专利检索 ap:"Jeongsoo Suh" 第 1 页

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发明申请
SUBSTRATE SUPPORT UNIT, AND APPARATUS AND METHOD FOR DEPOSITING THIN LAYER USING THE SAME 审中-公开
标题翻译：基板支撑单元，以及使用其沉积薄层的装置和方法

公开(公告)号：US20120145080A1

公开(公告)日：2012-06-14

申请号：US13323214

申请日：2011-12-12

申请人： YOUNGKYOU PARK , Jeongsoo Suh , Wangoo Hwang , Hoonsang Choi , Jongrok Park

发明人： YOUNGKYOU PARK , Jeongsoo Suh , Wangoo Hwang , Hoonsang Choi , Jongrok Park

IPC分类号： C23C16/458 , C23C16/46 , B23Q1/64 , C23C16/455

CPC分类号： C23C16/4584 , C23C16/4412 , C23C16/45565 , C23C16/4586 , C23C16/46

摘要： A substrate support unit includes a support member configured to accommodate a plurality of substrate holders and a driving member configured to rotate the substrate holders and the support member on their respective axes.

摘要翻译： 衬底支撑单元包括构造成容纳多个衬底保持器的支撑构件和被构造成使衬底保持器和支撑构件在它们各自的轴上旋转的驱动构件。