Abstract:
A device for accessing data stored on a medium includes a substrate that has a transducer on a back side, a bottom side facing the disc, and a surface that protrudes from the bottom side. An insulation layer is placed on top of the surface. An electrostatic actuator electrode is placed on top of the insulation layer. The electrostatic actuator electrode faces the medium across an electrostatically charged portion of an air layer. The electrostatic actuator electrode protrudes above the surface into the electrostatically charged portion of the air layer.
Abstract:
An electrostatic actuator for adjusting a spacing. A first body has an electrically conducting surface, and a second body has a body surface separated by the spacing from the electrically conducting surface. A conductor layer and an actuator electrode are recessed in the second body, and an electrode face faces the electrically conducting surface across the spacing. The actuator electrode comprises a semi-insulating material with a combination of electrical resistivity and thickness which prevents shorting of the conductor layer to the electrical conducting surface through a dielectric breakdown in the spacing.