公开(公告)号：US08425172B2

公开(公告)日：2013-04-23

申请号：US12761499

申请日：2010-04-16

申请人： Jakob Blattner ,  Rudy Federici ,  William Fosnight ,  Clint Harris

发明人： Jakob Blattner ,  Rudy Federici ,  William Fosnight ,  Clint Harris

IPC分类号： H01L21/677

CPC分类号： G03F7/70925 ,  G03F7/70741 ,  H01L21/67359 ,  H01L21/67742 ,  H01L21/67769 ,  H01L21/68707 ,  Y10S414/139

摘要： A reticle manipulating device comprising a housing capable of having a controlled environment wherein at least one processing module is connected to the housing and capable of processing a reticle. A transport apparatus is connected to the housing for transporting the reticle between the at least one module to another portion of the housing. At least one module is removably connectable to the housing and at least one module has an interface adapted for removably coupling the module to the housing. One module being selectable for connection to the housing from a number of different interchangeable module each having a different predetermined characteristic and being capable of connection to the housing.

摘要翻译： 一种掩模版操纵装置，其包括能够具有受控环境的壳体，其中至少一个处理模块连接到所述壳体并且能够加工掩模版。 传送装置连接到壳体，用于将光罩在至少一个模块之间传送到壳体的另一部分。 至少一个模块可拆卸地连接到壳体，并且至少一个模块具有适于将模块可移除地耦合到壳体的接口。 一个模块可选择用于从多个不同的可互换模块连接到壳体，每个模块具有不同的预定特性并且能够连接到壳体。