公开(公告)号：US06992493B2

公开(公告)日：2006-01-31

申请号：US10478496

申请日：2002-05-23

申请人： Shuji Yamaoka ,  Shogo Ishioka

发明人： Shuji Yamaoka ,  Shogo Ishioka

IPC分类号： G01R27/26

CPC分类号： G01B7/003

摘要： Disclosed is an apparatus and method for detecting positional displacement of a board. A board 20 having a surface formed with a conductive pattern 25 is transferred in a direction A while supplying an AC signal from a power supply section 3 to the surface of the board. The level of positional displacement of the board is detected in accordance with the transfer speed of the board and the difference between the timings of the intermediate signal levels generated when the AC signal is sensed by a pair of position sensors 1, 2 opposed to the leading edge of the board. The present invention allows positional displacement of the board to be detected in a simple non-contact structure while maintaining a high degree of accuracy without variation over time.

摘要翻译： 公开了一种用于检测板的位置偏移的装置和方法。 具有形成有导电图案25的表面的板20沿着方向A传送，同时从电源部3向板的表面提供AC信号。 根据电路板的传送速度来检测电路板的位置偏移水平，并且当由与一个位置传感器1,2对置的一对位置传感器1,2感测到AC信号时产生的中间信号电平的定时之间的差异 边缘的板子。 本发明允许在简单的非接触结构中进行待检测的板的位置位移，同时保持高精度而不随时间变化。

公开(公告)号：US06859062B2

公开(公告)日：2005-02-22

申请号：US10069520

申请日：2001-07-05

申请人： Tatuhisa Fujii ,  Shogo Ishioka

发明人： Tatuhisa Fujii ,  Shogo Ishioka

IPC分类号： G01R31/02 ,  G01R31/00 ,  G02F1/13 ,  G02F1/133 ,  G02F1/1362 ,  G09F9/00 ,  G09G3/00

CPC分类号： G09G3/006 ,  G02F2001/136254

摘要： The present invention provides an inspection apparatus and inspection method capable of inspecting the shape of a board used in a liquid crystal panel with high fineness and efficiency. A computer 21 controls an X-electrode select section 22 and a Y-electrode select section 23 to drive liquid crystal driving electrodes 102 selectively. A FLASHSHOCK Sensor 1 is located at a position opposed to a board 100 in a non-contact manner. The FLASHSHOCK Sensor 1 is adapted to detect each potential variation caused in the liquid crystal electrodes 101-104 and then output the detected potential variation to the computer 21 as a detect signal. The computer 21 receives the detect signal from the FLASHSHOCK Sensor 1 to create image data, and detects disconnection, short-circuit, chipping or the like in the liquid crystal electrodes based on the created image data. Further, the computer 21 displays an image representing each shape of the liquid crystal electrodes on a display 21a.

摘要翻译： 本发明提供一种检查装置和检查方法，其能够以高细度和高效率检查液晶面板中使用的板的形状。 计算机21控制X电极选择部22和Y电极选择部23，以选择性地驱动液晶驱动电极102。 FLASHSHOCK传感器1以非接触的方式位于与板100相对的位置。 FLASHSHOCK传感器1适于检测在液晶电极101-104中引起的每个电位变化，然后将检测到的电位变化输出到计算机21作为检测信号。 计算机21接收来自FLASHSHOCK传感器1的检测信号以产生图像数据，并且基于所创建的图像数据检测液晶电极中的断开，短路，碎片等。 此外，计算机21在显示器21a上显示表示各种形状的液晶电极的图像。

公开(公告)号：US06943559B2

公开(公告)日：2005-09-13

申请号：US10480106

申请日：2002-06-06

申请人： Shuji Yamaoka ,  Shogo Ishioka

发明人： Shuji Yamaoka ,  Shogo Ishioka

IPC分类号： G01R31/02 ,  G01R31/304 ,  G01R31/312 ,  H05K3/00 ,  H01H31/02 ,  G01R27/26

CPC分类号： G01R31/304 ,  G01R31/312

摘要： Disclosed is an circuit-pattern inspection apparatus comprising a power supply element 30 adapted to be capacitively coupled with a parallel array of conductive patterns 20 to supply an inspection signal to one end of each of the conductible patterns, an open sensor 40 adapted to be capacitively coupled with all of the other ends of the conductive patterns to detect the inspection signal, and a short sensor 50 arranged at a position displaced from the power supply element 30 and adapted to be capacitively coupled with two lines of the conductive patterns to detect the inspection signal. The quality of the conductive pattern is inspected such that the presence of disconnection is determined when the detect signal from the open sensor 40 is largely reduced, and the presence of short is determined when the detect signal from the short sensor 50 largely rises and then falls. The circuit-pattern inspection apparatus can detect defects in a circuit board reliably and readily.

摘要翻译： 公开了一种电路图案检查装置，其包括电源元件30，电源元件30适于与导电图案20的并行阵列电容耦合，以向每个可导电图案的一端提供检查信号，开放式传感器40适于电容化 与传导图案的所有另一端耦合以检测检查信号;以及短传感器50，布置在从电源元件30偏离的位置处，并适于与两条导电图案电容耦合以检测检查 信号。 检查导电图案的质量，使得当来自开路传感器40的检测信号被大大减小时确定断开的存在，并且当来自短传感器50的检测信号大大上升然后下降时确定短路的存在 。 电路图案检查装置可以可靠且容易地检测电路板中的缺陷。

公开(公告)号：US06710607B2

公开(公告)日：2004-03-23

申请号：US09926606

申请日：2001-11-26

申请人： Tatuhisa Fujii ,  Shogo Ishioka ,  Shuji Yamaoka

发明人： Tatuhisa Fujii ,  Shogo Ishioka ,  Shuji Yamaoka

IPC分类号： G01R3102

CPC分类号： G01R31/302 ,  G01R31/304 ,  G01R31/312

摘要： The present invention provides an inspection apparatus and method capable of intuitively obtaining inspection results of circuit wirings. An inspection system 20 comprises a sensor chip 1 including plural sensor elements, a computer 21, probes 22 for supplying an inspection signal to circuit wirings 101, and a selector 23 for switching the supply of the inspection signal to the probes 22. The computer 21 receives the detected signals from the sensor chip 1, and generates an image data to display an image of the circuit wirings as an inspection subject on a display 21a. This make it possible to check the shape of the specific circuit wiring and to detect defects such as disconnection, short-circuit, and chipping in the circuit wiring 101 based on the generated image data and the design image data representing the design circuit wiring.

摘要翻译： 本发明提供一种能够直观地获得电路布线的检查结果的检查装置和方法。 检查系统20包括传感器芯片1，其包括多个传感器元件，计算机21，用于向电路布线101提供检查信号的探针22以及用于切换向检测器22提供检查信号的选择器23.计算机21 从传感器芯片1接收检测到的信号，并生成图像数据，以在显示器21a上显示作为检查对象的电路布线的图像。 由此，能够根据生成的图像数据和表示设计电路布线的设计图像数据，检查电路布线的形状，检测电路布线101中的断线，短路，切断等缺陷。

公开(公告)号：US07332914B2

公开(公告)日：2008-02-19

申请号：US10547355

申请日：2004-02-27

申请人： Shuji Yamaoka ,  Akira Nurioka ,  Mishio Hayashi ,  Shogo Ishioka

发明人： Shuji Yamaoka ,  Akira Nurioka ,  Mishio Hayashi ,  Shogo Ishioka

IPC分类号： G01R31/08 ,  G01R31/302

CPC分类号： G01B7/28

摘要： Disclosed is a conductor inspection apparatus capable of detecting a state of an inspection-target electric conductor with a high degree of accuracy in a non-contact manner. The inspection apparatus includes a signal supply section 510 for supplying an inspection signal to an inspection-target conductor 520, and two sensor plates 570, 580 disposed approximately parallel to each other in the vicinity of the conductor 520. The inspection apparatus is designed to inspect a configuration of the conductor 520 disposed opposed to the sensor plate 570, in accordance with a measured signal level from the sensor plate 570. The inspection apparatus further includes a subtracter 550 for subjecting respective detected signal values from the sensor plates 570, 580 to subtraction, and a divider 560 for dividing the detected signal value from a selected one of the sensor plates by the subtraction result to normalize the detected signal value from the selected sensor plate so as to detect a relative ratio between the detected signal values from the sensor plates to obtain a value X corresponding a distance between the selected sensor plate and the conductor 520, as a detection result.

摘要翻译： 公开了能够以非接触的方式高精度地检测检查对象的导电体的状态的导体检查装置。 检查装置包括用于向检查对象导体520提供检查信号的信号提供部510和在导体520附近彼此大致平行地配置的两个传感器板570,580。 检查装置被设计成根据来自传感器板570的测量信号水平检查与传感器板570相对设置的导体520的构造。 检查装置还包括用于对来自传感器板570,580的各个检测信号值进行减法的减法器550和用于将检测到的信号值与所选择的传感器板中的一个传感器板相除的除法器560，以将检测到的检测信号值归一化 信号值，以便检测来自传感器板的检测信号值之间的相对比，以获得对应于所选择的传感器板和导体520之间的距离的值X.作为检测结果。

公开(公告)号：US07173445B2

公开(公告)日：2007-02-06

申请号：US10487828

申请日：2002-08-27

申请人： Tatsuhisa Fujii ,  Kazuhiro Monden ,  Mikiya Kasai ,  Shogo Ishioka ,  Shuji Yamaoka

发明人： Tatsuhisa Fujii ,  Kazuhiro Monden ,  Mikiya Kasai ,  Shogo Ishioka ,  Shuji Yamaoka

IPC分类号： G01R31/00 ,  G01R31/28

CPC分类号： G01R31/312

摘要： Disclosed is an inspection sensor and inspection apparatus capable of accurately inspecting the shape of a conductive pattern. A sensor element 12a includes an MOSFET, and an aluminum electrode (AL) serving as a passive element 80. The passive element or aluminum electrode 80 is connected to the gate of a MOSFET 81 and the source of a MOSFET 82. A voltage VDD is supplied from a power supply circuit 18 to the drain of the MOSFET 81, and the source of the MOSFET 81 is connected to the drain of a MOSFET 83. A reset signal is entered from a vertical selection section 14 into the gate of the MOSFET 82, and the voltage VDD is supplied from the power supply circuit 18 to the drain of the MOSFET 82. A selection signal is entered from the vertical selection section 14 into the gate of the MOSFET 83, and an output from the source of the MOSFET 83 is entered into a lateral selection section 13.

摘要翻译： 公开了能够精确地检查导电图案的形状的检查传感器和检查装置。 传感器元件12a包括MOSFET和用作无源元件80的铝电极（AL）。 无源元件或铝电极80连接到MOSFET81的栅极和MOSFET82的源极。 电压VDD从电源电路18提供给MOSFET 81的漏极，MOSFET81的源极连接到MOSFET 83的漏极。 复位信号从垂直选择部分14进入到MOSFET82的栅极，并且电压VDD从电源电路18提供给MOSFET82的漏极。 选择信号从垂直选择部分14进入到MOSFET 83的栅极，并且来自MOSFET 83的源极的输出进入横向选择部分13。

公开(公告)号：US07138805B2

公开(公告)日：2006-11-21

申请号：US10069523

申请日：2001-06-13

申请人： Shogo Ishioka ,  Shuji Yamaoka

发明人： Shogo Ishioka ,  Shuji Yamaoka

IPC分类号： G01R27/26 ,  G01R31/08

CPC分类号： G01R31/312 ,  G01R31/2805 ,  G01R31/2812 ,  G01R31/304 ,  H01L22/12 ,  H01L2924/0002 ,  H01L2924/00

摘要： The present invention provides an inspection apparatus and an inspection method, capable of, when supplying an inspection signal to a circuit wiring, eliminating any need for a pin to be brought into contact with the circuit wiring and detecting any defects including an invisible microscopic defect. An inspection apparatus A for inspecting a circuit wiring of a circuit board 100 comprises a conductive member 1 adapted to be disposed on the side of one of surfaces of the circuit board 100 and to be supplied with an inspection signal, a signal source 2 for supplying the inspection signal to the conductive member 1, a sensor unit 3 including a plurality of cells 3a to be disposed the opposed to the conductive member 1 on the side of the other surface of the circuit board 100, and a computer 5 for acquiring each signal appearing at the cells 3a in response to the inspection signal supplied to the conductive member 1.

摘要翻译： 本发明提供一种检测装置和检查方法，能够在向电路布线提供检查信号时，不需要与电路布线接触的引脚，并且检测出包括不可见的微观缺陷的任何缺陷。 用于检查电路板100的电路布线的检查装置A包括：导电构件1，其适于布置在电路板100的一个表面的侧面并且被提供检查信号;信号源2，用于供应 对导电部件1的检查信号，包括在电路板100的另一面的与导电部件1相对设置的多个电池单元3a的传感器单元3，以及用于获取电路板 响应于提供给导电构件1的检查信号，在单元3a处出现信号。

公开(公告)号：US20060226851A1

公开(公告)日：2006-10-12

申请号：US10547355

申请日：2004-02-27

申请人： Shuji Yamaoka ,  Akira Nurioka ,  Mishio Hayashi ,  Shogo Ishioka

发明人： Shuji Yamaoka ,  Akira Nurioka ,  Mishio Hayashi ,  Shogo Ishioka

IPC分类号： G01R31/08

CPC分类号： G01B7/28

摘要： Disclosed is a conductor inspection apparatus capable of capable of detecting a state of an inspection-target electric conductor with a high degree of accuracy in a non-contact manner. The inspection apparatus comprises a signal supply section 510 for supplying an inspection signal to an inspection-target conductor 520, and two sensor plates 570, 580 disposed approximately parallel to each other in the vicinity of the conductor 520. The inspection apparatus is designed to inspect a configuration of the conductor 520 disposed opposed to the sensor plate 570, in accordance with a measured signal level from the sensor plate 570. The inspection apparatus further includes a subtracter 550 for subjecting respective detected signal values from the sensor plates 570, 580 to subtraction, and a divider 560 for dividing the detected signal value from a selected one of the sensor plates by the subtraction result to normalize the detected signal value from the selected sensor plate so as to detect a relative ratio between the detected signal values from the sensor plates to obtain a value X corresponding a distance between the selected sensor plate and the conductor 520, as a detection result.

摘要翻译： 公开了能够以非接触的方式高精度地检测检查对象的导电体的状态的导体检查装置。 检查装置包括用于向检查对象导体520提供检查信号的信号供给部510和在导体520附近彼此大致平行地配置的两个传感器板570,580。检查装置被设计为检查 根据来自传感器板570的测量信号电平，设置与传感器板570相对设置的导体520的结构。检查装置还包括减法器550，用于对来自传感器板570,580的各个检测信号值进行减法 以及分频器560，用于通过减法结果将来自所选传感器板的检测信号值分割，以从所选择的传感器板归一化检测信号值，以便检测来自传感器板的检测信号值之间的相对比例 以获得对应于所选择的传感器板和导体520之间的距离的值X. 效果结果。

公开(公告)号：US20060055413A1

公开(公告)日：2006-03-16

申请号：US10536996

申请日：2003-11-28

申请人： Shuji Yamaoka ,  Hiroshi Hamori ,  Shogo Ishioka

发明人： Shuji Yamaoka ,  Hiroshi Hamori ,  Shogo Ishioka

IPC分类号： G01R31/28

CPC分类号： G01R31/2808

摘要： Disclosed is a circuit pattern inspection apparatus for inspecting a conductive pattern of a circuit board which includes first and second comb-shaped conductive patterns 15a, 15b each having a plurality of terminal portions arranged substantially parallel to each other and a base portion connecting respective anchor ends of the terminal portions together, wherein the terminal portions of the first comb-shaped conductive pattern are alternately arranged with respect to the terminal portions of said second comb-shaped conductive pattern, and the first second comb-shaped conductive patterns 15a, 15b are adapted, respectively, to be supplied with an AC inspection signal, and grounded. The circuit pattern inspection apparatus comprises first and second detection means 20, 30 each having a detection electrode for detecting a signal from the first and second comb-shaped conductive patterns, and a scalar robot 80 operable to move each of the first and second detection means 20, 30 across common ones of the terminal portions, while allowing them be capacitively coupled with the terminal portions. The first and second detection means 20, 30 generates detection signals allowing the presence of a defect in each of the terminal portions to be determined based thereon. The inspection apparatus of the present invention can inspect a defect in a circuit pattern reliably and readily.

摘要翻译： 公开了一种电路图案检查装置，用于检查电路板的导电图案，该电路图案包括具有彼此大致平行布置的多个端子部分的第一和第二梳状导电图案15a，15b以及连接各自的基部 所述端子部分的锚定端部在一起，其中所述第一梳状导电图案的端子部分相对于所述第二梳状导电图案的端子部分交替布置，并且所述第一第二梳状导电图案15a， 15b分别适应于被提供有交流检测信号并接地。 电路图案检查装置包括第一和第二检测装置20,30，每个检测装置具有用于检测来自第一和第二梳状导电图案的信号的检测电极，以及标量机器人80，其可操作以使第一和第二检测装置 20,30跨过公共端子部分，同时允许它们与端子部分电容耦合。 第一和第二检测装置20,30产生允许基于每个端子部分存在缺陷的检测信号。 本发明的检查装置可以可靠且容易地检查电路图案中的缺陷。

公开(公告)号：US20060043153A1

公开(公告)日：2006-03-02

申请号：US10536997

申请日：2003-11-28

申请人： Shuji Yamaoka ,  Hiroshi Hamori ,  Shogo Ishioka

发明人： Shuji Yamaoka ,  Hiroshi Hamori ,  Shogo Ishioka

IPC分类号： B23Q15/00

CPC分类号： G01R31/2805

摘要： Disclosed is a circuit pattern inspection apparatus for inspecting a plurality of target patterns 15 arrange in lines at least at first and second opposite ends thereof. The inspection apparatus comprises a supply electrode 35 for supplying an inspection signal and a sensor electrode 25 for detecting a detection signal. Each of the supply and sensor electrodes 35, 25 are adapted to be moved across each of the target patterns with a given gap relative to each of the target patterns 15 in such a manner as to allow the inspection signal supplied from the supply electrode 35 to each of the target patterns 15 through a capacitive coupling, to be detected by the sensor electrode capacitively coupled with each of the target patterns 15, so that the presence of disconnection in the target pattern is determined when the detection signal has a value less than a given lower limit, and the presence of short circuit in the target pattern is determined when the detection signal has a value greater than a given upper limit. According to the inspection apparatus of the present invention, the presence of defect in a circuit board can be inspected reliably and readily.

摘要翻译： 公开了一种电路图案检查装置，用于至少在其第一和第二相对端检查排成行的多个目标图案15。 检查装置包括用于提供检查信号的供给电极35和用于检测检测信号的传感器电极25。 供电传感器电极35和传感器电极25中的每一个适于以相对于每个目标图案15的给定间隙移动到每个目标图案上，以允许从供电电极35提供的检查信号 每个目标图案15通过电容耦合，由与每个目标图案15电容耦合的传感器电极检测，使得当检测信号的值小于一个时，确定目标图案中的断开的存在 给定下限，并且当检测信号具有大于给定上限的值时，确定目标图案中的短路的存在。 根据本发明的检查装置，可以可靠且容易地检查电路板中的缺陷的存在。