摘要:
Methods for cleaning a stannane distributions system. A stannane distribution system connecting a stannane supply source and a semiconductor manufacturing tool is provided. Stannane is flown through the system, and a tin layer is formed on the components of the distribution system. This tin layer is then cleaned from the distribution system without the use of liquid cleaning chemicals.
摘要:
To provide a stannane gas supply system capable of supplying a stannane gas to an extreme ultraviolet ray radiation source with a stable flow rate. A stannane gas supply system for supplying a stannane gas to an extreme ultraviolet ray radiation source characterized by comprising a sealed container for storing a mixture of a stannane liquid and a stannane gas, connected with the extreme ultraviolet ray radiation source via a pipe, cooling means for cooling the sealed container to a temperature lower than −60° C., a low pressure mass flow controller provided in the pipe, a pressure detecting device mounted in the pipe part disposed between the sealed container and the low pressure mass flow controller, for detecting the pressure of the stannane gas in the pipe part, and controlling means for controlling the cooling degree of the sealed container by the cooling means based on the pressure detection value by the pressure detecting device.
摘要:
Provided is a safe method for qualifying the cylinder valves on gas cylinders, which method can also clean the cylinder valve when necessary. Compressed gas residing in a gas cylinder is discharged through the flow path of a cylinder valve with the cylinder valve on the gas cylinder in an open position. During this process ultrasound vibrations from the generator are applied to the cylinder valve and the number of particles in the outflowing gas is counted by a detector. The cleanliness of the cylinder valve is evaluated based on the detected value of the number of particles provided by the detector. When the detected value exceeds a standard value, the application of ultrasound vibrations, counting of the number of particles, and evaluation of the cleanliness are repeated until the detected value reaches or falls below the standard value.
摘要:
A process to detect metal impurities in a gas or gas mixture including the steps of directing the gas or gas mixture through non-metallic pipings to a sampling device and sampling the gas or gas mixture for metal impurities detection, wherein the sampling device is close to an inlet and/or outlet of a machine employing the gas or gas mixture as a processing gas, the machine being surrounded by a booth containing a gaseous atmosphere which is continuously circulated in the booth, partially renewing said atmosphere continuously, and exhausting excess atmosphere.
摘要:
A process for reducing corrosion in a gas distribution network of ultra high purity gas or any part of said distribution network, including: (a) Wet cleaning the gas distribution network or at least one part thereof with a wet cleaning agent, (b) Liquid drying the gas distribution network or the at least one part thereof with an H.sub.2 O desorbing liquid drying agent selected from the group consisting of acetone dimethylacetal DMP, 2.2 dichloropropane DCP or 2.2 dibromopropane DBP, mixtures thereof and any equivalent thereof, (c) purging said gas distribution network or any part thereof with a dry high purity gas comprising less than 1 ppm of any impurity, and (d) evacuating the gas distribution network or any part thereof at a pressure which is lower than 5.times.10.sup.4 Pascal (e) exposing the gas distribution network or any part thereof to an atmosphere including an ultra high purity corrosive gas or air.
摘要:
Provided is a method for preparing a fluid containing size-controlled particles that is optimized with respect to use of a target fluid as a matrix fluid under conditions approximating actual conditions. In a preferred embodiment, size-controlled SiO2 particles are obtained by mixing and dispersing SiO2 starting particles having various sizes in a N2 carrier gas followed by fractionation with a fractionator. The size-controlled particles are electrostatically collected by a porous member from the carrier gas flow. Ultrasonic vibrations are then applied to the porous member while a HCl matrix fluid flows through the porous member loaded with the size-controlled particles. This causes release of the size-controlled particles from the porous member and their admixture and dispersion into the HCl matrix fluid.
摘要:
A nuclear fuel conversion system comprises a unit for heating and denitrifying a nitric acid solution of uranyl nitrate, plutonium nitrate, or mixture thereof, a unit for grinding denitrified products, a unit connected to the grinding unit through a first conveying unit for roasting and reducing ground products, a unit connected to the roast-reduction unit through a second conveying unit for further grinding and then sieving the roasted and reduced products, and a unit for disposing of waste gases and waste liquor. The denitrification unit includes a microwave generator for heating and denitrifying the nitric acid solution and for cooling the denitrified product, and the first and second conveying units comprise pneumatic carrier means each of which consists of a suction nozzle, cyclone connected to the nozzle through a pipe, and a blower for creating a reduced pressure condition in the pipe.