公开(公告)号：US08425172B2

公开(公告)日：2013-04-23

申请号：US12761499

申请日：2010-04-16

申请人： Jakob Blattner ,  Rudy Federici ,  William Fosnight ,  Clint Harris

发明人： Jakob Blattner ,  Rudy Federici ,  William Fosnight ,  Clint Harris

IPC分类号： H01L21/677

CPC分类号： G03F7/70925 ,  G03F7/70741 ,  H01L21/67359 ,  H01L21/67742 ,  H01L21/67769 ,  H01L21/68707 ,  Y10S414/139

摘要： A reticle manipulating device comprising a housing capable of having a controlled environment wherein at least one processing module is connected to the housing and capable of processing a reticle. A transport apparatus is connected to the housing for transporting the reticle between the at least one module to another portion of the housing. At least one module is removably connectable to the housing and at least one module has an interface adapted for removably coupling the module to the housing. One module being selectable for connection to the housing from a number of different interchangeable module each having a different predetermined characteristic and being capable of connection to the housing.

摘要翻译： 一种掩模版操纵装置，其包括能够具有受控环境的壳体，其中至少一个处理模块连接到所述壳体并且能够加工掩模版。 传送装置连接到壳体，用于将光罩在至少一个模块之间传送到壳体的另一部分。 至少一个模块可拆卸地连接到壳体，并且至少一个模块具有适于将模块可移除地耦合到壳体的接口。 一个模块可选择用于从多个不同的可互换模块连接到壳体，每个模块具有不同的预定特性并且能够连接到壳体。

公开(公告)号：US07699573B2

公开(公告)日：2010-04-20

申请号：US10628980

申请日：2003-07-29

申请人： Jakob Blattner ,  Rudy Federici ,  William Fosnight ,  Clint Haris

发明人： Jakob Blattner ,  Rudy Federici ,  William Fosnight ,  Clint Haris

IPC分类号： H01L21/677

CPC分类号： G03F7/70925 ,  G03F7/70741 ,  H01L21/67359 ,  H01L21/67742 ,  H01L21/67769 ,  H01L21/68707 ,  Y10S414/139

摘要： A reticle manipulating device with an at least substantially closed housing for maintaining clean-room conditions inside the housing, an input/output station for introducing and discharging reticles in and out of the housing, and at least one functional unit arranged in the housing for impressing a predetermined function on the reticles. The device has a manipulating device also arranged inside the housing, for manipulating the reticles in the housing.

摘要翻译： 一种掩模版操纵装置，具有至少基本上封闭的壳体，用于在壳体内保持清洁室条件;输入/输出站，用于将掩模版引入和放出壳体;以及布置在壳体中的至少一个功能单元，用于压印 在掩模版上具有预定的功能。 该装置具有也布置在壳体内部的操纵装置，用于操纵壳体中的光罩。

公开(公告)号：US20100292826A1

公开(公告)日：2010-11-18

申请号：US12761499

申请日：2010-04-16

申请人： Jakob Blattner ,  Rudy Federici ,  William Fosnight ,  Clint Haris

发明人： Jakob Blattner ,  Rudy Federici ,  William Fosnight ,  Clint Haris

IPC分类号： G06F19/00

CPC分类号： G03F7/70925 ,  G03F7/70741 ,  H01L21/67359 ,  H01L21/67742 ,  H01L21/67769 ,  H01L21/68707 ,  Y10S414/139

摘要： A reticle manipulating device comprising a housing capable of having a controlled environment wherein at least one processing module is connected to the housing and capable of processing a reticle. A transport apparatus is, connected to the housing for transporting the reticle between the at least one module to another portion of the housing. At least one module is removably connectable to the housing and at least one module has an interface adapted for removably coupling the module to the housing. One module being selectable for connection to the housing from a number of different interchangeable module each having a different predetermined characteristic and being capable of connection to the housing.

摘要翻译： 一种掩模版操纵装置，其包括能够具有受控环境的壳体，其中至少一个处理模块连接到所述壳体并且能够加工掩模版。 传送装置连接到壳体，用于将至少一个模块之间的光罩传送到壳体的另一部分。 至少一个模块可拆卸地连接到壳体，并且至少一个模块具有适于将模块可移除地耦合到壳体的接口。 一个模块可选择用于从多个不同的可互换模块连接到壳体，每个模块具有不同的预定特性并且能够连接到壳体。

公开(公告)号：US07478454B2

公开(公告)日：2009-01-20

申请号：US10628294

申请日：2003-07-28

申请人： Jakob Blattner ,  Rudy Federici

发明人： Jakob Blattner ,  Rudy Federici

IPC分类号： B08B6/00

CPC分类号： G03F1/82 ,  B08B5/00 ,  G03F7/70691

摘要： A detection/cleaning device for reticles employed in the production of electronic components, wherein the detection/cleaning device has a cleaning unit, in which a cleaning chamber is constructed. At least one gas feed for introducing a pressurized fluid cleaning medium opens into the cleaning chamber, and at least one suction means, by means of which the gas can be discharged from the cleaning chamber, leads from the cleaning chamber. The cleaning chamber has at least one first opening for introducing and removing a reticle. A detection unit for detecting contaminants on articles used in semiconductor production is provided. The detection unit has a detection means, into which a reticle can be introduced from one feed side of the detection unit. The first opening of the cleaning chamber and the feed side lie opposite each other. A feeding device is provided for exchanging a reticle between the cleaning unit and the detection unit.

摘要翻译： 一种用于生产电子部件的标线用检测/清洁装置，其中检测/清洁装置具有清洁单元，其中构成清洁室。 用于引入加压流体清洁介质的至少一个气体进料通向清洁室，并且至少一个抽吸装置（借助于该气体可以从清洗室排出气体）从清洁室引出。 清洁室具有用于引入和去除掩模版的至少一个第一开口。 提供了用于检测半导体生产中使用的物品上的污染物的检测单元。 检测单元具有检测装置，其中可从检测单元的一个进料侧引入掩模版。 清洁室和进料侧的第一开口彼此相对。 提供了一种用于在清洁单元和检测单元之间更换掩模版的馈送装置。

公开(公告)号：US07682455B2

公开(公告)日：2010-03-23

申请号：US10564066

申请日：2004-07-08

申请人： Jakob Blattner ,  Rudy Federici

发明人： Jakob Blattner ,  Rudy Federici

IPC分类号： C23C16/00 ,  C23F1/00 ,  H01L21/306 ,  B65G57/00 ,  B65H29/00 ,  B65H31/00 ,  B65H3/00 ,  B65G59/02 ,  B65G59/00

CPC分类号： H01L21/67778 ,  H01L21/67769 ,  H01L21/68714

摘要： To make possible a tightly packed, essentially horizontal storage of wafers (40), in which a simplified access to each of these wafers (40) is possible, a device is provided having a plurality of superimposed storage elements (10). The storage elements (10) have device features (16) for depositing the wafers (40). The storage elements (10) have projections (14) for lifting, whereby a specific storage element (10a) as well as all storage elements (10) arranged above this specific storage element (10a) can be lifted by a predetermined first height for producing a contact gap. The projections (14) can also be used to lift the storage element (10b) arranged below the said storage element (10a) by a predetermined second height for producing a freedom of access.

摘要翻译： 为了使得可以紧密地包装，基本上水平地存储晶片（40），其中可以简化对这些晶片（40）的访问，具有多个叠加的存储元件（10）的装置。 存储元件（10）具有用于沉积晶片（40）的器件特征（16）。 存储元件（10）具有用于提升的突起（14），由此可以将特定存储元件（10a）以及布置在该特定存储元件（10a）上方的所有存储元件（10）提升预定的第一高度以产生 接触间隙。 突起（14）也可用于将布置在所述存储元件（10a）下方的存储元件（10b）提升预定的第二高度以产生进入自由度。

公开(公告)号：US20060151404A1

公开(公告)日：2006-07-13

申请号：US10564066

申请日：2004-07-08

申请人： Jakob Blattner ,  Rudy Federici

发明人： Jakob Blattner ,  Rudy Federici

IPC分类号： A47G19/08 ,  B65D85/30

CPC分类号： H01L21/67778 ,  H01L21/67769 ,  H01L21/68714

摘要： To make possible a tightly packed, essentially horizontal storage of wafers (40), in which a simplified access to each of these wafers (40) is possible, a device is provided having a plurality of superimposed storage elements (10). The storage elements (10) have device features (16) for depositing the wafers (40). The storage elements (10) have projections (14) for lifting, whereby a specific storage element (10a) as well as all storage elements (10) arranged above this specific storage element (10a) can be lifted by a predetermined first height for producing a contact gap. The projections (14) can also be used to lift the storage element (10b) arranged below the said storage element (10a) by a predetermined second height for producing a freedom of access.

摘要翻译： 为了使得可以紧密地包装，基本上水平地存储晶片（40），其中可以简化对这些晶片（40）的访问，具有多个叠加的存储元件（10）的装置。 存储元件（10）具有用于沉积晶片（40）的器件特征（16）。 存储元件（10）具有用于提升的突起（14），由此可以将布置在该特定存储元件（10a）上方的特定存储元件（10a）以及所有存储元件（10）提升预定的第一高度 用于产生接触间隙。 突起（14）也可用于将布置在所述存储元件（10a）下方的存储元件（10b）提升预定的第二高度以产生进入自由度。

公开(公告)号：US07047984B2

公开(公告)日：2006-05-23

申请号：US10312396

申请日：2001-06-26

申请人： Jakob Blattner ,  Rudy Federici

发明人： Jakob Blattner ,  Rudy Federici

IPC分类号： B08B6/00

CPC分类号： H01L21/67028 ,  G03F1/82 ,  G03F7/70741

摘要： A cleaning device for use in the production of semiconductor components comprises two feed devices with which a fluid medium is guided across a respective surface of an object to be cleaned so that different faces of the object are simultaneously cleaned. At least two gas feeding devices, having one means each for directing a gas flow onto the surface of the object to be cleaned, open into a cleaning chamber supplying a pressurized cleaning gas. At least two extraction means are connected to the outside of the cleaning chamber for discharging the gas fed to the cleaning chamber. The object can be introduced into the cleaning chamber through at least one gap. At least two ionization means are used to ionize the gas and the particles that are present in the cleaning chamber. One ionization means each is mounted between a direction means and an extraction means.

摘要翻译： 用于生产半导体部件的清洁装置包括两个进料装置，流体介质通过该进料装置被引导穿过待清洁物体的相应表面，从而同时清洁物体的不同面。 至少两个气体供给装置，具有一个用于将气流引导到待清洁物体的表面上的装置，进入提供加压清洁气体的清洁室。 至少两个提取装置连接到清洁室的外部，用于排出供给到清洁室的气体。 可以通过至少一个间隙将物体引入清洁室。 使用至少两个电离装置来电离存在于清洁室中的气体和颗粒。 一个电离装置各自安装在方向装置和提取装置之间。