公开(公告)号：US07329014B2

公开(公告)日：2008-02-12

申请号：US11402391

申请日：2006-04-11

申请人： Istvan Balogh ,  Kai Gaebel

发明人： Istvan Balogh ,  Kai Gaebel

IPC分类号： G02B5/08

CPC分类号： G03F7/70175 ,  B82Y10/00 ,  G03F7/70166 ,  G21K1/062 ,  G21K2201/065

摘要： The invention is directed to a collector mirror for short-wavelength radiation based on a plasma. It is the object of the invention to find a novel possibility for managing the temperature of a collector mirror for focusing short-wavelength radiation generated from a plasma which allows an efficient thermal connection to be produced between the optically active mirror surface and a thermostat system without the disadvantages relating to space requirements or high-precision manufacture of the collector mirror. This object is met, according to the invention, in that the collector mirror has a solid, rotationally symmetric substrate which comprises a material with high thermal conductivity of more than 50 W/mK and in which channels for cooling and temperature management are incorporated in the substrate so that a heat transport medium can flow through directly and for rapidly stabilizing the temperature of the optically active mirror surface. Heat of transient temperature spikes which occur in pulsed operation for plasma generation at the mirror surface and which temporarily exceed the temperature average by a multiple is quickly dissipated.

摘要翻译： 本发明涉及一种基于等离子体的短波长辐射的集光镜。 本发明的目的是找到一种用于管理用于聚焦由等离子体产生的短波长辐射的聚光镜的温度的新型可能性，其允许在光学活性反射镜表面和恒温器系统之间产生有效的热连接而无需 与空间要求有关的缺点或收集镜的高精度制造。 根据本发明，满足本发明的目的在于，收集器反射镜具有固体，旋转对称的基板，其包括具有大于50W / mK的高热导率的材料，并且其中用于冷却和温度管理的通道被并入 衬底，使得传热介质可以直接流过并快速稳定光学镜面的温度。 在脉冲操作中发生的瞬态温度峰值的热量，其在镜面处等离子体产生并且临时超过温度平均值的倍数被快速消散。

公开(公告)号：US20060227826A1

公开(公告)日：2006-10-12

申请号：US11402391

申请日：2006-04-11

申请人： Istvan Balogh ,  Kai Gaebel

发明人： Istvan Balogh ,  Kai Gaebel

IPC分类号： H01S3/04

CPC分类号： G03F7/70175 ,  B82Y10/00 ,  G03F7/70166 ,  G21K1/062 ,  G21K2201/065

摘要： The invention is directed to a collector mirror for short-wavelength radiation based on a plasma. It is the object of the invention to find a novel possibility for managing the temperature of a collector mirror for focusing short-wavelength radiation generated from a plasma which allows an efficient thermal connection to be produced between the optically active mirror surface and a thermostat system without the disadvantages relating to space requirements or high-precision manufacture of the collector mirror. This object is met, according to the invention, in that the collector mirror has a solid, rotationally symmetric substrate which comprises a material with high thermal conductivity of more than 50 W/mK and in which channels for cooling and temperature management are incorporated in the substrate so that a heat transport medium can flow through directly and for rapidly stabilizing the temperature of the optically active mirror surface. Heat of transient temperature spikes which occur in pulsed operation for plasma generation at the mirror surface and which temporarily exceed the temperature average by a multiple is quickly dissipated.

摘要翻译： 本发明涉及一种基于等离子体的短波长辐射的集光镜。 本发明的目的是找到一种用于管理用于聚焦由等离子体产生的短波长辐射的聚光镜的温度的新型可能性，其允许在光学活性反射镜表面和恒温器系统之间产生有效的热连接而无需 与空间要求有关的缺点或收集镜的高精度制造。 根据本发明，满足本发明的目的在于，收集器反射镜具有固体，旋转对称的基板，其包括具有大于50W / mK的高热导率的材料，并且其中用于冷却和温度管理的通道被并入 衬底，使得传热介质可以直接流过并快速稳定光学镜面的温度。 在脉冲操作中发生的瞬态温度峰值的热量，其在镜面处等离子体产生并且临时超过温度平均值的倍数被快速消散。

公开(公告)号：US5521764A

公开(公告)日：1996-05-28

申请号：US370512

申请日：1995-01-09

申请人： Istvan Balogh ,  Joerg-Peter Schmidt

发明人： Istvan Balogh ,  Joerg-Peter Schmidt

IPC分类号： G02B7/02 ,  G02B27/62

CPC分类号： G02B7/023 ,  G02B27/62

摘要： A device according to the invention enables a high-precision adjustment of lenses or lens groups in a mounted high-performance lens system at any time. The lens or lens group to be adjusted is fixed in a lens mount which is held in a frictional engagement in a first mount. The fit clearance between the lens mount and first mount which is arranged in the high-performance lens system so as to be substantially virtually free of play radially is at least as great as the desired adjustment region. Piezoelectric translators are arranged in the wall region of the lens mount so as to be parallel to the optical axis and act against the contact-pressing force bringing about the frictional engagement during the adjustment process so that the force required for the displacement of the lens mount in the first mount via radially acting adjusting members is small.

摘要翻译： 根据本发明的装置能够在任何时间对安装的高性能透镜系统中的透镜或透镜组进行高精度的调整。 要调节的透镜或透镜组固定在与第一安装件摩擦接合的透镜座中。 布置在高性能透镜系统中的透镜安装座和第一安装座之间的基本上实际上不会径向播放的配合间隙至少与期望的调节区域一样大。 压电转换器布置在透镜支架的壁区域中以平行于光轴并且抵抗在调节过程中产生摩擦接合的接触压力，使得透镜安装座的位移所需的力 在通过径向作用的调节构件的第一安装座中是小的。