公开(公告)号：US09508570B2

公开(公告)日：2016-11-29

申请号：US14058396

申请日：2013-10-21

Applicant: Chi Wah Cheng ,  Eric Lap Kei Chow ,  Joseph Hoi Shuen Tang ,  Chun Kit Liu

Inventor： Chi Wah Cheng ,  Eric Lap Kei Chow ,  Joseph Hoi Shuen Tang ,  Chun Kit Liu

IPC: H01L21/67 ,  B28D5/02 ,  H01L21/687

CPC classification number: H01L21/67092 ,  B28D5/024 ,  B28D5/029 ,  H01L21/68764

Abstract: A singulation apparatus and method including: at least one chuck station to which a workpiece is securable, the at least one chuck station being configured to move along a feed direction; a bridge extending above the at least one chuck station, the bridge having a first side and a second side opposite the first side; a first cutting device with members mounted to the bridge and being independently movable along the first side, transversely to the feed direction; and a second cutting device with members mounted to the bridge and being independently movable along the second side, transversely to the feed direction, the first and second cutting devices being configured and arranged for cutting the workpiece.

Abstract translation: 一种切割装置和方法，包括：至少一个卡盘站，工件可固定到该夹持站上，所述至少一个卡盘站构造成沿着进给方向移动; 在所述至少一个卡盘站上方延伸的桥，所述桥具有与所述第一侧相对的第一侧和第二侧; 第一切割装置，其具有安装到桥上并且可沿着第一侧横向于进给方向独立地移动的构件; 以及第二切割装置，其具有安装到所述桥接件并且可沿着所述第二侧面横向于所述进给方向独立地移动，所述第一和第二切割装置被构造和布置成用于切割所述工件。

公开(公告)号：US09263352B2

公开(公告)日：2016-02-16

申请号：US14146875

申请日：2014-01-03

Applicant: Chi Wah Cheng ,  Hoi Shuen Tang ,  Chun Kit Liu

Inventor： Chi Wah Cheng ,  Hoi Shuen Tang ,  Chun Kit Liu

IPC: H01L21/00 ,  B26D5/20 ,  H01L21/66 ,  H01L21/67 ,  H01L21/78 ,  B26D5/00 ,  B26D5/06 ,  B26D1/18 ,  H01L21/68

CPC classification number: H01L22/20 ,  B26D1/18 ,  B26D5/007 ,  B26D5/06 ,  H01L21/67092 ,  H01L21/67259 ,  H01L21/681 ,  H01L21/78 ,  Y10T83/162

Abstract: Disclosed is a singulation apparatus for cutting a workpiece. The singulation apparatus comprises: i) a processor; ii) at least one chuck device for securing the workpiece to be cut; iii) a cutting device spaced from the at least one chuck device by a separation distance, the cutting device being for cutting the workpiece secured to the at least one chuck device; and iv) an imaging device operable to capture one or more images comprising the cutting device and a reference feature. In particular, the processor is configured to determine a separation distance between the cutting device and the reference feature based on the one or more images as captured by the imaging device, to thereby determine the separation distance between the cutting device and the workpiece as secured to the at least one chuck device.

Abstract translation: 公开了一种用于切割工件的切割装置。 分割装置包括：i）处理器; ii）至少一个用于固定要切割的工件的卡盘装置; iii）与所述至少一个卡盘装置隔开间隔距离的切割装置，所述切割装置用于切割固定到所述至少一个卡盘装置的工件; 以及iv）可操作以捕获包括切割装置和参考特征的一个或多个图像的成像装置。 特别地，处理器被配置为基于由成像装置捕获的一个或多个图像来确定切割装置与参考特征之间的间隔距离，从而确定切割装置与工件之间的分离距离， 所述至少一个卡盘装置。

公开(公告)号：US20150194354A1

公开(公告)日：2015-07-09

申请号：US14146875

申请日：2014-01-03

Applicant: Chi Wah CHENG ,  Hoi Shuen TANG ,  Chun Kit LIU

Inventor： Chi Wah CHENG ,  Hoi Shuen TANG ,  Chun Kit LIU

IPC: H01L21/66 ,  B26D5/06 ,  B26D5/00 ,  H01L21/67 ,  H01L21/78

CPC classification number: H01L22/20 ,  B26D1/18 ,  B26D5/007 ,  B26D5/06 ,  H01L21/67092 ,  H01L21/67259 ,  H01L21/681 ,  H01L21/78 ,  Y10T83/162

Abstract: Disclosed is a singulation apparatus for cutting a workpiece. The singulation apparatus comprises: i) a processor; ii) at least one chuck device for securing the workpiece to be cut; iii) a cutting device spaced from the at least one chuck device by a separation distance, the cutting device being for cutting the workpiece secured to the at least one chuck device; and iv) an imaging device operable to capture one or more images comprising the cutting device and a reference feature. In particular, the processor is configured to determine a separation distance between the cutting device and the reference feature based on the one or more images as captured by the imaging device, to thereby determine the separation distance between the cutting device and the workpiece as secured to the at least one chuck device.

Abstract translation: 公开了一种用于切割工件的切割装置。 分割装置包括：i）处理器; ii）至少一个用于固定要切割的工件的卡盘装置; iii）与所述至少一个卡盘装置隔开间隔距离的切割装置，所述切割装置用于切割固定到所述至少一个卡盘装置的工件; 以及iv）可操作以捕获包括切割装置和参考特征的一个或多个图像的成像装置。 特别地，处理器被配置为基于由成像装置捕获的一个或多个图像来确定切割装置和参考特征之间的间隔距离，从而确定切割装置与工件之间的分离距离， 所述至少一个卡盘装置。

公开(公告)号：US20160141199A1

公开(公告)日：2016-05-19

申请号：US14541363

申请日：2014-11-14

Applicant: Wang Lung TSE ,  Hoi Shuen TANG ,  Chun Kit LIU

Inventor： Wang Lung TSE ,  Hoi Shuen TANG ,  Chun Kit LIU

IPC: H01L21/683

CPC classification number: H01L21/6838 ,  H01L21/67092

Abstract: The present invention relates to an apparatus for holding a workpiece to allow dicing of the workpiece. The apparatus comprises a base, an inner support member and an outer support member that is more deformable than the inner support member and arranged along a periphery of the inner support member. In use, air is extracted from suction holes of the inner support member, urging the workpiece against the inner and outer support members. Upon such urging, the outer support member deforms to seal a gap between the workpiece and the inner support member. This helps to increase the magnitude of the forces holding the workpiece against the inner support member.

Abstract translation: 本发明涉及一种用于保持工件以允许切割工件的装置。 该装置包括基部，内部支撑构件和外部支撑构件，其比内部支撑构件更可变形并且沿着内部支撑构件的周边布置。 在使用中，空气从内部支撑构件的吸入孔抽出，将工件推靠在内部和外部支撑构件上。 在这种推动下，外支撑构件变形以密封工件和内支撑构件之间的间隙。 这有助于增加保持工件抵抗内支撑构件的力的大小。

公开(公告)号：US20150111366A1

公开(公告)日：2015-04-23

申请号：US14058396

申请日：2013-10-21

Applicant: Chi Wah CHENG ,  Eric Lap Kei CHOW ,  Joseph Hoi Shuen TANG ,  Chun Kit LIU

Inventor： Chi Wah CHENG ,  Eric Lap Kei CHOW ,  Joseph Hoi Shuen TANG ,  Chun Kit LIU

IPC: H01L21/67 ,  H01L21/687 ,  B28D5/00 ,  H01L21/78

CPC classification number: H01L21/67092 ,  B28D5/024 ,  B28D5/029 ,  H01L21/68764

Abstract: Disclosed is a singulation apparatus, comprising: at least one chuck station to which a workpiece is securable, the at least one chuck station being configured to move along a feed direction; a bridge extending above the at least one chuck station, the bridge having a first side and a second side opposite the first side; a first cutting device members mounted to the bridge and being independently movable along the first side, transversely to the feed direction; and a second cutting device members mounted to the bridge and being independently movable along the second side, transversely to the feed direction, the first and second cutting devices being for cutting the workpiece. A singulation method is also disclosed.

Abstract translation: 公开了一种切割装置，包括：至少一个卡盘站，工件可固定到该夹持站上，所述至少一个卡盘站构造成沿着进给方向移动; 在所述至少一个卡盘站上方延伸的桥，所述桥具有与所述第一侧相对的第一侧和第二侧; 第一切割装置构件，其安装到所述桥上并且可沿着所述第一侧横向于所述进给方向独立地移动; 以及第二切割装置构件，其安装到所述桥上并且可沿所述第二侧横向于所述进给方向独立地移动，所述第一和第二切割装置用于切割所述工件。 还公开了一种分割方法。