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公开(公告)号:US09508570B2
公开(公告)日:2016-11-29
申请号:US14058396
申请日:2013-10-21
IPC分类号: H01L21/67 , B28D5/02 , H01L21/687
CPC分类号: H01L21/67092 , B28D5/024 , B28D5/029 , H01L21/68764
摘要: A singulation apparatus and method including: at least one chuck station to which a workpiece is securable, the at least one chuck station being configured to move along a feed direction; a bridge extending above the at least one chuck station, the bridge having a first side and a second side opposite the first side; a first cutting device with members mounted to the bridge and being independently movable along the first side, transversely to the feed direction; and a second cutting device with members mounted to the bridge and being independently movable along the second side, transversely to the feed direction, the first and second cutting devices being configured and arranged for cutting the workpiece.
摘要翻译: 一种切割装置和方法,包括:至少一个卡盘站,工件可固定到该夹持站上,所述至少一个卡盘站构造成沿着进给方向移动; 在所述至少一个卡盘站上方延伸的桥,所述桥具有与所述第一侧相对的第一侧和第二侧; 第一切割装置,其具有安装到桥上并且可沿着第一侧横向于进给方向独立地移动的构件; 以及第二切割装置,其具有安装到所述桥接件并且可沿着所述第二侧面横向于所述进给方向独立地移动,所述第一和第二切割装置被构造和布置成用于切割所述工件。
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公开(公告)号:US20150111366A1
公开(公告)日:2015-04-23
申请号:US14058396
申请日:2013-10-21
IPC分类号: H01L21/67 , H01L21/687 , B28D5/00 , H01L21/78
CPC分类号: H01L21/67092 , B28D5/024 , B28D5/029 , H01L21/68764
摘要: Disclosed is a singulation apparatus, comprising: at least one chuck station to which a workpiece is securable, the at least one chuck station being configured to move along a feed direction; a bridge extending above the at least one chuck station, the bridge having a first side and a second side opposite the first side; a first cutting device members mounted to the bridge and being independently movable along the first side, transversely to the feed direction; and a second cutting device members mounted to the bridge and being independently movable along the second side, transversely to the feed direction, the first and second cutting devices being for cutting the workpiece. A singulation method is also disclosed.
摘要翻译: 公开了一种切割装置,包括:至少一个卡盘站,工件可固定到该夹持站上,所述至少一个卡盘站构造成沿着进给方向移动; 在所述至少一个卡盘站上方延伸的桥,所述桥具有与所述第一侧相对的第一侧和第二侧; 第一切割装置构件,其安装到所述桥上并且可沿着所述第一侧横向于所述进给方向独立地移动; 以及第二切割装置构件,其安装到所述桥上并且可沿所述第二侧横向于所述进给方向独立地移动,所述第一和第二切割装置用于切割所述工件。 还公开了一种分割方法。
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