD OF RELEASE AND PRODUCT FLOW MANAGEMENT FOR A MANUFACTURING FACILITY 失效
    制造设备的泄漏和产品流程管理方法

    公开(公告)号：US20060259175A1

    公开(公告)日：2006-11-16

    申请号：US10908420

    申请日：2005-05-11

    申请人： Richard Burda ,  Alfred Degbotse ,  Brian Denton ,  Kenneth Fordyce ,  Robert Milne

    发明人： Richard Burda ,  Alfred Degbotse ,  Brian Denton ,  Kenneth Fordyce ,  Robert Milne

    IPC分类号： G06F19/00

    CPC分类号： G05B19/41865 ,  G05B2219/32263 ,  G05B2219/32304 ,  G06Q10/0631 ,  Y02P90/20 ,  Y02P90/265

    摘要： A method and computer program product for scheduling product lots through operations of a manufacturing line. The method including: selecting a sequential subset of a set of sequential operations required to manufacture the lots; partitioning the product lots into designated lots and non-designated lots; and generating a release schedule for each of the non-designated lots into one or more operations of the sequential subset of the set of sequential operations; generating a release schedule for each of the designated lots into each operation of the sequential subset of the set of sequential operations such that for each designated lot a total amount of time measured from completion of a first operation of the sequential subset of the set of sequential operations through start of a last operation of the sequential subset of the set of sequential operations does not exceed a target amount of time for the designated lots.

    摘要翻译： 一种用于通过生产线的操作调度产品批次的方法和计算机程序产品。 该方法包括：选择制造批次所需的一组顺序操作的顺序子集; 将产品划分为指定地段和非指定地段; 以及将所述非指定批次中的每一个生成到所述一组顺序操作的顺序子集的一个或多个操作中的释放时间表; 为每个指定批次的每个操作生成顺序操作的顺序子集的每个操作的发布时间表，使得对于每个指定批次，从完成该顺序集合的顺序子集的第一操作所测量的总时间量 通过开始该顺序操作的顺序子集的最后操作的操作不超过指定批次的目标时间量。

    Method, system, and computer program product for improved flow of development lots in a manufacturing facility
    8.
    发明授权
    Method, system, and computer program product for improved flow of development lots in a manufacturing facility 失效
    方法，系统和计算机程序产品，用于改进制造设施中开发批次的流动

    公开(公告)号：US07239930B2

    公开(公告)日：2007-07-03

    申请号：US10908714

    申请日：2005-05-24

    申请人： Richard G. Burda ,  Alfred Degbotse ,  Brian T. Denton ,  Kenneth J. Fordyce ,  Robert J. Milne ,  Elizabeth L. Williamson

    发明人： Richard G. Burda ,  Alfred Degbotse ,  Brian T. Denton ,  Kenneth J. Fordyce ,  Robert J. Milne ,  Elizabeth L. Williamson

    IPC分类号： G06F19/00

    CPC分类号： G06Q10/06 ,  Y02P90/86

    摘要： The present invention provides a method, system, and computer program product for improved flow of development lots in a manufacturing facility. A method in accordance to one embodiment of the present invention comprises: establishing at least one target for processing of a set of development lots in the manufacturing facility; monitoring a progress of the set of development lots in the manufacturing facility; comparing the progress of the set of development lots against the at least one target; establishing at least one suggested action for the set of development lots if the progress of the set of development lots deviates from the at least one target; and deciding which development lots in the set of development lots to assign to at least one tool in the manufacturing facility, wherein the at least one suggested action is incorporated into the assignment decision.

    摘要翻译： 本发明提供了一种用于改进制造设备中的开发批次的流程的方法，系统和计算机程序产品。 根据本发明的一个实施例的方法包括：建立至少一个目标，用于处理制造设施中的一组开发批次; 监测制造设施中的一批开发项目的进度; 将发展项目集合的进度与至少一个目标进行比较; 如果一组开发项目的进度偏离至少一个目标，则为该组开发项目建立至少一个建议行动; 以及将所述开发批次中的哪些开发批次分配给所述制造设施中的至少一个工具，其中所述至少一个建议的动作被并入到所述分配决定中。

    Method and system for intelligent automated reticle management
    9.
    发明授权
    Method and system for intelligent automated reticle management 有权
    智能自动标线管理方法与系统

    公开(公告)号：US07206652B2

    公开(公告)日：2007-04-17

    申请号：US10711079

    申请日：2004-08-20

    申请人： Richard G. Burda ,  Alfred Degbotse ,  Brian T Denton ,  Kenneth J. Fordyce ,  Robert J. Milne ,  Sameer T. Shikalgar ,  Guogang Zuo

    发明人： Richard G. Burda ,  Alfred Degbotse ,  Brian T Denton ,  Kenneth J. Fordyce ,  Robert J. Milne ,  Sameer T. Shikalgar ,  Guogang Zuo

    IPC分类号： G06F19/00

    CPC分类号： G03F7/70741

    摘要： A method, system, and program storage device for implementing the method of controlling a manufacturing system, wherein the method comprises providing a plurality of workpieces to be processed on a processing tool, the plurality of workpieces located at processing stations prior to the processing tool, determining auxiliary equipment allocation needs for the processing tool based on characteristics associated with the plurality of workpieces prior to the workpieces arriving at the processing tool, and sending auxiliary equipment to the processing tool based on the allocation needs prior to the workpieces arriving at the processing tool. According to an embodiment of the invention, the processing tool comprises a photolithographic system, the auxiliary equipment comprises a reticle, and the plurality of workpieces comprise semiconductor substrates.

    摘要翻译： 一种用于实现控制制造系统的方法的方法，系统和程序存储装置，其中所述方法包括在处理工具上提供待加工的多个工件，所述多个工件位于处理工具之前的处理站， 在工件到达处理工具之前，基于与多个工件相关联的特性来确定处理工具的辅助设备分配需求，以及基于在工件到达处理工具之前的分配需求将辅助设备发送到处理工具 。 根据本发明的实施例，处理工具包括光刻系统，辅助设备包括掩模版，并且多个工件包括半导体衬底。