公开(公告)号：US4173522A

公开(公告)日：1979-11-06

申请号：US831132

申请日：1977-09-07

申请人： Hans K. Pulker ,  Reinhard Staffler

发明人： Hans K. Pulker ,  Reinhard Staffler

IPC分类号： C23C14/06 ,  C23C14/34 ,  C23C15/00

CPC分类号： C23C14/0605 ,  C23C14/3414

摘要： A method for producing carbon coatings by sputtering comprises placing the target material to be sputtered which is made of a fibrous carbon material such as paper, velvet, wood, etc. which has been charred on the cathode. The apparatus comprises an electrode forming an anode which is arranged in spaced relationship to a cathode.

摘要翻译： 通过溅射制造碳涂层的方法包括将已被烧焦在阴极上的诸如纸，天鹅绒，木材等的纤维状碳材料制成的溅射靶材料放置。 该装置包括形成与阴极间隔开的阳极的电极。

公开(公告)号：US4777060A

公开(公告)日：1988-10-11

申请号：US908333

申请日：1986-09-17

申请人： Kurt Mayr ,  Reinhard Staffler ,  Werner Tippelt ,  Walter Scharizer

发明人： Kurt Mayr ,  Reinhard Staffler ,  Werner Tippelt ,  Walter Scharizer

IPC分类号： H01L21/48 ,  H01L23/14 ,  H05K1/05 ,  B05D1/00 ,  B05D1/08 ,  C23C16/30

CPC分类号： H05K1/053 ,  H01L21/4803 ,  H01L23/142 ,  H01L2224/16225

摘要： A method is provided for making a composite substrate for electronic semiconductor parts. The composite substrate has a metal core, an insulating layer, and a conducting layer. The insulating layer is deposited by chemical vapor deposition in the gaseous phase on the metal core, or by chemical vapor deposition in combination with other techniques, such as plasmaspraying and/or melting. The metal core is comprised of a highly heat-resistant refractory metal, e.g., molybdenum, tungsten, titanium, molybdenum-manganese alloy, or a high-alloy steel having a permeability of about 1.002. The insulating layer is comprised of an inorganic material such as aluminum oxide or aluminum nitride. The conducting layer typically comprises copper.

摘要翻译： 提供了一种制造电子半导体部件的复合基板的方法。 复合基板具有金属芯，绝缘层和导电层。 绝缘层通过化学气相沉积在金属芯上的气相中，或通过化学气相沉积与其它技术（诸如等离子体喷涂和/或熔化）结合沉积。 金属芯由高耐热难熔金属，例如钼，钨，钛，钼 - 锰合金或具有约1.002的渗透率的高合金钢构成。 绝缘层由无机材料如氧化铝或氮化铝构成。 导电层通常包括铜。