公开(公告)号：US20080264341A1

公开(公告)日：2008-10-30

申请号：US11740592

申请日：2007-04-26

申请人： Boris Druz ,  Ivan I. Aksenov ,  Olexandr A. Luchaninov ,  Volodymyr E. StreInytskiy ,  Volodymyr V. Vasylyev ,  Isaak Zaritskiy ,  Piero Sferlazzo

发明人： Boris Druz ,  Ivan I. Aksenov ,  Olexandr A. Luchaninov ,  Volodymyr E. StreInytskiy ,  Volodymyr V. Vasylyev ,  Isaak Zaritskiy ,  Piero Sferlazzo

IPC分类号： C23C16/44

CPC分类号： C23C14/325 ,  C23C14/165 ,  H01J37/32055 ,  H01J37/3266

摘要： Apparatus for cathodic vacuum-arc coating deposition. The apparatus includes a mixing chamber, at least one input duct projecting from a first end wall of the mixing chamber, and an output duct projecting from a second end wall of the mixing chamber. Coupled with each input duct is a plasma source adapted to discharge an ion flow of a coating material into the mixing chamber, which is subsequently directed to the output duct. A first solenoidal coil disposed about a side wall of the mixing chamber creates a first magnetic field inside the mixing chamber for steering the ion flow. A second solenoidal coil is disposed adjacent to the first end wall and aligned substantially coaxially with the output duct. The second solenoidal coil creates a second magnetic field inside the mixing chamber for steering the first ion flow. The electrical currents flow through the first and second solenoidal coils in opposite solenoidal directions.

摘要翻译： 阴极真空电弧涂层沉积设备。 该装置包括混合室，从混合室的第一端壁突出的至少一个输入管道和从混合室的第二端壁突出的输出管道。 与每个输入管道耦合的是等离子体源，其适于将涂覆材料的离子流排放到混合室中，其随后被引导到输出管道。 围绕混合室的侧壁设置的第一螺线管线圈在混合室内产生用于转向离子流的第一磁场。 第二螺线管线圈设置成与第一端壁相邻并且与输出管道基本上同轴对准。 第二螺线管线圈在混合室内产生用于转向第一离子流的第二磁场。 电流在相反的螺线管方向上流过第一和第二螺线管线圈。

公开(公告)号：US08157976B2

公开(公告)日：2012-04-17

申请号：US11740592

申请日：2007-04-26

申请人： Boris Druz ,  Ivan I. Aksenov ,  Olexandr A. Luchaninov ,  Volodymyr E. Strelnytskiy ,  Volodymyr V. Vasylyev ,  Isaak Zaritskiy ,  Piero Sferlazzo

发明人： Boris Druz ,  Ivan I. Aksenov ,  Olexandr A. Luchaninov ,  Volodymyr E. Strelnytskiy ,  Volodymyr V. Vasylyev ,  Isaak Zaritskiy ,  Piero Sferlazzo

IPC分类号： C23C14/00 ,  C23C16/00 ,  H01L21/306

CPC分类号： C23C14/325 ,  C23C14/165 ,  H01J37/32055 ,  H01J37/3266

摘要： Apparatus for cathodic vacuum-arc coating deposition. The apparatus includes a mixing chamber, at least one input duct projecting from a first end wall of the mixing chamber, and an output duct projecting from a second end wall of the mixing chamber. Coupled with each input duct is a plasma source adapted to discharge an ion flow of a coating material into the mixing chamber, which is subsequently directed to the output duct. A first solenoidal coil disposed about a side wall of the mixing chamber creates a first magnetic field inside the mixing chamber for steering the ion flow. A second solenoidal coil is disposed adjacent to the first end wall and aligned substantially coaxially with the output duct. The second solenoidal coil creates a second magnetic field inside the mixing chamber for steering the first ion flow. The electrical currents flow through the first and second solenoidal coils in opposite solenoidal directions.

摘要翻译： 阴极真空电弧涂层沉积设备。 该装置包括混合室，从混合室的第一端壁突出的至少一个输入管道和从混合室的第二端壁突出的输出管道。 与每个输入管道耦合的是等离子体源，其适于将涂覆材料的离子流排放到混合室中，其随后被引导到输出管道。 围绕混合室的侧壁设置的第一螺线管线圈在混合室内产生用于转向离子流的第一磁场。 第二螺线管线圈设置成与第一端壁相邻并且与输出管道基本上同轴对准。 第二螺线管线圈在混合室内产生用于转向第一离子流的第二磁场。 电流在相反的螺线管方向上流过第一和第二螺线管线圈。