公开(公告)号：US08425172B2

公开(公告)日：2013-04-23

申请号：US12761499

申请日：2010-04-16

申请人： Jakob Blattner ,  Rudy Federici ,  William Fosnight ,  Clint Harris

发明人： Jakob Blattner ,  Rudy Federici ,  William Fosnight ,  Clint Harris

IPC分类号： H01L21/677

CPC分类号： G03F7/70925 ,  G03F7/70741 ,  H01L21/67359 ,  H01L21/67742 ,  H01L21/67769 ,  H01L21/68707 ,  Y10S414/139

摘要： A reticle manipulating device comprising a housing capable of having a controlled environment wherein at least one processing module is connected to the housing and capable of processing a reticle. A transport apparatus is connected to the housing for transporting the reticle between the at least one module to another portion of the housing. At least one module is removably connectable to the housing and at least one module has an interface adapted for removably coupling the module to the housing. One module being selectable for connection to the housing from a number of different interchangeable module each having a different predetermined characteristic and being capable of connection to the housing.

摘要翻译： 一种掩模版操纵装置，其包括能够具有受控环境的壳体，其中至少一个处理模块连接到所述壳体并且能够加工掩模版。 传送装置连接到壳体，用于将光罩在至少一个模块之间传送到壳体的另一部分。 至少一个模块可拆卸地连接到壳体，并且至少一个模块具有适于将模块可移除地耦合到壳体的接口。 一个模块可选择用于从多个不同的可互换模块连接到壳体，每个模块具有不同的预定特性并且能够连接到壳体。

公开(公告)号：US07699573B2

公开(公告)日：2010-04-20

申请号：US10628980

申请日：2003-07-29

申请人： Jakob Blattner ,  Rudy Federici ,  William Fosnight ,  Clint Haris

发明人： Jakob Blattner ,  Rudy Federici ,  William Fosnight ,  Clint Haris

IPC分类号： H01L21/677

CPC分类号： G03F7/70925 ,  G03F7/70741 ,  H01L21/67359 ,  H01L21/67742 ,  H01L21/67769 ,  H01L21/68707 ,  Y10S414/139

摘要： A reticle manipulating device with an at least substantially closed housing for maintaining clean-room conditions inside the housing, an input/output station for introducing and discharging reticles in and out of the housing, and at least one functional unit arranged in the housing for impressing a predetermined function on the reticles. The device has a manipulating device also arranged inside the housing, for manipulating the reticles in the housing.

摘要翻译： 一种掩模版操纵装置，具有至少基本上封闭的壳体，用于在壳体内保持清洁室条件;输入/输出站，用于将掩模版引入和放出壳体;以及布置在壳体中的至少一个功能单元，用于压印 在掩模版上具有预定的功能。 该装置具有也布置在壳体内部的操纵装置，用于操纵壳体中的光罩。

公开(公告)号：US20100292826A1

公开(公告)日：2010-11-18

申请号：US12761499

申请日：2010-04-16

申请人： Jakob Blattner ,  Rudy Federici ,  William Fosnight ,  Clint Haris

发明人： Jakob Blattner ,  Rudy Federici ,  William Fosnight ,  Clint Haris

IPC分类号： G06F19/00

CPC分类号： G03F7/70925 ,  G03F7/70741 ,  H01L21/67359 ,  H01L21/67742 ,  H01L21/67769 ,  H01L21/68707 ,  Y10S414/139

摘要： A reticle manipulating device comprising a housing capable of having a controlled environment wherein at least one processing module is connected to the housing and capable of processing a reticle. A transport apparatus is, connected to the housing for transporting the reticle between the at least one module to another portion of the housing. At least one module is removably connectable to the housing and at least one module has an interface adapted for removably coupling the module to the housing. One module being selectable for connection to the housing from a number of different interchangeable module each having a different predetermined characteristic and being capable of connection to the housing.

摘要翻译： 一种掩模版操纵装置，其包括能够具有受控环境的壳体，其中至少一个处理模块连接到所述壳体并且能够加工掩模版。 传送装置连接到壳体，用于将至少一个模块之间的光罩传送到壳体的另一部分。 至少一个模块可拆卸地连接到壳体，并且至少一个模块具有适于将模块可移除地耦合到壳体的接口。 一个模块可选择用于从多个不同的可互换模块连接到壳体，每个模块具有不同的预定特性并且能够连接到壳体。

公开(公告)号：US07682455B2

公开(公告)日：2010-03-23

申请号：US10564066

申请日：2004-07-08

申请人： Jakob Blattner ,  Rudy Federici

发明人： Jakob Blattner ,  Rudy Federici

IPC分类号： C23C16/00 ,  C23F1/00 ,  H01L21/306 ,  B65G57/00 ,  B65H29/00 ,  B65H31/00 ,  B65H3/00 ,  B65G59/02 ,  B65G59/00

CPC分类号： H01L21/67778 ,  H01L21/67769 ,  H01L21/68714

摘要： To make possible a tightly packed, essentially horizontal storage of wafers (40), in which a simplified access to each of these wafers (40) is possible, a device is provided having a plurality of superimposed storage elements (10). The storage elements (10) have device features (16) for depositing the wafers (40). The storage elements (10) have projections (14) for lifting, whereby a specific storage element (10a) as well as all storage elements (10) arranged above this specific storage element (10a) can be lifted by a predetermined first height for producing a contact gap. The projections (14) can also be used to lift the storage element (10b) arranged below the said storage element (10a) by a predetermined second height for producing a freedom of access.

摘要翻译： 为了使得可以紧密地包装，基本上水平地存储晶片（40），其中可以简化对这些晶片（40）的访问，具有多个叠加的存储元件（10）的装置。 存储元件（10）具有用于沉积晶片（40）的器件特征（16）。 存储元件（10）具有用于提升的突起（14），由此可以将特定存储元件（10a）以及布置在该特定存储元件（10a）上方的所有存储元件（10）提升预定的第一高度以产生 接触间隙。 突起（14）也可用于将布置在所述存储元件（10a）下方的存储元件（10b）提升预定的第二高度以产生进入自由度。

公开(公告)号：US20060151404A1

公开(公告)日：2006-07-13

申请号：US10564066

申请日：2004-07-08

申请人： Jakob Blattner ,  Rudy Federici

发明人： Jakob Blattner ,  Rudy Federici

IPC分类号： A47G19/08 ,  B65D85/30

CPC分类号： H01L21/67778 ,  H01L21/67769 ,  H01L21/68714

摘要： To make possible a tightly packed, essentially horizontal storage of wafers (40), in which a simplified access to each of these wafers (40) is possible, a device is provided having a plurality of superimposed storage elements (10). The storage elements (10) have device features (16) for depositing the wafers (40). The storage elements (10) have projections (14) for lifting, whereby a specific storage element (10a) as well as all storage elements (10) arranged above this specific storage element (10a) can be lifted by a predetermined first height for producing a contact gap. The projections (14) can also be used to lift the storage element (10b) arranged below the said storage element (10a) by a predetermined second height for producing a freedom of access.

摘要翻译： 为了使得可以紧密地包装，基本上水平地存储晶片（40），其中可以简化对这些晶片（40）的访问，具有多个叠加的存储元件（10）的装置。 存储元件（10）具有用于沉积晶片（40）的器件特征（16）。 存储元件（10）具有用于提升的突起（14），由此可以将布置在该特定存储元件（10a）上方的特定存储元件（10a）以及所有存储元件（10）提升预定的第一高度 用于产生接触间隙。 突起（14）也可用于将布置在所述存储元件（10a）下方的存储元件（10b）提升预定的第二高度以产生进入自由度。

公开(公告)号：US07047984B2

公开(公告)日：2006-05-23

申请号：US10312396

申请日：2001-06-26

申请人： Jakob Blattner ,  Rudy Federici

发明人： Jakob Blattner ,  Rudy Federici

IPC分类号： B08B6/00

CPC分类号： H01L21/67028 ,  G03F1/82 ,  G03F7/70741

摘要： A cleaning device for use in the production of semiconductor components comprises two feed devices with which a fluid medium is guided across a respective surface of an object to be cleaned so that different faces of the object are simultaneously cleaned. At least two gas feeding devices, having one means each for directing a gas flow onto the surface of the object to be cleaned, open into a cleaning chamber supplying a pressurized cleaning gas. At least two extraction means are connected to the outside of the cleaning chamber for discharging the gas fed to the cleaning chamber. The object can be introduced into the cleaning chamber through at least one gap. At least two ionization means are used to ionize the gas and the particles that are present in the cleaning chamber. One ionization means each is mounted between a direction means and an extraction means.

摘要翻译： 用于生产半导体部件的清洁装置包括两个进料装置，流体介质通过该进料装置被引导穿过待清洁物体的相应表面，从而同时清洁物体的不同面。 至少两个气体供给装置，具有一个用于将气流引导到待清洁物体的表面上的装置，进入提供加压清洁气体的清洁室。 至少两个提取装置连接到清洁室的外部，用于排出供给到清洁室的气体。 可以通过至少一个间隙将物体引入清洁室。 使用至少两个电离装置来电离存在于清洁室中的气体和颗粒。 一个电离装置各自安装在方向装置和提取装置之间。

公开(公告)号：US07478454B2

公开(公告)日：2009-01-20

申请号：US10628294

申请日：2003-07-28

申请人： Jakob Blattner ,  Rudy Federici

发明人： Jakob Blattner ,  Rudy Federici

IPC分类号： B08B6/00

CPC分类号： G03F1/82 ,  B08B5/00 ,  G03F7/70691

摘要： A detection/cleaning device for reticles employed in the production of electronic components, wherein the detection/cleaning device has a cleaning unit, in which a cleaning chamber is constructed. At least one gas feed for introducing a pressurized fluid cleaning medium opens into the cleaning chamber, and at least one suction means, by means of which the gas can be discharged from the cleaning chamber, leads from the cleaning chamber. The cleaning chamber has at least one first opening for introducing and removing a reticle. A detection unit for detecting contaminants on articles used in semiconductor production is provided. The detection unit has a detection means, into which a reticle can be introduced from one feed side of the detection unit. The first opening of the cleaning chamber and the feed side lie opposite each other. A feeding device is provided for exchanging a reticle between the cleaning unit and the detection unit.

摘要翻译： 一种用于生产电子部件的标线用检测/清洁装置，其中检测/清洁装置具有清洁单元，其中构成清洁室。 用于引入加压流体清洁介质的至少一个气体进料通向清洁室，并且至少一个抽吸装置（借助于该气体可以从清洗室排出气体）从清洁室引出。 清洁室具有用于引入和去除掩模版的至少一个第一开口。 提供了用于检测半导体生产中使用的物品上的污染物的检测单元。 检测单元具有检测装置，其中可从检测单元的一个进料侧引入掩模版。 清洁室和进料侧的第一开口彼此相对。 提供了一种用于在清洁单元和检测单元之间更换掩模版的馈送装置。

公开(公告)号：US07287951B2

公开(公告)日：2007-10-30

申请号：US10483548

申请日：2002-07-09

申请人： Jakob Blattner

发明人： Jakob Blattner

IPC分类号： H01L21/673

CPC分类号： H01L21/681 ,  H01L21/68 ,  Y10S414/136

摘要： A device for aligning a plurality of vertically arranged (upright) disks (20), especially wafer disks during the fabrication of semiconductor chips. Two mounting or bearing elements (30, 32) respectively have individually mounted guide rollers (34) positioned next to each other for each disk position. A drive device (40, 42; 50, 60; 240, 242) is for rotating the disks in relation to their azimuthal positions. A device (80) is provided for detecting the azimuthal positions of notches or indentations (22) arranged in the outer circumference in the disks (20). A device is provided for controlling the drive with the signals of the detection device (80) for detecting the azimuthal positions of the notches (22). The drive for rotating the disks in relation to their azimuthal positions has an individually driven drive roller element (42) for each disk (20) mounted on the stationary axis. In one embodiment, the drive roller elements, via a plurality of transmission rollers, can be selectively coupled to a driven roller (60) with the aid of the actuator elements. In a second embodiment, the first drive roller is individually driven by a plurality of individually controlled drive elements (240).

摘要翻译： 一种用于在制造半导体芯片期间对准多个垂直布置（直立）盘（20），特别是晶片盘的装置。 对于每个盘位置，两个安装或轴承元件（30,32）分别具有彼此相邻定位的单独安装的导辊（34）。 驱动装置（40,42; 50,60; 240,242）用于相对于它们的方位位置旋转盘。 提供了一种用于检测设置在盘（20）的外圆周上的凹口或凹口（22）的方位位置的装置（80）。 提供了一种用于利用检测装置（80）的信号来控制驱动器的装置，用于检测凹口（22）的方位位置。 用于相对于其方位位置旋转盘的驱动器具有用于安装在固定轴上的每个盘（20）的单独驱动的驱动辊元件（42）。 在一个实施例中，经由多个传动辊的驱动辊元件可借助于致动器元件选择性地联接到从动辊（60）。 在第二实施例中，第一驱动辊由多个独立控制的驱动元件（240）分别驱动。

公开(公告)号：US06880757B2

公开(公告)日：2005-04-19

申请号：US10654107

申请日：2003-09-03

申请人： Jakob Blattner ,  Rodolfo Federici ,  Harald Richter

发明人： Jakob Blattner ,  Rodolfo Federici ,  Harald Richter

IPC分类号： G01N21/88 ,  G03B27/42 ,  G03B27/58 ,  G03B27/62 ,  G06K7/10 ,  G06K7/14 ,  G06K9/00 ,  G06T7/00

CPC分类号： G06K7/14 ,  G06K7/1473 ,  G06T2207/30148

摘要： A device for reading and identifying a plate, with a camera means (100) with an optical device (110; 112, 114)) for digital image recording and an image processing device for the analysis of the image recorded by the camera means (100). In one embodiment, identification codes can be imaged from both sides of the plate (20)* by a mirror means (120; 122, 124, 126) onto the optical device (110; 112, 114) of the camera. The device is designed in such a way that each plate (40) can be recorded with two camera images, wherein a camera image is produced through the arrangement of several mirrors (122, 124, 126) of the mirror means (120) in such a way that one image half represents the right edge and the other image half represents the left edge of the plate (40) over a predetermined length.

摘要翻译： 一种用于读取和识别印版的装置，具有用于数字图像记录的具有光学装置（110; 112,114）的相机装置（100））和用于分析由相机装置（100）记录的图像的图像处理装置 ）。 在一个实施例中，识别码可以通过镜装置（120; 122,124,126）从所述印版（20）*的两侧成像到相机的光学装置（110; 112,114）上。 设备被设计成使得每个板（40）可以被记录有两个摄像机图像，其中通过这样的反射镜装置（120）的几个反射镜（122,124,126）的布置来产生照相机图像 一个图像一半表示右边缘的方式，而另一个图像一半表示板（40）在预定长度上的左边缘。

公开(公告)号：US06540468B1

公开(公告)日：2003-04-01

申请号：US09786315

申请日：2001-04-17

申请人： Jakob Blattner ,  Reto Stibi

发明人： Jakob Blattner ,  Reto Stibi

IPC分类号： H01L2100

CPC分类号： H01L21/67763 ,  H01L21/68707 ,  Y10S414/141

摘要： An apparatus and a method for handling individual wafers (2) that are temporarily in an essentially horizontal position. The apparatus (1) comprises at least one supporting part (5) with supporting areas (6), comprising at least three supporting points (9), for supporting an edge region of the wafer, and at least one holding part (7) with holding areas (8), comprising at least two holding points (10), for gripping the edge (4) of this wafer (2), with the holding points (10) being moveable relative to the supporting points (9) and, to grasp the wafer (2), relative to one another. Moreover, at least one of these holding points (10) is arranged on a rotatable rod (12) designed, for reliable holding of the wafer, as a holding part (7), with rod (12) extending coaxially with an axis (11) running through the wafer center (3) and essentially parallel to the surface of the wafer (2).

摘要翻译： 一种用于处理临时处于基本水平位置的各个晶片（2）的装置和方法。 所述装置（1）包括至少一个具有支撑区域（6）的支撑部分（5），所述支撑部分（6）包括至少三个支撑点（9），用于支撑所述晶片的边缘区域，以及至少一个保持部分（7） 保持区域（8），其包括用于夹持该晶片（2）的边缘（4）的至少两个保持点（10），保持点（10）可相对于支撑点（9）移动，并且 相对于彼此抓住晶片（2）。 此外，这些保持点（10）中的至少一个布置在可旋转的杆（12）上，用于可靠地保持晶片作为保持部分（7），杆（12）与轴线（11）同轴延伸 ）穿过晶片中心（3）并且基本上平行于晶片（2）的表面。