公开(公告)号：US20080271753A1

公开(公告)日：2008-11-06

申请号：US12115295

申请日：2008-05-05

申请人： Kohei TARUTANI ,  Hideyuki Sato ,  Cheng-Fang Hsiao

发明人： Kohei TARUTANI ,  Hideyuki Sato ,  Cheng-Fang Hsiao

IPC分类号： B08B7/00

CPC分类号： B08B5/00 ,  B08B9/02

摘要： Methods for cleaning a stannane distributions system. A stannane distribution system connecting a stannane supply source and a semiconductor manufacturing tool is provided. Stannane is flown through the system, and a tin layer is formed on the components of the distribution system. This tin layer is then cleaned from the distribution system without the use of liquid cleaning chemicals.

摘要翻译： 清洁锡烷分布系统的方法。 提供了连接锡烷供应源和半导体制造工具的锡烷分配系统。 锡烷流经系统，并在分配系统的组件上形成锡层。 然后将该锡层从分配系统中清洗而不使用液体清洁化学品。

公开(公告)号：US20080041074A1

公开(公告)日：2008-02-21

申请号：US11840023

申请日：2007-08-16

申请人： Kohei TARUTANI

发明人： Kohei TARUTANI

IPC分类号： F25B49/00

CPC分类号： H05G2/003 ,  H05G2/005

摘要： To provide a stannane gas supply system capable of supplying a stannane gas to an extreme ultraviolet ray radiation source with a stable flow rate. A stannane gas supply system for supplying a stannane gas to an extreme ultraviolet ray radiation source characterized by comprising a sealed container for storing a mixture of a stannane liquid and a stannane gas, connected with the extreme ultraviolet ray radiation source via a pipe, cooling means for cooling the sealed container to a temperature lower than −60° C., a low pressure mass flow controller provided in the pipe, a pressure detecting device mounted in the pipe part disposed between the sealed container and the low pressure mass flow controller, for detecting the pressure of the stannane gas in the pipe part, and controlling means for controlling the cooling degree of the sealed container by the cooling means based on the pressure detection value by the pressure detecting device.

摘要翻译： 提供能够以稳定的流量向极紫外线辐射源供应锡烷气体的锡烷气供给系统。 一种用于向极端紫外线辐射源供应锡烷气体的锡烷气体供给系统，其特征在于包括用于储存经由管道与所述极紫外线辐射源连接的锡烷液体和锡烷气体的混合物的密封容器，冷却装置 用于将密封容器冷却至-60℃以下的温度，设置在管内的低压质量流量控制器，安装在密封容器和低压质量流量控制器之间的管部中的压力检测装置，用于 检测管道部分中的锡烷气体的压力;以及控制装置，用于根据压力检测装置的压力检测值，通过冷却装置控制密封容器的冷却程度。

公开(公告)号：US06182519B2

公开(公告)日：2001-02-06

申请号：US09268685

申请日：1999-03-16

申请人： Masao Kimura ,  Kohei Tarutani

发明人： Masao Kimura ,  Kohei Tarutani

IPC分类号： B08B100

CPC分类号： B08B9/00 ,  B08B7/028 ,  G01N15/02

摘要： Provided is a safe method for qualifying the cylinder valves on gas cylinders, which method can also clean the cylinder valve when necessary. Compressed gas residing in a gas cylinder is discharged through the flow path of a cylinder valve with the cylinder valve on the gas cylinder in an open position. During this process ultrasound vibrations from the generator are applied to the cylinder valve and the number of particles in the outflowing gas is counted by a detector. The cleanliness of the cylinder valve is evaluated based on the detected value of the number of particles provided by the detector. When the detected value exceeds a standard value, the application of ultrasound vibrations, counting of the number of particles, and evaluation of the cleanliness are repeated until the detected value reaches or falls below the standard value.

摘要翻译： 提供了气瓶上的气瓶阀的安全方法，该方法也可以在必要时清洗气瓶阀。 位于气瓶中的压缩气体通过汽缸阀的流路通过气瓶上的汽缸阀在打开位置排出。 在该过程中，来自发电机的超声振动被施加到气缸阀，并且通过检测器对流出气体中的颗粒数进行计数。 基于由检测器提供的颗粒数量的检测值来评价气缸阀的清洁度。 当检测值超过标准值时，重复超声振动的应用，颗粒数的计数和清洁度的评估，直到检测值达到或低于标准值。

公开(公告)号：US5882378A

公开(公告)日：1999-03-16

申请号：US900190

申请日：1997-07-25

申请人： Kohei Tarutani ,  Itsuko Suzuki

发明人： Kohei Tarutani ,  Itsuko Suzuki

IPC分类号： G01N1/22 ,  G01N33/00 ,  G01N33/20 ,  B01D47/02

CPC分类号： G01N33/0009 ,  G01N1/2202 ,  G01N2001/2223

摘要： A process to detect metal impurities in a gas or gas mixture including the steps of directing the gas or gas mixture through non-metallic pipings to a sampling device and sampling the gas or gas mixture for metal impurities detection, wherein the sampling device is close to an inlet and/or outlet of a machine employing the gas or gas mixture as a processing gas, the machine being surrounded by a booth containing a gaseous atmosphere which is continuously circulated in the booth, partially renewing said atmosphere continuously, and exhausting excess atmosphere.

摘要翻译： 一种检测气体或气体混合物中的金属杂质的方法，包括以下步骤：将气体或气体混合物通过非金属管道引导到采样装置，并对气体或气体混合物进行采样以进行金属杂质检测，其中采样装置接近 使用气体或气体混合物作为处理气体的机器的入口和/或出口，该机器被包含气氛的展位包围，该展位在展位中连续循环，连续地更新所述大气，并排出多余的气氛。

公开(公告)号：US5676762A

公开(公告)日：1997-10-14

申请号：US506867

申请日：1995-07-25

申请人： Masao Kimura ,  Toshiyuki Tsukamoto ,  Kohei Tarutani ,  Jean-Marie Friedt

发明人： Masao Kimura ,  Toshiyuki Tsukamoto ,  Kohei Tarutani ,  Jean-Marie Friedt

IPC分类号： F17D1/04 ,  B01J4/00 ,  B08B9/00 ,  B08B9/02 ,  F17C9/00 ,  B08B3/04 ,  B08B5/00 ,  B08B5/04

CPC分类号： B08B9/032 ,  B08B9/00 ,  B08B9/0321 ,  B08B9/0323 ,  F17C9/00

摘要： A process for reducing corrosion in a gas distribution network of ultra high purity gas or any part of said distribution network, including: (a) Wet cleaning the gas distribution network or at least one part thereof with a wet cleaning agent, (b) Liquid drying the gas distribution network or the at least one part thereof with an H.sub.2 O desorbing liquid drying agent selected from the group consisting of acetone dimethylacetal DMP, 2.2 dichloropropane DCP or 2.2 dibromopropane DBP, mixtures thereof and any equivalent thereof, (c) purging said gas distribution network or any part thereof with a dry high purity gas comprising less than 1 ppm of any impurity, and (d) evacuating the gas distribution network or any part thereof at a pressure which is lower than 5.times.10.sup.4 Pascal (e) exposing the gas distribution network or any part thereof to an atmosphere including an ultra high purity corrosive gas or air.

摘要翻译： 一种用于减少超高纯度气体或所述分配网络的任何部分的气体分配网络中的腐蚀的方法，包括：（a）用湿式清洁剂湿气清洁气体分配网络或其至少一部分，（b）液体 用选自丙酮二甲基缩醛DMP，2.2二氯丙烷DCP或2.2二溴丙烷DBP，其混合物和其任何等同物的H 2 O解吸液体干燥剂干燥气体分配网络或其至少一部分，（c）吹扫所述气体 分配网络或其任何部分具有包含小于1ppm的任何杂质的干燥高纯度气体，以及（d）以低于5×104帕斯卡的压力（e）将气体分布网络或其任何部分抽空（e） 网络或其任何部分到包括超高纯度腐蚀性气体或空气的气氛中。

公开(公告)号：US06254787B1

公开(公告)日：2001-07-03

申请号：US09294132

申请日：1999-04-20

申请人： Masao Kimura ,  Itsuko Suzuki ,  Kohei Tarutani

发明人： Masao Kimura ,  Itsuko Suzuki ,  Kohei Tarutani

IPC分类号： B03C3017

CPC分类号： B03C3/78 ,  B03C3/74 ,  Y10T436/101666

摘要： Provided is a method for preparing a fluid containing size-controlled particles that is optimized with respect to use of a target fluid as a matrix fluid under conditions approximating actual conditions. In a preferred embodiment, size-controlled SiO2 particles are obtained by mixing and dispersing SiO2 starting particles having various sizes in a N2 carrier gas followed by fractionation with a fractionator. The size-controlled particles are electrostatically collected by a porous member from the carrier gas flow. Ultrasonic vibrations are then applied to the porous member while a HCl matrix fluid flows through the porous member loaded with the size-controlled particles. This causes release of the size-controlled particles from the porous member and their admixture and dispersion into the HCl matrix fluid.

摘要翻译： 提供了一种制备含有尺寸控制颗粒的流体的方法，该流体在接近实际条件的条件下相对于使用目标流体作为基质流体而被优化。 在优选的实施方案中，通过在N 2载气中混合并分散具有各种尺寸的SiO 2起始颗粒，然后用分馏器分馏来获得尺寸控制的SiO 2颗粒。 尺寸控制的颗粒通过多孔构件从载气流中静电收集。 然后将超声波振动施加到多孔构件，同时HCl基质流体流过装载有尺寸控制的颗粒的多孔构件。 这导致尺寸控制的颗粒从多孔构件的释放以及它们的混合物和分散体到HCl基质流体中。

公开(公告)号：US4439402A

公开(公告)日：1984-03-27

申请号：US329580

申请日：1981-12-10

申请人： Kohei Tarutani ,  Takeo Tamura ,  Hirofumi Oshima

发明人： Kohei Tarutani ,  Takeo Tamura ,  Hirofumi Oshima

IPC分类号： C01G43/01 ,  C01G43/025 ,  C01G56/00 ,  G21C3/00 ,  G21C19/46 ,  G21C21/02 ,  B65G53/60 ,  B01D35/02 ,  B01J19/12 ,  G21F9/08

CPC分类号： C01G56/005 ,  C01G43/025 ,  C01G56/004

摘要： A nuclear fuel conversion system comprises a unit for heating and denitrifying a nitric acid solution of uranyl nitrate, plutonium nitrate, or mixture thereof, a unit for grinding denitrified products, a unit connected to the grinding unit through a first conveying unit for roasting and reducing ground products, a unit connected to the roast-reduction unit through a second conveying unit for further grinding and then sieving the roasted and reduced products, and a unit for disposing of waste gases and waste liquor. The denitrification unit includes a microwave generator for heating and denitrifying the nitric acid solution and for cooling the denitrified product, and the first and second conveying units comprise pneumatic carrier means each of which consists of a suction nozzle, cyclone connected to the nozzle through a pipe, and a blower for creating a reduced pressure condition in the pipe.

摘要翻译： 核燃料转化系统包括用于对硝酸铀酰硝酸盐，硝酸钚或其混合物的硝酸溶液进行加热和反硝化的单元，用于研磨脱氮产物的单元，通过用于焙烧和还原的第一输送单元连接到研磨单元的单元 研磨产品，通过第二输送单元连接到减速单元的单元，用于进一步研磨，然后筛分焙烤和还原产物，以及用于处理废气和废液的单元。 脱氮单元包括用于加热和反硝化硝酸溶液并用于冷却反硝化产物的微波发生器，并且第一和第二输送单元包括气动承载装置，每个气动承载装置由吸嘴，通过管道连接到喷嘴的旋风分离器 以及用于在管中产生减压状态的鼓风机。